Microsystèmes électromécaniques

- mems -


L'équipe MEMS développe des stratégies qui visent à augmenter les performances, la fiabilité et l'intégration des dispositifs MEMS. De nouvelles fonctionnalités et de nouveaux mécanismes de transduction basés sur l'utilisation de nanomatériaux, de biomatériaux et de technologies polymères sont également explorés pour des applications dans les domaines de l'instrumentation, de l’environnement et de la santé.


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Interfaces Bioélectroniques Souples

Nous concevons des interfaces bioélectroniques souples en couplant des technologies polymères avec des nanomatériaux, des biomatériaux et des matériaux biodégradables. Ces interfaces sont principalement utilisées pour des mesures électrophysiologiques sur le système nerveux central et périphérique, in vivo sur petit animal, ex vivo sur tranches et in vitro sur des modèles organoïdes.

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MEMS pour l'Ingénierie Tissulaire

Nous exploitons diverses fonctionnalités des MEMS pour générer des stimuli mécaniques et/ou électriques sur des cultures cellulaires 2D et 3D. Ces approches sont utilisées notamment pour la maturation de cellules cardiaques issues de la différentiation de cellules souches humaines.

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Capteurs et Actionneurs Souples

Nous développons diverses approches à base d'hydrogels poreux pour optimiser l'actionnement de dispositifs souples de type muscles artificiels. Nous concevons également des capteurs flexibles à base de nanomatériaux et des capteurs de pression intracrânienne.

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Capteurs et Actionneurs Silicium

Ces dispositifs MEMS sont capables de générer et de détecter des mouvements et des vibrations à des échelles incroyablement petites allant de quelques micromètres à moins du picomètre. Leurs utilisations vont de la manipulation frugale en énergie de données logiques à l’amélioration des performances de mesure des capteurs de force utilisés en microscopie à force atomique.

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Dernières Publications

2024

Articles dans une revue

Kamil Elkhoury, Sacha Kodeih, Eduardo Enciso-Martínez, Ali Maziz, Christian Bergaud. Advancing Cardiomyocyte Maturation: Current Strategies and Promising Conductive Polymer‐Based Approaches. Advanced Healthcare Materials, In press, ⟨10.1002/adhm.202303288⟩. ⟨hal-04484428⟩

Rajat Gujrati, Ali Kassem, Cédric Ayela, Fabrice Mathieu, Liviu Nicu, et al.. Transfer of III-nitride epitaxial layers onto pre-patterned silicon substrates for the simple fabrication of free-standing MEMS. Applied Physics Letters, 2024, 124 (10), pp.104102. ⟨10.1063/5.0191772⟩. ⟨hal-04495378⟩

Mohammadreza Rostami, Aleksandra Marković, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, et al.. Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication. Advanced Science, 2024, 11 (12), pp.2303518. ⟨10.1002/advs.202303518⟩. ⟨hal-04407843⟩

2023

Articles dans une revue

Refik Baris Yilmaz, Yosr Chaabane, Vincent Mansard. Development of a Soft Actuator from Fast Swelling Macroporous PNIPAM Gels for Smart Braille Device Applications in Haptic Technology. ACS Applied Materials & Interfaces, 2023, 15 (5), pp.7340-7352. ⟨10.1021/acsami.2c17835⟩. ⟨hal-03968137⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications (Adv. Mater. 39/2023). Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202370281⟩. ⟨hal-04234509⟩

Kornél Kistamás, Anna Müller, Suchitra Muenthaisong, Federica Lamberto, Melinda Zana, et al.. Multifactorial approaches to enhance maturation of human iPSC-derived cardiomyocytes. Journal of Molecular Liquids, 2023, 387, pp.122668. ⟨10.1016/j.molliq.2023.122668⟩. ⟨hal-04308454⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications. Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202302472⟩. ⟨hal-04234494⟩

Rémi Courson, Oleksii Bratash, Ali Maziz, Cloé Desmet, Ricardo Alvarado Meza, et al.. Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing. Microsystems & Nanoengineering, 2023, 9 (1), pp.85. ⟨10.1038/s41378-023-00559-3⟩. ⟨hal-04266785⟩

