Microelectromechanical systems

- mems -

The MEMS team develops strategies to enhance the performance, reliability, and integration of MEMS devices. New functionalities and transduction mechanisms based on nanomaterials, biomaterials, and polymer technologies are also explored for applications in instrumentation, the environment, and healthcare.

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Soft Bioelectronic Interfaces

We design flexible bioelectronic interfaces by coupling polymer technologies with nanomaterials, biomaterials, and biodegradable materials. These interfaces are mainly used for electrophysiological measurements on the central and peripheral nervous systems, in vivo on small animals, ex vivo on slices and in vitro on organoid models.


MEMS for Tissue Engineering

We exploit various MEMS functionalities to generate mechanical and/or electrical stimuli on 2D and 3D cell cultures. These approaches are used in particular for the maturation of cardiac cells derived from the differentiation of human stem cells.


Soft Actuators and Sensors

We are developing various approaches based on porous hydrogels to optimize the actuation of flexible devices such as artificial muscles. We are also designing flexible nanomaterial-based sensors and intracranial pressure transducers.


Silicon-based Actuators and Sensors

These MEMS devices are capable of generating and detecting movements and vibrations on incredibly small scales ranging from a few micrometers to less than a picometer. Their applications are diverse: from energy-frugal manipulation of logical data to enhancing the measurement performance of force sensors used in atomic force microscopy.


Latest publications


Journal articles

Rajat Gujrati, Ali Kassem, Cédric Ayela, Fabrice Mathieu, Liviu Nicu, et al.. Transfer of III-nitride epitaxial layers onto pre-patterned silicon substrates for the simple fabrication of free-standing MEMS. Applied Physics Letters, 2024, 124 (10), pp.104102. ⟨10.1063/5.0191772⟩. ⟨hal-04495378⟩

Mohammadreza Rostami, Aleksandra Marković, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, et al.. Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication. Advanced Science, 2024, 11 (12), pp.2303518. ⟨10.1002/advs.202303518⟩. ⟨hal-04407843⟩

Kamil Elkhoury, Sacha Kodeih, Eduardo Enciso-Martínez, Ali Maziz, Christian Bergaud. Advancing Cardiomyocyte Maturation: Current Strategies and Promising Conductive Polymer‐Based Approaches. Advanced Healthcare Materials, 2024, 13 (13), pp.2303288. ⟨10.1002/adhm.202303288⟩. ⟨hal-04484428⟩

Conference papers

Suyambulingham Subramanian, Clément Le Fur, Lucien Schwab, Ilan Shlesinger, Pierre Allain, et al.. Sondes optomécaniques : vers l'AFM aux fréquences GHz. Forum de microscopie à sondes locales, Apr 2024, Lyon, France. ⟨hal-04562805⟩


Journal articles

Rémi Courson, Oleksii Bratash, Ali Maziz, Cloé Desmet, Ricardo Alvarado Meza, et al.. Rapid prototyping of a polymer MEMS droplet dispenser by laser-assisted 3D printing. Microsystems & Nanoengineering, 2023, 9 (1), pp.85. ⟨10.1038/s41378-023-00559-3⟩. ⟨hal-04266785⟩

Refik Baris Yilmaz, Yosr Chaabane, Vincent Mansard. Development of a Soft Actuator from Fast Swelling Macroporous PNIPAM Gels for Smart Braille Device Applications in Haptic Technology. ACS Applied Materials & Interfaces, 2023, 15 (5), pp.7340-7352. ⟨10.1021/acsami.2c17835⟩. ⟨hal-03968137⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications (Adv. Mater. 39/2023). Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202370281⟩. ⟨hal-04234509⟩

Kornél Kistamás, Anna Müller, Suchitra Muenthaisong, Federica Lamberto, Melinda Zana, et al.. Multifactorial approaches to enhance maturation of human iPSC-derived cardiomyocytes. Journal of Molecular Liquids, 2023, 387, pp.122668. ⟨10.1016/j.molliq.2023.122668⟩. ⟨hal-04308454⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications. Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202302472⟩. ⟨hal-04234494⟩

