Materials, Processes and Nanodevices

- mpn -

The MPN team has a transversal research activity ranging from the synthesis of new materials with unique properties, through their shaping at nanoscale and finally to the fabrication of innovative nanodevices. Research themes include dopant engineering for nanoelectronics, advanced materials synthesis for spintronics and Quantum computing, nanostructure engineering for information processing, and development of a bioelectronic platform for electrophysiological monitoring.

Latest publications


Journal articles

Romain Hernandez, Peter R. Wiecha, Jean-Marie Poumirol, Gonzague Agez, Arnaud Arbouet, et al.. Directional silicon nano-antennas for quantum emitter control designed by evolutionary optimization. Journal of the Optical Society of America B, 2024, 41 (2), pp.A108-A115. ⟨10.1364/JOSAB.506085⟩. ⟨hal-04240574⟩

Y. Wang, Mukherjee Chhandak, H. Rezgui, M. Deng, Jonas Müller, et al.. Evidence of trapping and electrothermal effects in vertical junctionless nanowire transistors. Solid-State Electronics, 2024, 211, pp.108805. ⟨10.1016/j.sse.2023.108805⟩. ⟨hal-04297709⟩


Journal articles

Ana Estrada-Real, Ioannis Paradisanos, Peter Wiecha, Jean-Marie Poumirol, Aurelien Cuche, et al.. Probing the optical near-field interaction of Mie nanoresonators with atomically thin semiconductors. Communications Physics, 2023, 6 (1), pp.102. ⟨10.1038/s42005-023-01211-2⟩. ⟨hal-03845142⟩

Martin Montagnac, Yoann Brûlé, Aurélien Cuche, Jean-Marie Poumirol, Sébastien J Weber, et al.. Control of light emission of quantum emitters coupled to silicon nanoantenna using cylindrical vector beams. Light: Science and Applications, 2023, 12 (1), pp.239. ⟨10.1038/s41377-023-01229-9⟩. ⟨hal-04212490⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications (Adv. Mater. 39/2023). Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202370281⟩. ⟨hal-04234509⟩

Abdourahman Khaireh-Walieh, Denis Langevin, Pauline Bennet, Olivier Teytaud, Antoine Moreau, et al.. A newcomer's guide to deep learning for inverse design in nano-photonics. Nanophotonics, 2023, 12 (24), pp.4387-4414. ⟨10.1515/nanoph-2023-0527⟩. ⟨hal-04196999⟩

P.L. Julliard, A. Johnsson, N. Zographos, R. Demoulin, Richard Monflier, et al.. Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework. Solid-State Electronics, 2023, 200, pp.108521. ⟨10.1016/j.sse.2022.108521⟩. ⟨hal-03867418⟩

L.A. Lozano-Hernández, Benjamin Reig, Jean Baptiste Doucet, Ludovic Salvagnac, Stéphane Calvez, et al.. Design and optimization of a blue fluorescent microcavity-organic light-emitting diode (MOLED) on AZO anode for an algae excitation light source application. Materials Today: Proceedings, 2023, 93 (Part 1), pp.61-67. ⟨10.1016/j.matpr.2023.07.173⟩. ⟨hal-04258291⟩

Cristell Maneux, Chhandak Mukherjee, Marina Deng, Guilhem Larrieu, Yifang Wang, et al.. Strategies for Characterization and Parameter Extraction of Vertical Junction-Less Nanowire FETs Dedicated to Design Technology Co-Optimization. ECS Transactions, 2023, 111 (1), pp.209-217. ⟨10.1149/11101.0209ecst⟩. ⟨hal-04230924⟩

Paweł Piotr Michałowski, Jonas Müller, Chiara Rossi, Alexander Burenkov, Eberhard Bär, et al.. Secondary ion mass spectrometry quantification of boron distribution in an array of silicon nanowires. Measurement - Journal of the International Measurement Confederation (IMEKO), 2023, 211, pp.112630. ⟨10.1016/j.measurement.2023.112630⟩. ⟨hal-04234520⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications. Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202302472⟩. ⟨hal-04234494⟩