Antoine Amestoy, Aarushee Rangra, Vincent Mansard, Marie-Hélène Delville, Fabrice Severac, et al.. Highly stable low-strain flexible sensors based on gold nanoparticles/silica nanohelices. ACS Applied Materials & Interfaces, 2023, 15 (33), pp.39480-39493. ⟨10.1021/acsami.3c05852⟩. ⟨hal-04187756⟩

Communications dans un congrès

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩

Aleksandra Marković, Hervé Fanet, Gaël Pillonnet, Bernard Legrand, Laurent Mazenq, et al.. ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATION USING CONTACTLESS CAPACITIVE MEMS. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2023, Kyoto (Japan), Japan. pp.546-549. ⟨hal-04241697⟩

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨hal-03951363⟩

Rapports

Eric Tournié, Jean-Marc Allain, Mathieu Arnoux, Nathalie Bardou, Skandar Basrour, et al.. Rapport d’évaluation de l’unité FEMTO-ST – Franche-Comté Électronique, Mécanique, Thermique et Optiques - Sciences et Technologies : Sciences et Technologies. Campagne d’évaluation 2022-2023. C2023-EV-0251215K-DER-PUR230023102-RF, Hcéres. 2023, pp.1-51. ⟨hal-04505233⟩

2022

Articles dans une revue

A. Calvel, E. Barbeau, J.C. Sol, J.A. Lotterie, K. Guines, et al.. HP26: Electrophysiological properties of electrical brain stimulations and their impact on neuronal activity during stereoelectroencephalography in epilepsy. Clinical Neurophysiology, 2022, 135, pp.e7. ⟨10.1016/j.clinph.2021.11.028⟩. ⟨hal-03865318⟩

Jose Elias Angulo Cervera, Mario Piedrahita-Bello, Baptiste Martin, Eric Dantras, Liviu Nicu, et al.. The crystallinity and piezoelectric properties of spray-coated films of P(VDF70-TrFE30): effect of film thickness and spin-crossover nanofillers. Journal of Materials Chemistry C, 2022, 10 (21), pp.8466-8473. ⟨10.1039/D2TC01162J⟩. ⟨hal-03670058⟩

L Schwab, P E Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩. ⟨hal-03326075v2⟩

Laure Abensur Vuillaume, Justine Frija-Masson, Meriem Hadjiat, Thomas Riquier, Marie-Pia D’ortho, et al.. Biosensors for the Rapid Detection of Cardiovascular Biomarkers of Vital Interest: Needs, Analysis and Perspectives. Journal of Personalized Medicine, 2022, 12, ⟨10.3390/jpm12121942⟩. ⟨hal-04266801⟩

Clement Cointe, Adrian Laborde, Lionel Nowak, Dina N Arvanitis, David Bourrier, et al.. Scalable Batch Fabrication of Ultrathin Flexible Neural Probes using Bioresorbable Silk Layer. Microsystems & Nanoengineering, 2022, 8, pp.21. ⟨10.1038/s41378-022-00353-7⟩. ⟨hal-03456630⟩

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Panče Naumov, Thierry Leichle, et al.. Microelectromechanical devices driven by thermosalient effects. Cell Reports Physical Science, 2022, 3 (11), pp.101133. ⟨10.1016/j.xcrp.2022.101133⟩. ⟨hal-03840274⟩

Yurii S Bibik, José E Angulo-Cervera, Rostyslav D Lampeka, Il'Ya Gural'Skiy. Tunable mechanical properties of [Fe(pyrazine){Au(CN)2}2]–PVDF composite films with spin transitions. Polymer, 2022, 238, pp.124410. ⟨10.1016/j.polymer.2021.124410⟩. ⟨hal-03474282⟩