Antoine Amestoy, Aarushee Rangra, Vincent Mansard, Marie-Hélène Delville, Fabrice Severac, et al.. Highly stable low-strain flexible sensors based on gold nanoparticles/silica nanohelices. ACS Applied Materials & Interfaces, 2023, 15 (33), pp.39480-39493. ⟨10.1021/acsami.3c05852⟩. ⟨hal-04187756⟩

Conference papers

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨hal-03951363⟩

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩

Aleksandra Marković, Hervé Fanet, Gaël Pillonnet, Bernard Legrand, Laurent Mazenq, et al.. ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATION USING CONTACTLESS CAPACITIVE MEMS. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2023, Kyoto (Japan), Japan. pp.546-549. ⟨hal-04241697⟩


Eric Tournié, Jean-Marc Allain, Mathieu Arnoux, Nathalie Bardou, Skandar Basrour, et al.. Rapport d’évaluation de l’unité FEMTO-ST – Franche-Comté Électronique, Mécanique, Thermique et Optiques - Sciences et Technologies : Sciences et Technologies. Campagne d’évaluation 2022-2023. C2023-EV-0251215K-DER-PUR230023102-RF, Hcéres. 2023, pp.1-51. ⟨hal-04505233⟩


Journal articles

Laure Abensur Vuillaume, Thierry Leichle, Pierrick Le Borgne, Mathieu Grajoszex, Christophe Goetz, et al.. Relevant Biomarkers in Medical Practices: An Analysis of the Needs Addressed by an International Survey. Journal of Personalized Medicine, 2022, 12 (1), pp.106. ⟨10.3390/jpm12010106⟩. ⟨hal-03835475⟩

Laure Abensur Vuillaume, Justine Frija-Masson, Meriem Hadjiat, Thomas Riquier, Marie-Pia D’ortho, et al.. Biosensors for the Rapid Detection of Cardiovascular Biomarkers of Vital Interest: Needs, Analysis and Perspectives. Journal of Personalized Medicine, 2022, 12, ⟨10.3390/jpm12121942⟩. ⟨hal-04266801⟩

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Panče Naumov, Thierry Leichle, et al.. Microelectromechanical devices driven by thermosalient effects. Cell Reports Physical Science, 2022, 3 (11), pp.101133. ⟨10.1016/j.xcrp.2022.101133⟩. ⟨hal-03840274⟩

Yurii S Bibik, José E Angulo-Cervera, Rostyslav D Lampeka, Il'Ya Gural'Skiy. Tunable mechanical properties of [Fe(pyrazine){Au(CN)2}2]–PVDF composite films with spin transitions. Polymer, 2022, 238, pp.124410. ⟨10.1016/j.polymer.2021.124410⟩. ⟨hal-03474282⟩

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

A. Calvel, E. Barbeau, J.C. Sol, J.A. Lotterie, K. Guines, et al.. HP26: Electrophysiological properties of electrical brain stimulations and their impact on neuronal activity during stereoelectroencephalography in epilepsy. Clinical Neurophysiology, 2022, 135, pp.e7. ⟨10.1016/j.clinph.2021.11.028⟩. ⟨hal-03865318⟩

Clement Cointe, Adrian Laborde, Lionel Nowak, Dina N Arvanitis, David Bourrier, et al.. Scalable Batch Fabrication of Ultrathin Flexible Neural Probes using Bioresorbable Silk Layer. Microsystems & Nanoengineering, 2022, 8, pp.21. ⟨10.1038/s41378-022-00353-7⟩. ⟨hal-03456630⟩

L Schwab, P E Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩. ⟨hal-03326075v2⟩

Jose Elias Angulo Cervera, Mario Piedrahita-Bello, Baptiste Martin, Eric Dantras, Liviu Nicu, et al.. The crystallinity and piezoelectric properties of spray-coated films of P(VDF70-TrFE30): effect of film thickness and spin-crossover nanofillers. Journal of Materials Chemistry C, 2022, 10 (21), pp.8466-8473. ⟨10.1039/D2TC01162J⟩. ⟨hal-03670058⟩

