Microsystèmes électromécaniques

- mems -


L'équipe MEMS développe des stratégies qui visent à augmenter les performances, la fiabilité et l'intégration des dispositifs MEMS. De nouvelles fonctionnalités et de nouveaux mécanismes de transduction basés sur l'utilisation de nanomatériaux, de biomatériaux et de technologies polymères sont également explorés pour des applications dans les domaines de l'instrumentation, de l’environnement et de la santé.


Les activités de recherche de l'équipe s'articulent autour de cinq thématiques

Interfaces Bioélectroniques Souples

Nous concevons des interfaces bioélectroniques souples en couplant des technologies polymères avec des nanomatériaux, des biomatériaux et des matériaux biodégradables. Ces interfaces sont principalement utilisées pour des mesures électrophysiologiques sur le système nerveux central et périphérique, in vivo sur petit animal, ex vivo sur tranches et in vitro sur des modèles organoïdes.

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MEMS pour l'Ingénierie Tissulaire

Nous exploitons diverses fonctionnalités des MEMS pour générer des stimuli mécaniques et/ou électriques sur des cultures cellulaires 2D et 3D. Ces approches sont utilisées notamment pour la maturation de cellules cardiaques issues de la différentiation de cellules souches humaines.

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Capteurs et Actionneurs Souples

Nous développons diverses approches à base d'hydrogels poreux pour optimiser l'actionnement de dispositifs souples de type muscles artificiels. Nous concevons également des capteurs flexibles à base de nanomatériaux et des capteurs de pression intracrânienne.

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Capteurs et Actionneurs Silicium

Ces dispositifs MEMS sont capables de générer et de détecter des mouvements et des vibrations à des échelles incroyablement petites allant de quelques micromètres à moins du picomètre. Leurs utilisations vont de la manipulation frugale en énergie de données logiques à l’amélioration des performances de mesure des capteurs de force utilisés en microscopie à force atomique. D'autres approches concernent le développement de capteurs de gaz en environnements sévères.

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Multi-organes sur puce

Cette thématique concerne le développement de plateformes biomimétiques avancées permettant d’explorer et de modéliser les connexions dynamiques entre le cerveau, le coeur et le système nerveux périphérique, notamment via les neurones sensoriels et moteurs et les interactions neurovasculaires. A l’intersection de la bio-ingénierie et des technologies d’organes sur puce, elle vise plus particulièrement à comprendre comment les stimuli mécaniques, électriques et optiques influencent les systèmes cellulaires et leurs interactions. Ces approches innovantes facilitent la compréhension des maladies et le test de thérapies ouvrant la voie à des avancées majeures en neurosciences et en médecine personnalisée.

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Dernières Publications

2025

Articles dans une revue

Oleksii Bratash, Rémi Courson, Laurent Malaquin, Thierry Leichle, Arnaud Buhot, et al.. Multiplexed Bio‐detection on an Interferometric Optical Waveguide Assembly. Advanced Materials Interfaces, 2025, ⟨10.1002/admi.202400941⟩. ⟨hal-04929729⟩

Ion Soroceanu, Onkar Kulkarni, Eric Dantras, Aurelian Rotaru, Lionel Salmon, et al.. Investigation of the effect of ferroelectric polarization on the spin state of spin crossover complexes embedded in a piezopolymer matrix. Chemical Physics Letters, 2025, 859, pp.141775. ⟨10.1016/J.CPLETT.2024.141775⟩. ⟨hal-04814581⟩

2024

Articles dans une revue

Kamil Elkhoury, Sacha Kodeih, Eduardo Enciso-Martínez, Ali Maziz, Christian Bergaud. Advancing Cardiomyocyte Maturation: Current Strategies and Promising Conductive Polymer‐Based Approaches. Advanced Healthcare Materials, 2024, 13 (13), pp.2303288. ⟨10.1002/adhm.202303288⟩. ⟨hal-04484428⟩

Mohammadreza Rostami, Aleksandra Marković, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, et al.. Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication. Advanced Science, 2024, 11 (12), pp.2303518. ⟨10.1002/advs.202303518⟩. ⟨hal-04407843⟩

Douglas Silva de Vasconcellos, David Bourrier, Éric Imbernon, Kata Hajdu, Yingning He, et al.. Process for integrating multiple porous silicon membranes with variable characteristics into planar microfluidics. Sensors and Actuators A: Physical , 2024, 377, pp.115715. ⟨10.1016/j.sna.2024.115715⟩. ⟨hal-04776651⟩