Laure Abensur Vuillaume, Thierry Leichle, Pierrick Le Borgne, Mathieu Grajoszex, Christophe Goetz, et al.. Relevant Biomarkers in Medical Practices: An Analysis of the Needs Addressed by an International Survey. Journal of Personalized Medicine, 2022, 12 (1), pp.106. ⟨10.3390/jpm12010106⟩. ⟨hal-03835475⟩

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

Communications dans un congrès

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Laurent Colin, et al.. H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France. ⟨hal-03778623⟩

Inès Muguet, Fabrice Mathieu, Ali Maziz, Laurent Mazenq, Guilhem Larrieu. Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution. Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03845587⟩

Clement Cointe, Asma Eddarir, Dina Arvanitis, Christian Bergaud, Ali Maziz. A Top-Down Fabrication Approach For Delivering Implantable and Ultrathin Flexible Brain Probes. IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), Jan 2022, Tokyo, Japan. pp.420-423, ⟨10.1109/MEMS51670.2022.9699601⟩. ⟨hal-03865296⟩

Venkata Suresh Vajrala, Asma Eddarir, Sophie Pautot, Christian Bergaud, Ali Maziz. Flexible and Hollow Micro Ring Electrode Arrays for Multi-Directional Monitoring of 3D Neuronal Networks. 2022 MRS Spring Meeting & exhibit, May 2022, Honololu, Hawaii, United States. ⟨hal-04163332⟩

Aleksandra Markovic, Gaël Pillonnet, Bernard Legrand. Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime. Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France. ⟨hal-03649053⟩

Comptes rendus de conférences

Vincent Gerbaud, Pierre Aimar, François Charru, Olivier Eichwald, Julia Hidalgo, et al.. Science en conscience, enjeux écologiques et de société - Bilan et perspectives des Assises toulousaines de la Recherche en Ingénierie 2022. Assises toulousaines de la Recherche en Ingénierie 2022, 2022. ⟨hal-04235199⟩

2021

Articles dans une revue

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

Venkata Suresh Vajrala, Baptiste Alric, Adrian Laborde, Camille Colin, Emmanuel Suraniti, et al.. Microwell Array Based Opto‐Electrochemical Detections Revealing Co‐Adaptation of Rheological Properties and Oxygen Metabolism in Budding Yeast. Advanced Biology, 2021, 5 (7), pp.2100484. ⟨10.1002/adbi.202100484⟩. ⟨hal-03228340⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Barbora Brachňaková, Alejandro Enríquez-Cabrera, Liviu Nicu, et al.. Photoactuation of micromechanical devices by photochromic molecules. Materials Advances, 2021, 2 (15), pp.5057-5061. ⟨10.1039/d1ma00480h⟩. ⟨hal-03285954⟩

Abdulghani Ismail, Pascale Pham, Lucie Descamps, Ali Maziz, Emeline Descamps, et al.. Contactless Bio‐Electrofunctionalization of Planar Micropores. Advanced Materials Technologies, 2021, 6 (6), pp.2001154. ⟨10.1002/admt.202001154⟩. ⟨hal-03259683⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Alejandro Enriquez-Cabrera, Gábor Molnár, Bertrand Tondu, et al.. Colossal expansion and fast motion in spin-crossover@polymer actuators. Materials Horizons, 2021, 8 (11), pp.3055-3062. ⟨10.1039/d1mh00966d⟩. ⟨hal-03375327⟩

Denis Lagrange, Nicolas Mauran, Lucien Schwab, Bernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩. ⟨hal-02974151⟩

Ali Maziz, Erdoğan Özgür, Christian Bergaud, Lokman Uzun. Progress in conducting polymers for biointerfacing and biorecognition applications. Sensors and Actuators Reports, 2021, 3, pp.100035. ⟨10.1016/j.snr.2021.100035⟩. ⟨hal-03456623⟩

Vincent Mansard. Macroporous smart gel based on pH-sensitive polyacrylic polymer for the development of large size artificial muscle with linear contraction. Soft Matter, 2021, 17 (42), pp.9644-9652. ⟨10.1039/D1SM01078F⟩. ⟨hal-03347477⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel G Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Nanofibrous PEDOT-Carbon Composite on Flexible Probes for Soft Neural Interfacing. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.780197. ⟨10.3389/fbioe.2021.780197⟩. ⟨hal-03427406⟩