Conference papers

Venkata Suresh Vajrala, Asma Eddarir, Sophie Pautot, Christian Bergaud, Ali Maziz. Flexible and Hollow Micro Ring Electrode Arrays for Multi-Directional Monitoring of 3D Neuronal Networks. 2022 MRS Spring Meeting & exhibit, May 2022, Honololu, Hawaii, United States. ⟨hal-04163332⟩

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Laurent Colin, et al.. H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France. ⟨hal-03778623⟩

Inès Muguet, Fabrice Mathieu, Ali Maziz, Laurent Mazenq, Guilhem Larrieu. Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution. Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03845587⟩

Aleksandra Markovic, Gaël Pillonnet, Bernard Legrand. Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime. Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France. ⟨hal-03649053⟩

Clement Cointe, Asma Eddarir, Dina Arvanitis, Christian Bergaud, Ali Maziz. A Top-Down Fabrication Approach For Delivering Implantable and Ultrathin Flexible Brain Probes. IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), Jan 2022, Tokyo, Japan. pp.420-423, ⟨10.1109/MEMS51670.2022.9699601⟩. ⟨hal-03865296⟩


Vincent Gerbaud, Pierre Aimar, François Charru, Olivier Eichwald, Julia Hidalgo, et al.. Science en conscience, enjeux écologiques et de société - Bilan et perspectives des Assises toulousaines de la Recherche en Ingénierie 2022. Assises toulousaines de la Recherche en Ingénierie 2022, 2022. ⟨hal-04235199⟩


Journal articles

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-Porous Composite for High Performance Multifunctional Neural Microelectrode. ECS Transactions, 2021, 104 (2), pp.3-5. ⟨10.1149/10402.0003ecst⟩. ⟨hal-03456618⟩

Venkata Suresh Vajrala, Baptiste Alric, Adrian Laborde, Camille Colin, Emmanuel Suraniti, et al.. Microwell Array Based Opto‐Electrochemical Detections Revealing Co‐Adaptation of Rheological Properties and Oxygen Metabolism in Budding Yeast. Advanced Biology, 2021, 5 (7), pp.2100484. ⟨10.1002/adbi.202100484⟩. ⟨hal-03228340⟩

Inga Tijunelyte, Rémi Malbec, Bayan Chami, Jean Cacheux, Christophe Dez, et al.. micro-RNA 21 detection with a limit of 2 pM in 1 min using a size-accordable concentration module operated by electrohydrodynamic actuation. Biosensors and Bioelectronics, 2021, 178, pp.112992. ⟨10.1016/j.bios.2021.112992⟩. ⟨hal-03449104⟩

Abdulghani Ismail, Pascale Pham, Lucie Descamps, Ali Maziz, Emeline Descamps, et al.. Contactless Bio‐Electrofunctionalization of Planar Micropores. Advanced Materials Technologies, 2021, 6 (6), pp.2001154. ⟨10.1002/admt.202001154⟩. ⟨hal-03259683⟩

Yingning He, Douglas Silva de Vasconcellos, David Bourrier, Kata Hajdu, Jean-Olivier Durand, et al.. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications. Sensors and Actuators A: Physical , 2021, 332 (Part 1), pp.113089. ⟨10.1016/j.sna.2021.113089⟩. ⟨hal-03377090⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Barbora Brachňaková, Alejandro Enríquez-Cabrera, Liviu Nicu, et al.. Photoactuation of micromechanical devices by photochromic molecules. Materials Advances, 2021, 2 (15), pp.5057-5061. ⟨10.1039/d1ma00480h⟩. ⟨hal-03285954⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Alejandro Enriquez-Cabrera, Gábor Molnár, Bertrand Tondu, et al.. Colossal expansion and fast motion in spin-crossover@polymer actuators. Materials Horizons, 2021, 8 (11), pp.3055-3062. ⟨10.1039/d1mh00966d⟩. ⟨hal-03375327⟩

Denis Lagrange, Nicolas Mauran, Lucien Schwab, Bernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩. ⟨hal-02974151⟩