Onkar Kulkarni, Alejandro Enriquez-Cabrera, Xinyu Yang, Julie Foncy, Liviu Nicu, et al.. Stereolithography 3D Printing of Stimuli-Responsive Spin Crossover@Polymer Nanocomposites with Optimized Actuating Properties. Nanomaterials, 2024, 14 (15), pp.1243. ⟨10.3390/nano14151243⟩. ⟨hal-04661535⟩

Rajat Gujrati, Ali Kassem, Cédric Ayela, Fabrice Mathieu, Liviu Nicu, et al.. Transfer of III-nitride epitaxial layers onto pre-patterned silicon substrates for the simple fabrication of free-standing MEMS. Applied Physics Letters, 2024, 124 (10), pp.104102. ⟨10.1063/5.0191772⟩. ⟨hal-04495378⟩

Kornél Kistamás, Federica Lamberto, Raminta Vaiciuleviciute, Filipa Leal, Suchitra Muenthaisong, et al.. The Current State of Realistic Heart Models for Disease Modelling and Cardiotoxicity. International Journal of Molecular Sciences, 2024, 25 (17), pp.9186. ⟨10.3390/ijms25179186⟩. ⟨hal-04732070⟩

Aleksandra Marković, Mathis Lefebvre, Laurent Mazenq, Samuel Charlot, Marc Gély, et al.. Suspended tip overhanging from chip edge for atomic force microscopy with an optomechanical resonator. Journal of Optical Microsystems, 2024, 4 (3), pp.033501. ⟨10.1117/1.JOM.4.3.033501⟩. ⟨hal-04689661⟩

A. Marković, H. Fanet, Gaël Pillonnet, B. Legrand. Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration. Sensors and Actuators A: Physical , 2024, 376, pp.115652. ⟨10.1016/j.sna.2024.115652⟩. ⟨hal-04669764⟩

R Vaiciuleviciute, A Alaburda, A Shelest, Kamil Elkhoury, Ali Maziz, et al.. HiPSC-derived cardiomyocyte cultivation and measurement of electrophysiological properties on gelatine/glucose/polypyrrole scaffold. Cardiovascular Research, 2024, 120 (Supplement_1), pp.cvae088.042. ⟨10.1093/cvr/cvae088.042⟩. ⟨hal-04732086⟩

Communications dans un congrès

Melik Maksem, Adrien Bourgine, Kosseila Ait-Oukaci, Georgiana Dragomir-Maties, Thierry Leichle, et al.. Intégration de nanoparticules magnétiques douces sur inductances planaires pour applications RF. XXIIIèmes Journées Nationales Microondes (JNM 2024), Jun 2024, Juan les bains, France. ⟨hal-04904622⟩

Suyambulingham Subramanian, Clément Le Fur, Lucien Schwab, Ilan Shlesinger, Pierre Allain, et al.. Sondes optomécaniques : vers l'AFM aux fréquences GHz. Forum de microscopie à sondes locales, Apr 2024, Lyon, France. ⟨hal-04562805⟩

Autres documents

Suyambulingham Subramanian, Nicolas Mauran, Chérif Bélacel, Guillaume Jourdan, Ivan Favero, et al.. Unveiling Hidden Dynamics of Biological Process with Optomechanical AFM with sub-µs time resolution. Annual Meeting of the GDR MecaQ, Sep 2024, Grenoble, France. ⟨hal-04819714⟩

2023

Articles dans une revue

Antoine Amestoy, Aarushee Rangra, Vincent Mansard, Marie-Hélène Delville, Fabrice Severac, et al.. Highly stable low-strain flexible sensors based on gold nanoparticles/silica nanohelices. ACS Applied Materials & Interfaces, 2023, 15 (33), pp.39480-39493. ⟨10.1021/acsami.3c05852⟩. ⟨hal-04187756⟩

Janske Nel, Kamil Elkhoury, Émilie Velot, Arnaud Bianchi, Samir Acherar, et al.. Functionalized liposomes for targeted breast cancer drug delivery. Bioactive Materials, 2023, 24, pp.401-437. ⟨10.1016/j.bioactmat.2022.12.027⟩. ⟨hal-04124742⟩