Valentina Castagnola, Elisa Castagnola, Christian Bergaud, Davide Ricci. Editorial: Short-Term Versus Long-Term Challenges in Functional Biomaterials Interfacing Living Systems: Two Sides of the Coin. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.723451. ⟨10.3389/fbioe.2021.723451⟩. ⟨hal-03618183⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-Porous Composite for High Performance Multifunctional Neural Microelectrode. ECS Transactions, 2021, 104 (2), pp.3-5. ⟨10.1149/10402.0003ecst⟩. ⟨hal-03456618⟩

Inga Tijunelyte, Rémi Malbec, Bayan Chami, Jean Cacheux, Christophe Dez, et al.. micro-RNA 21 detection with a limit of 2 pM in 1 min using a size-accordable concentration module operated by electrohydrodynamic actuation. Biosensors and Bioelectronics, 2021, 178, pp.112992. ⟨10.1016/j.bios.2021.112992⟩. ⟨hal-03449104⟩

Mouhanad Babi, Roberto Riesco, Louisa Boyer, Ayodele Fatona, Angelo Accardo, et al.. Tuning the Nanotopography and Chemical Functionality of 3D Printed Scaffolds through Cellulose Nanocrystal Coatings. ACS Applied Bio Materials, 2021, 4 (12), pp.8443-8455. ⟨10.1021/acsabm.1c00970⟩. ⟨hal-03547189⟩

Yingning He, Douglas Silva de Vasconcellos, David Bourrier, Kata Hajdu, Jean-Olivier Durand, et al.. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications. Sensors and Actuators A: Physical , 2021, 332 (Part 1), pp.113089. ⟨10.1016/j.sna.2021.113089⟩. ⟨hal-03377090⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Fabrice Mathieu, Thierry Leichle, Liviu Nicu, et al.. Investigation of the Effect of Spin Crossover on the Static and Dynamic Properties of MEMS Microcantilevers Coated with Nanocomposite Films of [Fe(Htrz)2(trz)](BF4)@P(VDF-TrFE). Magnetochemistry, 2021, 7 (8), pp.114. ⟨10.3390/magnetochemistry7080114⟩. ⟨hal-03329761⟩

Communications dans un congrès

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maira Dolores Manrique Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials. 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021), Apr 2021, Xiamen, China. ⟨hal-03210652⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-porous Composite For High Performance Multifunctional Neural Microelectrode. 240th ElectroChemical Society Meeting, Oct 2021, Orlando, United States. ⟨hal-03445109⟩

Inès Muguet, Ali Maziz, Laurent Mazenq, Fabrice Mathieu, Guilhem Larrieu. Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity. 2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States. ⟨hal-03845567⟩

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maria Dolores Manrique-Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China. ⟨hal-03424049⟩

2020

Articles dans une revue

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Carbon nanofiber-PEDOT composite films as novel microelectrode for neural interfaces and biosensing. Biosensors and Bioelectronics, 2020, 165, pp.112413. ⟨10.1016/j.bios.2020.112413⟩. ⟨hal-03022944⟩

Daisuke Saya, Denis Dezest, Aaron Welsh, Fabrice Mathieu, Olivier Thomas, et al.. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films. Journal of Micromechanics and Microengineering, 2020, 30 (3), pp.035004. ⟨10.1088/1361-6439/ab60bf⟩. ⟨hal-02453806v2⟩

Cloé Desmet, Karim Vindas, Ricardo Alvarado Meza, Patrick Garrigue, Silvia Voci, et al.. Multiplexed Remote SPR Detection of Biological Interactions through Optical Fiber Bundles. Sensors, 2020, 20 (2), pp.511. ⟨10.3390/s20020511⟩. ⟨hal-03023584⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Rémi Courson, Gábor Molnár, Laurent Malaquin, et al.. 4D printing with spin-crossover polymer composites. Journal of Materials Chemistry C, 2020, 18 (8), pp.6001-6005. ⟨10.1039/d0tc01532f⟩. ⟨hal-02570972⟩