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

Ali Maziz, Erdoğan Özgür, Christian Bergaud, Lokman Uzun. Progress in conducting polymers for biointerfacing and biorecognition applications. Sensors and Actuators Reports, 2021, 3, pp.100035. ⟨10.1016/j.snr.2021.100035⟩. ⟨hal-03456623⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Fabrice Mathieu, Thierry Leichle, Liviu Nicu, et al.. Investigation of the Effect of Spin Crossover on the Static and Dynamic Properties of MEMS Microcantilevers Coated with Nanocomposite Films of [Fe(Htrz)2(trz)](BF4)@P(VDF-TrFE). Magnetochemistry, 2021, 7 (8), pp.114. ⟨10.3390/magnetochemistry7080114⟩. ⟨hal-03329761⟩

Vincent Mansard. Macroporous smart gel based on pH-sensitive polyacrylic polymer for the development of large size artificial muscle with linear contraction. Soft Matter, 2021, 17 (42), pp.9644-9652. ⟨10.1039/D1SM01078F⟩. ⟨hal-03347477⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel G Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Nanofibrous PEDOT-Carbon Composite on Flexible Probes for Soft Neural Interfacing. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.780197. ⟨10.3389/fbioe.2021.780197⟩. ⟨hal-03427406⟩

Valentina Castagnola, Elisa Castagnola, Christian Bergaud, Davide Ricci. Editorial: Short-Term Versus Long-Term Challenges in Functional Biomaterials Interfacing Living Systems: Two Sides of the Coin. Frontiers in Bioengineering and Biotechnology, 2021, 9, pp.723451. ⟨10.3389/fbioe.2021.723451⟩. ⟨hal-03618183⟩

Mouhanad Babi, Roberto Riesco, Louisa Boyer, Ayodele Fatona, Angelo Accardo, et al.. Tuning the Nanotopography and Chemical Functionality of 3D Printed Scaffolds through Cellulose Nanocrystal Coatings. ACS Applied Bio Materials, 2021, 4 (12), pp.8443-8455. ⟨10.1021/acsabm.1c00970⟩. ⟨hal-03547189⟩

Conference papers

Aarushee Rangra, Antoine Amestoy, Vincent Mansard, Emilie Pouget, Reiko Oda, et al.. High−performance flexible strain sensors based on helical 1D nanostructures with cross−linked gold nanoparticles. 9th International Conference on Sensors - ASIASENSE 2021, Oct 2021, Visioconférence, Thailand. ⟨hal-04576966⟩

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maira Dolores Manrique Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials. 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021), Apr 2021, Xiamen, China. ⟨hal-03210652⟩

Venkata Suresh Vajrala, Valentin Saunier, Lionel Nowak, Emmanuel Flahaut, Christian Bergaud, et al.. Carbon Nanofiber/PEDOT Based Macro-porous Composite For High Performance Multifunctional Neural Microelectrode. 240th ElectroChemical Society Meeting, Oct 2021, Orlando, United States. ⟨hal-03445109⟩

Inès Muguet, Ali Maziz, Laurent Mazenq, Fabrice Mathieu, Guilhem Larrieu. Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity. 2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States. ⟨hal-03845567⟩

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maria Dolores Manrique-Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China. ⟨hal-03424049⟩


Journal articles

Cloé Desmet, Karim Vindas, Ricardo Alvarado Meza, Patrick Garrigue, Silvia Voci, et al.. Multiplexed Remote SPR Detection of Biological Interactions through Optical Fiber Bundles. Sensors, 2020, 20 (2), pp.511. ⟨10.3390/s20020511⟩. ⟨hal-03023584⟩

Thierry Leichle, Liviu Nicu, Thomas Alava. MEMS Biosensors and COVID-19: Missed Opportunity. ACS Sensors, 2020, 5 (11), pp.3297-3305. ⟨10.1021/acssensors.0c01463⟩. ⟨hal-02972242⟩

Karl Ridier, Yuteng Zhang, Mario Piedrahita-Bello, Carlos M. Quintero, Lionel Salmon, et al.. Heat Capacity and Thermal Damping Properties of Spin‐Crossover Molecules: A New Look at an Old Topic. Advanced Materials, 2020, 32 (21), pp.2000987. ⟨10.1002/adma.202000987⟩. ⟨hal-02570846⟩