Deng-Kai Yang, Liang-Kun Yu, Chia-Tzu Kuo, Jui-Hong Weng, Thierry Leïchlé, et al.. Direct in situ and real-time visualization of salt-dependent thiolated-DNA immobilization and biosensing on gold in nanofluidic channels. Sensors and Actuators B: Chemical, 2023, 394, pp.134303. ⟨10.1016/j.snb.2023.134303⟩. ⟨hal-04776649⟩

Rémi Courson, Oleksii Bratash, Ali Maziz, Cloé Desmet, Ricardo Alvarado Meza, et al.. Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing. Microsystems & Nanoengineering, 2023, 9 (1), pp.85. ⟨10.1038/s41378-023-00559-3⟩. ⟨hal-04729110⟩

Lise-Marie Lacroix, Thierry Leichle. Des aimants miniatures fabriqués à partir de nanoparticules. Le petit illustré, regards croisés de chercheur.es, 2023, 51. ⟨hal-04660496⟩

Refik Baris Yilmaz, Yosr Chaabane, Vincent Mansard. Development of a Soft Actuator from Fast Swelling Macroporous PNIPAM Gels for Smart Braille Device Applications in Haptic Technology. ACS Applied Materials & Interfaces, 2023, 15 (5), pp.7340-7352. ⟨10.1021/acsami.2c17835⟩. ⟨hal-03968137⟩

Kornél Kistamás, Anna Müller, Suchitra Muenthaisong, Federica Lamberto, Melinda Zana, et al.. Multifactorial approaches to enhance maturation of human iPSC-derived cardiomyocytes. Journal of Molecular Liquids, 2023, 387, pp.122668. ⟨10.1016/j.molliq.2023.122668⟩. ⟨hal-04308454⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications. Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202302472⟩. ⟨hal-04234494⟩

Rémi Courson, Oleksii Bratash, Ali Maziz, Cloé Desmet, Ricardo Alvarado Meza, et al.. Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing. Microsystems & Nanoengineering, 2023, 9 (1), pp.85. ⟨10.1038/s41378-023-00559-3⟩. ⟨hal-04266785⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications (Adv. Mater. 39/2023). Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202370281⟩. ⟨hal-04234509⟩

Communications dans un congrès

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨10.1109/MEMS49605.2023.10052563⟩. ⟨hal-03951363⟩

Aleksandra Marković, Hervé Fanet, Gaël Pillonnet, Bernard Legrand, Laurent Mazenq, et al.. ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATION USING CONTACTLESS CAPACITIVE MEMS. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2023, Kyoto (Japan), Japan. pp.546-549. ⟨hal-04241697⟩

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩

José Elías Angulo-Cervera, Frederico Orlandini Keller, Ilona Lecerf, Pierre Moritz, Fabrice Mathieu, et al.. Monolithic integration of thick NDFEB micro-magnets into MEMS: application to electromagnetic energy harvesting. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Jun 2023, Kyoto, Japan. ⟨hal-04660346⟩

Rapports

Eric Tournié, Jean-Marc Allain, Mathieu Arnoux, Nathalie Bardou, Skandar Basrour, et al.. Rapport d’évaluation de l’unité FEMTO-ST – Franche-Comté Électronique, Mécanique, Thermique et Optiques - Sciences et Technologies. C2023-EV-0251215K-DER-PUR230023102-RF, Hcéres. 2023, pp.1-51. ⟨hal-04505233⟩

2022

Articles dans une revue

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

A. Calvel, E. Barbeau, J.C. Sol, J.A. Lotterie, K. Guines, et al.. HP26: Electrophysiological properties of electrical brain stimulations and their impact on neuronal activity during stereoelectroencephalography in epilepsy. Clinical Neurophysiology, 2022, 135, pp.e7. ⟨10.1016/j.clinph.2021.11.028⟩. ⟨hal-03865318⟩

Jose Elias Angulo Cervera, Mario Piedrahita-Bello, Baptiste Martin, Eric Dantras, Liviu Nicu, et al.. The crystallinity and piezoelectric properties of spray-coated films of P(VDF70-TrFE30): effect of film thickness and spin-crossover nanofillers. Journal of Materials Chemistry C, 2022, 10 (21), pp.8466-8473. ⟨10.1039/D2TC01162J⟩. ⟨hal-03670058⟩

L Schwab, P E Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩. ⟨hal-03326075v2⟩