Soufiane Karrakchou, Suresh Sundaram, Taha Ayari, Adama Mballo, Phuong Vuong, et al.. Effectiveness of selective area growth using van der Waals h-BN layer for crack-free transfer of large-size III-N devices onto arbitrary substrates. Scientific Reports, 2020, 10 (1), pp.211. ⟨10.1038/s41598-020-77681-z⟩. ⟨hal-03120983⟩

Silvia Voci, Abdulghani Ismail, Pascale Pham, Jing Yu, Ali Maziz, et al.. Wireless Enhanced Electrochemiluminescence at a Bipolar Microelectrode in a Solid-State Micropore. Journal of The Electrochemical Society, 2020, 167 (13), pp.137509. ⟨10.1149/1945-7111/abbbc1⟩. ⟨hal-03024426⟩

Karl Ridier, Yuteng Zhang, Mario Piedrahita-Bello, Carlos M. Quintero, Lionel Salmon, et al.. Heat Capacity and Thermal Damping Properties of Spin‐Crossover Molecules: A New Look at an Old Topic. Advanced Materials, 2020, 32 (21), pp.2000987. ⟨10.1002/adma.202000987⟩. ⟨hal-02570846⟩

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Microelectrodes from PEDOT-carbon nanofiber composite for high performance neural recording, stimulation and neurochemical sensing. MethodsX, 2020, 7, pp.101106. ⟨10.1016/j.mex.2020.101106⟩. ⟨hal-03003023⟩

Karl Ridier, Alin-Ciprian Bas, Yuteng Zhang, Lucie Routaboul, Lionel Salmon, et al.. Unprecedented switching endurance affords for high-resolution surface temperature mapping using a spin-crossover film. Nature Communications, 2020, 11 (1), pp.3611. ⟨10.1038/s41467-020-17362-7⟩. ⟨hal-02948898⟩

Thierry Leichle, Liviu Nicu, Thomas Alava. MEMS Biosensors and COVID-19: Missed Opportunity. ACS Sensors, 2020, 5 (11), pp.3297-3305. ⟨10.1021/acssensors.0c01463⟩. ⟨hal-02972242⟩

Pierre Etienne Allain, Lucien Schwab, Colin Mismer, Marc Gély, Estelle Mairiaux, et al.. Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces. Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩. ⟨hal-01908683v2⟩

Communications dans un congrès

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

2019

Articles dans une revue

Abdulghani Ismail, Silvia Voci, Pascale Pham, Loïc Leroy, Ali Maziz, et al.. Enhanced Bipolar Electrochemistry at Solid-State Micropores: Demonstration by Wireless Electrochemiluminescence Imaging. Analytical Chemistry, 2019, 91 (14), pp.8900-8907. ⟨10.1021/acs.analchem.9b00559⟩. ⟨hal-02392368⟩

Rémi Malbec, Bayan Chami, Lorène Aeschbach, Gustavo Ruiz Buendía, Marius Socol, et al.. µLAS: Sizing of expanded trinucleotide repeats with femtomolar sensitivity in less than 5 minutes. Scientific Reports, 2019, 9, pp.23. ⟨10.1038/s41598-018-36632-5⟩. ⟨hal-01997319⟩

Chih-Cheng Chang, Ian Williams, Arash Nowbahar, Vincent Mansard, Jodi Mecca, et al.. Effect of Ethylcellulose on the Rheology and Mechanical Heterogeneity of Asphaltene Films at the Oil–Water Interface. Langmuir, 2019, 35 (29), pp.9374-9381. ⟨10.1021/acs.langmuir.9b00834⟩. ⟨hal-02391658⟩

Arash Nowbahar, Art O'Connor, Vincent Mansard, Patrick Spicer, Todd Squires. Salt comets in hand sanitizer: A simple probe of microgel collapse dynamics. Physical Review Fluids, 2019, 4 (6), pp.061301. ⟨10.1103/PhysRevFluids.4.061301⟩. ⟨hal-02391635⟩