Daisuke Saya, Denis Dezest, Aaron Welsh, Fabrice Mathieu, Olivier Thomas, et al.. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films. Journal of Micromechanics and Microengineering, 2020, 30 (3), pp.035004. ⟨10.1088/1361-6439/ab60bf⟩. ⟨hal-02453806v2⟩

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Microelectrodes from PEDOT-carbon nanofiber composite for high performance neural recording, stimulation and neurochemical sensing. MethodsX, 2020, 7, pp.101106. ⟨10.1016/j.mex.2020.101106⟩. ⟨hal-03003023⟩

Karl Ridier, Alin-Ciprian Bas, Yuteng Zhang, Lucie Routaboul, Lionel Salmon, et al.. Unprecedented switching endurance affords for high-resolution surface temperature mapping using a spin-crossover film. Nature Communications, 2020, 11 (1), pp.3611. ⟨10.1038/s41467-020-17362-7⟩. ⟨hal-02948898⟩

Soufiane Karrakchou, Suresh Sundaram, Taha Ayari, Adama Mballo, Phuong Vuong, et al.. Effectiveness of selective area growth using van der Waals h-BN layer for crack-free transfer of large-size III-N devices onto arbitrary substrates. Scientific Reports, 2020, 10 (1), pp.211. ⟨10.1038/s41598-020-77681-z⟩. ⟨hal-03120983⟩

Valentin Saunier, Emmanuel Flahaut, Marie-Charline Blatché, Christian Bergaud, Ali Maziz. Carbon nanofiber-PEDOT composite films as novel microelectrode for neural interfaces and biosensing. Biosensors and Bioelectronics, 2020, 165, pp.112413. ⟨10.1016/j.bios.2020.112413⟩. ⟨hal-03022944⟩

Silvia Voci, Abdulghani Ismail, Pascale Pham, Jing Yu, Ali Maziz, et al.. Wireless Enhanced Electrochemiluminescence at a Bipolar Microelectrode in a Solid-State Micropore. Journal of The Electrochemical Society, 2020, 167 (13), pp.137509. ⟨10.1149/1945-7111/abbbc1⟩. ⟨hal-03024426⟩

Mario Piedrahita-Bello, José Elias Angulo-Cervera, Rémi Courson, Gábor Molnár, Laurent Malaquin, et al.. 4D printing with spin-crossover polymer composites. Journal of Materials Chemistry C, 2020, 18 (8), pp.6001-6005. ⟨10.1039/d0tc01532f⟩. ⟨hal-02570972⟩

Pierre Etienne Allain, Lucien Schwab, Colin Mismer, Marc Gély, Estelle Mairiaux, et al.. Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces. Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩. ⟨hal-01908683v2⟩

Conference papers

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩


Journal articles

Jean Cacheux, Aurélien Bancaud, Thierry Leichle, Pierre Cordelier. Technological Challenges and Future Issues for the Detection of Circulating MicroRNAs in Patients With Cancer. Frontiers in Chemistry, 2019, 7, ⟨10.3389/fchem.2019.00815⟩. ⟨hal-02392369⟩

Roberto Riesco, Louisa Boyer, Sarah Blosse, Pauline Lefebvre, Pauline Assemat, et al.. Water-in-PDMS emulsion templating of highly interconnected porous architectures for 3D cell culture. ACS Applied Materials & Interfaces, 2019, 11 (32), pp.28631-28640. ⟨10.1021/acsami.9b07564⟩. ⟨hal-02379789⟩

Arash Nowbahar, Art O'Connor, Vincent Mansard, Patrick Spicer, Todd Squires. Salt comets in hand sanitizer: A simple probe of microgel collapse dynamics. Physical Review Fluids, 2019, 4 (6), pp.061301. ⟨10.1103/PhysRevFluids.4.061301⟩. ⟨hal-02391635⟩