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

Laure Abensur Vuillaume, Justine Frija-Masson, Meriem Hadjiat, Thomas Riquier, Marie-Pia D’ortho, et al.. Biosensors for the Rapid Detection of Cardiovascular Biomarkers of Vital Interest: Needs, Analysis and Perspectives. Journal of Personalized Medicine, 2022, 12, ⟨10.3390/jpm12121942⟩. ⟨hal-04266801⟩

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Panče Naumov, Thierry Leichle, et al.. Microelectromechanical devices driven by thermosalient effects. Cell Reports Physical Science, 2022, 3 (11), pp.101133. ⟨10.1016/j.xcrp.2022.101133⟩. ⟨hal-03840274⟩

Clement Cointe, Adrian Laborde, Lionel Nowak, Dina N Arvanitis, David Bourrier, et al.. Scalable Batch Fabrication of Ultrathin Flexible Neural Probes using Bioresorbable Silk Layer. Microsystems & Nanoengineering, 2022, 8, pp.21. ⟨10.1038/s41378-022-00353-7⟩. ⟨hal-03456630⟩

Yurii S Bibik, José E Angulo-Cervera, Rostyslav D Lampeka, Il'Ya Gural'Skiy. Tunable mechanical properties of [Fe(pyrazine){Au(CN)2}2]–PVDF composite films with spin transitions. Polymer, 2022, 238, pp.124410. ⟨10.1016/j.polymer.2021.124410⟩. ⟨hal-03474282⟩

Laure Abensur Vuillaume, Thierry Leichle, Pierrick Le Borgne, Mathieu Grajoszex, Christophe Goetz, et al.. Relevant Biomarkers in Medical Practices: An Analysis of the Needs Addressed by an International Survey. Journal of Personalized Medicine, 2022, 12 (1), pp.106. ⟨10.3390/jpm12010106⟩. ⟨hal-03835475⟩

Communications dans un congrès

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Laurent Colin, et al.. H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France. ⟨hal-03778623⟩

Venkata Suresh Vajrala, Asma Eddarir, Sophie Pautot, Christian Bergaud, Ali Maziz. Flexible and Hollow Micro Ring Electrode Arrays for Multi-Directional Monitoring of 3D Neuronal Networks. 2022 MRS Spring Meeting & exhibit, May 2022, Honololu, Hawaii, United States. ⟨hal-04163332⟩

Clement Cointe, Asma Eddarir, Dina Arvanitis, Christian Bergaud, Ali Maziz. A Top-Down Fabrication Approach For Delivering Implantable and Ultrathin Flexible Brain Probes. IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), Jan 2022, Tokyo, Japan. pp.420-423, ⟨10.1109/MEMS51670.2022.9699601⟩. ⟨hal-03865296⟩

Inès Muguet, Fabrice Mathieu, Ali Maziz, Laurent Mazenq, Guilhem Larrieu. Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution. Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03845587⟩

Aleksandra Markovic, Gaël Pillonnet, Bernard Legrand. Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime. Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France. ⟨hal-03649053⟩

Comptes rendus de conférences

Vincent Gerbaud, Pierre Aimar, François Charru, Olivier Eichwald, Julia Hidalgo, et al.. Science en conscience, enjeux écologiques et de société - Bilan et perspectives des Assises toulousaines de la Recherche en Ingénierie 2022. Assises toulousaines de la Recherche en Ingénierie 2022, Jul 2022, Toulouse, France. 2022. ⟨hal-04235199⟩

2021

Articles dans une revue

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Barbora Brachňaková, Alejandro Enríquez-Cabrera, Liviu Nicu, et al.. Photoactuation of micromechanical devices by photochromic molecules. Materials Advances, 2021, 2 (15), pp.5057-5061. ⟨10.1039/d1ma00480h⟩. ⟨hal-03285954⟩

Inga Tijunelyte, Rémi Malbec, Bayan Chami, Jean Cacheux, Christophe Dez, et al.. micro-RNA 21 detection with a limit of 2 pM in 1 min using a size-accordable concentration module operated by electrohydrodynamic actuation. Biosensors and Bioelectronics, 2021, 178, pp.112992. ⟨10.1016/j.bios.2021.112992⟩. ⟨hal-03449104⟩

Valentina Castagnola, Elisa Castagnola, Christian Bergaud, Davide Ricci. Editorial: Short-Term Versus Long-Term Challenges in Functional Biomaterials Interfacing Living Systems: Two Sides of the Coin. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.723451. ⟨10.3389/fbioe.2021.723451⟩. ⟨hal-03618183⟩