Aurelie Bouchet-Spinelli, Emeline Descamps, Jie Liu, Abdulghani Ismail, Pascale Pham, et al.. Polarization Induced Electro-Functionalization of Pore Walls: A Contactless Technology. Biosensors, 2019, 9 (4), pp.E121. ⟨10.3390/bios9040121⟩. ⟨hal-02382079⟩

Jean Cacheux, Aurélien Bancaud, Thierry Leichle, Pierre Cordelier. Technological Challenges and Future Issues for the Detection of Circulating MicroRNAs in Patients With Cancer. Frontiers in Chemistry, 2019, 7, ⟨10.3389/fchem.2019.00815⟩. ⟨hal-02392369⟩

Roberto Riesco, Louisa Boyer, Sarah Blosse, Pauline Lefebvre, Pauline Assemat, et al.. Water-in-PDMS emulsion templating of highly interconnected porous architectures for 3D cell culture. ACS Applied Materials & Interfaces, 2019, 11 (32), pp.28631-28640. ⟨10.1021/acsami.9b07564⟩. ⟨hal-02379789⟩

Denis Dezest, Thierry Leichle, Pattamon Teerapanich, Fabrice Mathieu, B Tse Sum Bui, et al.. Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers. Journal of Micromechanics and Microengineering, 2019, 29 (2), pp.025013. ⟨10.1088/1361-6439/aaf84e⟩. ⟨hal-02392367⟩

Communications dans un congrès

Lucien Schwab, Pierre-Etienne Allain, Louise Banniard, Nicolas Mauran, Denis Lagrange, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩

Lucien Schwab, Pierre Allain, Didier Theron, Marc Faucher, Benjamin Walter, et al.. Optomechanics: a key towards next-generation experiments in atomic force microscopy?. International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France. ⟨hal-02407634⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Thomas Blon, et al.. Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩. ⟨hal-02413900⟩

Rapports

Laurent Mazenq, Lucien Schwab, Nicolas Mauran, Denis Lagrange, Xavier Dollat, et al.. Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide. [Rapport Technique] LAAS-CNRS. 2019. ⟨hal-03603368⟩

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Thèses / HDR soutenues

2023

Refik Baris Yilmaz, Thèse: Développement d'actionneurs souples : Étude de l'actionnement et des propriétés mécaniques des hydrogels macroporeux sensibles à la chaleur et à la chimie

2022

Asma Eddarir, Thèse: Conception et réalisation d'un dispositif tridimensionnel à matrice de microélectrodes pour la mesure électrophysiologique et la détection pH d'une culture neuronale in vitro

2021

Aarushee Rangra, Thèse: Fabrication et caractérisation de capteurs de déformation flexibles à base d’assemblage de nanoparticules d'or greffées sur des nanostructures 1D

Valentin Saunier, Thèse: Microélectrodes nanocomposites implantables couplant enregistrement/stimulation neurale et détection électrochimique de neurotransmetteurs

2020

Douglas Silva de Vasconcellos, Thèse: Intégration monolithique de multiples membranes de silicium poreux pour laboratoires sur puce

Lucien Schwab, Thèse: Sonde opto-mécaniques pour la microscopie AFM rapide

2019

Pierre Moritz, Thèse: Réalisation de micro-aimants par assemblage capillaire de nanobâtonnets de cobalt assisté par magnétophorèse - Applications aux MEMS à transduction électromagnétique

Thierry Leichle, Habilitation à diriger des recherches: BioMEMS pour l'Analyse Biomoléculaire : de l'intérêt du confinement et de la réduction d'échelle pour la quantification directe de biomarqueurs

2018

Cécile Fuinel, Thèse: Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS

2016

Naima Sabrina Habtoun, Thèse: Caractérisation et intégration fonctionnelle de nanohélices inorganiques et métalliques : vers un nanosystème électromécanique

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