Denis Dezest, Thierry Leichle, Pattamon Teerapanich, Fabrice Mathieu, B Tse Sum Bui, et al.. Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers. Journal of Micromechanics and Microengineering, 2019, 29 (2), pp.025013. ⟨10.1088/1361-6439/aaf84e⟩. ⟨hal-02392367⟩

Abdulghani Ismail, Silvia Voci, Pascale Pham, Loïc Leroy, Ali Maziz, et al.. Enhanced Bipolar Electrochemistry at Solid-State Micropores: Demonstration by Wireless Electrochemiluminescence Imaging. Analytical Chemistry, 2019, 91 (14), pp.8900-8907. ⟨10.1021/acs.analchem.9b00559⟩. ⟨hal-02392368⟩

Chih-Cheng Chang, Ian Williams, Arash Nowbahar, Vincent Mansard, Jodi Mecca, et al.. Effect of Ethylcellulose on the Rheology and Mechanical Heterogeneity of Asphaltene Films at the Oil–Water Interface. Langmuir, 2019, 35 (29), pp.9374-9381. ⟨10.1021/acs.langmuir.9b00834⟩. ⟨hal-02391658⟩

Aurelie Bouchet-Spinelli, Emeline Descamps, Jie Liu, Abdulghani Ismail, Pascale Pham, et al.. Polarization Induced Electro-Functionalization of Pore Walls: A Contactless Technology. Biosensors, 2019, 9 (4), pp.E121. ⟨10.3390/bios9040121⟩. ⟨hal-02382079⟩

Rémi Malbec, Bayan Chami, Lorène Aeschbach, Gustavo Ruiz Buendía, Marius Socol, et al.. µLAS: Sizing of expanded trinucleotide repeats with femtomolar sensitivity in less than 5 minutes. Scientific Reports, 2019, 9, pp.23. ⟨10.1038/s41598-018-36632-5⟩. ⟨hal-01997319⟩

Conference papers

Lucien Schwab, Pierre-Etienne Allain, Louise Banniard, Nicolas Mauran, Denis Lagrange, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩

Lucien Schwab, Pierre Allain, Didier Theron, Marc Faucher, Benjamin Walter, et al.. Optomechanics: a key towards next-generation experiments in atomic force microscopy?. International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France. ⟨hal-02407634⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Thomas Blon, et al.. Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩. ⟨hal-02413900⟩


Laurent Mazenq, Lucien Schwab, Nicolas Mauran, Denis Lagrange, Xavier Dollat, et al.. Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide. [Rapport Technique] LAAS-CNRS. 2019. ⟨hal-03603368⟩

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Refik Baris Yilmaz, Thèse: Développement d'actionneurs souples : l'actionnement et des propriétés mécaniques des hydrogels macroporeux sensibles à la chaleur et à la chimie


Asma Eddarir, Thèse: Conception et réalisation d'un dispositif tridimensionnel à matrice de microélectrodes pour la mesure électrophysiologique et la détection pH d'une culture neuronale in vitro


Aarushee Rangra, Thèse: Fabrication et caractérisation de capteurs de déformation flexibles à base d’assemblage de nanoparticules d'or greffées sur des nanostructures 1D

Valentin Saunier, Thèse: Microélectrodes nanocomposites implantables couplant enregistrement/stimulation neurale et détection électrochimique de neurotransmetteurs


Douglas Silva de Vasconcellos, Thèse: Intégration monolithique de multiples membranes de silicium poreux pour laboratoires sur puce

Lucien Schwab, Thèse: Sonde opto-mécaniques pour la microscopie AFM rapide


Pierre Moritz, Thèse: Réalisation de micro-aimants par assemblage capillaire de nanobâtonnets de cobalt assisté par magnétophorèse - Applications aux MEMS à transduction électromagnétique

Thierry Leichle, Habilitation à diriger des recherches: BioMEMS pour l'Analyse Biomoléculaire : de l'intérêt du confinement et de la réduction d'échelle pour la quantification directe de biomarqueurs


Cécile Fuinel, Thèse: Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS


Naima Sabrina Habtoun, Thèse: Caractérisation et intégration fonctionnelle de nanohélices inorganiques et métalliques : vers un nanosystème électromécanique

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