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

Mouhanad Babi, Roberto Riesco, Louisa Boyer, Ayodele Fatona, Angelo Accardo, et al.. Tuning the Nanotopography and Chemical Functionality of 3D Printed Scaffolds through Cellulose Nanocrystal Coatings. ACS Applied Bio Materials, 2021, 4 (12), pp.8443-8455. ⟨10.1021/acsabm.1c00970⟩. ⟨hal-03547189⟩

Yingning He, Douglas Silva de Vasconcellos, David Bourrier, Kata Hajdu, Jean-Olivier Durand, et al.. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications. Sensors and Actuators A: Physical , 2021, 332 (Part 1), pp.113089. ⟨10.1016/j.sna.2021.113089⟩. ⟨hal-03377090⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Fabrice Mathieu, Thierry Leichle, Liviu Nicu, et al.. Investigation of the Effect of Spin Crossover on the Static and Dynamic Properties of MEMS Microcantilevers Coated with Nanocomposite Films of [Fe(Htrz)2(trz)](BF4)@P(VDF-TrFE). Magnetochemistry, 2021, 7 (8), pp.114. ⟨10.3390/magnetochemistry7080114⟩. ⟨hal-03329761⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel G Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Nanofibrous PEDOT-Carbon Composite on Flexible Probes for Soft Neural Interfacing. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.780197. ⟨10.3389/fbioe.2021.780197⟩. ⟨hal-03427406⟩

Vincent Mansard. Macroporous smart gel based on pH-sensitive polyacrylic polymer for the development of large size artificial muscle with linear contraction. Soft Matter, 2021, 17 (42), pp.9644-9652. ⟨10.1039/D1SM01078F⟩. ⟨hal-03347477⟩

Venkata Suresh Vajrala, Baptiste Alric, Adrian Laborde, Camille Colin, Emmanuel Suraniti, et al.. Microwell Array Based Opto‐Electrochemical Detections Revealing Co‐Adaptation of Rheological Properties and Oxygen Metabolism in Budding Yeast. Advanced Biology, 2021, 5 (7), pp.2100484. ⟨10.1002/adbi.202100484⟩. ⟨hal-03228340⟩

Ali Maziz, Erdoğan Özgür, Christian Bergaud, Lokman Uzun. Progress in conducting polymers for biointerfacing and biorecognition applications. Sensors and Actuators Reports, 2021, 3, pp.100035. ⟨10.1016/j.snr.2021.100035⟩. ⟨hal-03456623⟩

Denis Lagrange, Nicolas Mauran, Lucien Schwab, Bernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩. ⟨hal-02974151⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Alejandro Enriquez-Cabrera, Gábor Molnár, Bertrand Tondu, et al.. Colossal expansion and fast motion in spin-crossover@polymer actuators. Materials Horizons, 2021, 8 (11), pp.3055-3062. ⟨10.1039/d1mh00966d⟩. ⟨hal-03375327⟩

Abdulghani Ismail, Pascale Pham, Lucie Descamps, Ali Maziz, Emeline Descamps, et al.. Contactless Bio‐Electrofunctionalization of Planar Micropores. Advanced Materials Technologies, 2021, 6 (6), pp.2001154. ⟨10.1002/admt.202001154⟩. ⟨hal-03259683⟩

Valentina Castagnola, Elisa Castagnola, Christian Bergaud, Davide Ricci. Editorial: Short-Term Versus Long-Term Challenges in Functional Biomaterials Interfacing Living Systems: Two Sides of the Coin. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.723451. ⟨10.3389/fbioe.2021.723451⟩. ⟨hal-04688133⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-Porous Composite for High Performance Multifunctional Neural Microelectrode. ECS Transactions, 2021, 104 (2), pp.3-5. ⟨10.1149/10402.0003ecst⟩. ⟨hal-03456618⟩

Communications dans un congrès

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maria Dolores Manrique-Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China. ⟨hal-03424049⟩

Cloé Desmet, Oleksii Bratash, Karim Vindas, Ricardo Alvarado Meza, Patrick Garrigue, et al.. Multiple SPR detection of biological targets through a microstructured optical fiber bundle. Europtrode XV, Nov 2021, Varsovie, Poland. ⟨hal-04930397⟩

Aarushee Rangra, Antoine Amestoy, Vincent Mansard, Emilie Pouget, Reiko Oda, et al.. High−performance flexible strain sensors based on helical 1D nanostructures with cross−linked gold nanoparticles. 9th International Conference on Sensors - ASIASENSE 2021, Oct 2021, Visioconférence, Thailand. ⟨hal-04576966⟩

Inès Muguet, Ali Maziz, Laurent Mazenq, Fabrice Mathieu, Guilhem Larrieu. Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity. 2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States. ⟨hal-03845567⟩

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maira Dolores Manrique Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials. 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021), Apr 2021, Xiamen, China. ⟨hal-03210652⟩

Pauline Lefebvre, Vincent Mansard, Laurent Malaquin, P. Assemat, Pascal Swider. How mechanical strain might modify transport properties of a biological tissue-mimicking porous media; an experimental approach. 15eme Journée d'Etude des Milieux Poreux, Oct 2021, Starsbourg, France. ⟨hal-04878613⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-porous Composite For High Performance Multifunctional Neural Microelectrode. 240th ElectroChemical Society Meeting, Oct 2021, Orlando, United States. ⟨hal-03445109⟩

2020

Articles dans une revue

Soufiane Karrakchou, Suresh Sundaram, Taha Ayari, Adama Mballo, Phuong Vuong, et al.. Effectiveness of selective area growth using van der Waals h-BN layer for crack-free transfer of large-size III-N devices onto arbitrary substrates. Scientific Reports, 2020, 10 (1), pp.211. ⟨10.1038/s41598-020-77681-z⟩. ⟨hal-03120983⟩

Daisuke Saya, Denis Dezest, Aaron Welsh, Fabrice Mathieu, Olivier Thomas, et al.. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films. Journal of Micromechanics and Microengineering, 2020, 30 (3), pp.035004. ⟨10.1088/1361-6439/ab60bf⟩. ⟨hal-02453806v2⟩

Pierre Etienne Allain, Lucien Schwab, Colin Mismer, Marc Gély, Estelle Mairiaux, et al.. Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces. Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩. ⟨hal-01908683v2⟩

Karl Ridier, Yuteng Zhang, Mario Piedrahita-Bello, Carlos M. Quintero, Lionel Salmon, et al.. Heat Capacity and Thermal Damping Properties of Spin‐Crossover Molecules: A New Look at an Old Topic. Advanced Materials, 2020, 32 (21), pp.2000987. ⟨10.1002/adma.202000987⟩. ⟨hal-02570846⟩

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Carbon nanofiber-PEDOT composite films as novel microelectrode for neural interfaces and biosensing. Biosensors and Bioelectronics, 2020, 165, pp.112413. ⟨10.1016/j.bios.2020.112413⟩. ⟨hal-03022944⟩

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Microelectrodes from PEDOT-carbon nanofiber composite for high performance neural recording, stimulation and neurochemical sensing. MethodsX, 2020, 7, pp.101106. ⟨10.1016/j.mex.2020.101106⟩. ⟨hal-03003023⟩

Karl Ridier, Alin-Ciprian Bas, Yuteng Zhang, Lucie Routaboul, Lionel Salmon, et al.. Unprecedented switching endurance affords for high-resolution surface temperature mapping using a spin-crossover film. Nature Communications, 2020, 11 (1), pp.3611. ⟨10.1038/s41467-020-17362-7⟩. ⟨hal-02948898⟩

Thierry Leichle, Liviu Nicu, Thomas Alava. MEMS Biosensors and COVID-19: Missed Opportunity. ACS Sensors, 2020, 5 (11), pp.3297-3305. ⟨10.1021/acssensors.0c01463⟩. ⟨hal-02972242⟩

Cloé Desmet, Karim Vindas, Ricardo Alvarado Meza, Patrick Garrigue, Silvia Voci, et al.. Multiplexed Remote SPR Detection of Biological Interactions through Optical Fiber Bundles. Sensors, 2020, 20 (2), pp.511. ⟨10.3390/s20020511⟩. ⟨hal-03023584⟩

Silvia Voci, Abdulghani Ismail, Pascale Pham, Jing Yu, Ali Maziz, et al.. Wireless Enhanced Electrochemiluminescence at a Bipolar Microelectrode in a Solid-State Micropore. Journal of The Electrochemical Society, 2020, 167 (13), pp.137509. ⟨10.1149/1945-7111/abbbc1⟩. ⟨hal-03024426⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Rémi Courson, Gábor Molnár, Laurent Malaquin, et al.. 4D printing with spin-crossover polymer composites. Journal of Materials Chemistry C, 2020, 18 (8), pp.6001-6005. ⟨10.1039/d0tc01532f⟩. ⟨hal-02570972⟩

Communications dans un congrès

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩

Projets européens

H2020 RIA LUMP-SUM EMAPS-Cardio (2021-2025) Coordinateur du projet

Projets ANR

ANR AAPG OLYMPIA 2014-2019 Coordinateur du projet

ANR AAPG NEUROMEDDLE 2015-2019 Responsable pour le laboratoire

ANR AAPG NANOHELIFLEX 2016-2021 Responsable pour le laboratoire

ANR AAPG H2MEMS 2016-2021 Responsable pour le laboratoire

ANR AAPG zerÔuate 2019-2024 Responsable pour le laboratoire

ANR AAPG 3DNEUROCHIP 2019-2023 Responsable pour le laboratoire

ANR AAPG 3DBRAIN 2019-2024 Coordinateur du projet

ANR AAPG POMADE 2020-2024 Responsable pour le laboratoire

ANR AAPG HERMES 2022-2026 Coordinateur du projet

ANR AAPG NANOFBI 2022-2023 Responsable pour le laboratoire

ANR Capteurs Quantiques SINPHONY 2023-2028 Responsable pour le laboratoire

ANR AAPG FLEXIGAN 2023-2027 Responsable pour le laboratoire

ANR AAPG CAMICAZE 2023-2027 Responsable pour le laboratoire

ANR AAPG WISPERS 2023-2027 Coordinateur du projet

ANR AAPG MIGNON 2023-2027 Responsable pour le laboratoire

Autres

France 2030 Recherche à risque K-Optoméca 2024-2026 Participant

Institut Interdisciplinaires en Intelligence Artificielle 3IA-ANITI 2019 Coordinateur de projet

Projet Maturation SATT Aquitaine NANOHELIFLEX 2022-2023

Bourse de thèse DGA 2012-2015

Bourse de thèse DGA 2016-2019

Bourse Région-Université de Toulouse 2024-2027

Brevets

Brevet FR3143140 et WO2024120911 2022 Bernard Legrand et al.

Brevet FR1910886 et PCT/EP2020/077495 2019 Christian Bergaud et al.

Thèses / HDR soutenues

2025

Konstantinos Arvanitis, Habilitation à diriger des recherches: Heart-Brain Interactions: Mechanisms and Pathways

2024

Aleksandra Marković, Thèse: Vers des Portes Logiques Ultra-Basse Consommation basées sur des MEMS Capacitifs Sans Contact Opérant en Régime Adiabatique

2023

Refik Baris Yilmaz, Thèse: Développement d'actionneurs souples : l'actionnement et des propriétés mécaniques des hydrogels macroporeux sensibles à la chaleur et à la chimie

2022

Asma Eddarir, Thèse: Conception et réalisation d'un dispositif tridimensionnel à matrice de microélectrodes pour la mesure électrophysiologique et la détection pH d'une culture neuronale in vitro

2021

Aarushee Rangra, Thèse: Fabrication et caractérisation de capteurs de déformation flexibles à base d’assemblage de nanoparticules d'or greffées sur des nanostructures 1D

Valentin Saunier, Thèse: Microélectrodes nanocomposites implantables couplant enregistrement/stimulation neurale et détection électrochimique de neurotransmetteurs

2020

Douglas Silva de Vasconcellos, Thèse: Intégration monolithique de multiples membranes de silicium poreux pour laboratoires sur puce

Lucien Schwab, Thèse: Sonde opto-mécaniques pour la microscopie AFM rapide

2019

Pierre Moritz, Thèse: Réalisation de micro-aimants par assemblage capillaire de nanobâtonnets de cobalt assisté par magnétophorèse - Applications aux MEMS à transduction électromagnétique

Thierry Leichle, Habilitation à diriger des recherches: BioMEMS pour l'Analyse Biomoléculaire : de l'intérêt du confinement et de la réduction d'échelle pour la quantification directe de biomarqueurs

2018

Cécile Fuinel, Thèse: Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS

2016

Naima Sabrina Habtoun, Thèse: Caractérisation et intégration fonctionnelle de nanohélices inorganiques et métalliques : vers un nanosystème électromécanique

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