César Jara Donoso, Antoine Jay, Julien Lam, Jonas Müller, Guilhem Larrieu, et al.. A comprehensive atomistic picture of the as-deposited Ni-Si interface before thermal silicidation process. Applied Surface Science, 2023, 631, pp.157563. ⟨10.1016/j.apsusc.2023.157563⟩. ⟨hal-04104341⟩

Mukherjee Chhandak, H. Rezgui, Y. Wang, M. Deng, A. Kumar, et al.. Nanoscale Thermal Transport in Vertical Gate-All-Around Junctionless Nanowire Transistors—Part I: Experimental Methods. IEEE Transactions on Electron Devices, 2023, pp.1-7. ⟨10.1109/TED.2023.3321277⟩. ⟨hal-04296517⟩

Chiara Rossi, Alexander Burenkov, Peter Pichler, Eberhard Bär, Jonas Müller, et al.. Performance of vertical gate-all-around nanowire p-MOS transistors determined by boron depletion during oxidation. Solid-State Electronics, 2023, 200, pp.108551. ⟨10.1016/j.sse.2022.108551⟩. ⟨hal-04234531⟩

Wei Xiao, Peng Dai, H. Johnson Singh, Idris Ajia, Xingzhao Yan, et al.. Flexible thin film optical solar reflectors with Ta2O5-based multimaterial coatings for space radiative cooling. APL Photonics, 2023, 8 (9), pp.090802. ⟨10.1063/5.0156526⟩. ⟨hal-04240567⟩

A. Kumar, V. Mani, V. Jain, H. Gupta, V.G. Venkatesh. Managing Healthcare Supply Chain through Artificial Intelligence (AI): A Study of Critical Success Factors. Computers & Industrial Engineering, 2023, 175, ⟨10.1016/j.cie.2022.108815⟩. ⟨hal-04433058⟩

Mélodie Humbert, Romain Hernandez, Nicolas Mallet, Guilhem Larrieu, Vincent Larrey, et al.. Large-scale controlled coupling of single-photon emitters to high-index dielectric nanoantennas by AFM nanoxerography. Nanoscale, 2023, 15 (2), pp.599-608. ⟨10.1039/d2nr05526k⟩. ⟨hal-04158706⟩

Abdourahman Khaireh-Walieh, Alexandre Arnoult, Sébastien Plissard, Peter Wiecha. Monitoring MBE substrate deoxidation via RHEED image-sequence analysis by deep learning. Crystal Growth & Design, 2023, 23 (2), pp.892-898. ⟨10.1021/acs.cgd.2c01132⟩. ⟨hal-03822492⟩

H. Rezgui, Mukherjee Chhandak, Y. Wang, M. Deng, A. Kumar, et al.. Nanoscale Thermal Transport in Vertical Gateall-around Junction-less Nanowire Transistors-Part II: Multiphysics Simulation. IEEE Transactions on Electron Devices, 2023, 70 (12), pp.6505 - 6511. ⟨10.1109/TED.2023.3321280⟩. ⟨hal-04296531⟩

Dima Sadek, Antoine Jay, Jihan El Hila, Quentin Gravelier, Alexandre Arnoult, et al.. Growth of BiSb on GaAs (001) and (111)A surfaces: A joint experimental and theoretical study. Applied Surface Science, 2023, 622, pp.156688. ⟨10.1016/j.apsusc.2023.156688⟩. ⟨hal-04017077⟩

Sara Mannaa, Arnaud Poittevin, Cédric Marchand, Damien Deleruyelle, Bastien Deveautour, et al.. 3D Logic circuit design oriented electrothermal modeling of vertical junctionless nanowire FETs. IEEE Journal on Exploratory Solid-State Computational Devices and Circuits, 2023, 9 (2), pp.116 - 123. ⟨10.1109/JXCDC.2023.3309502⟩. ⟨hal-04230911⟩

Damiano Ricciarelli, Giovanni Mannino, Ioannis Deretzis, Gaetano Calogero, Giuseppe Fisicaro, et al.. Impact of surface reflectivity on the ultra-fast laser melting of silicon-germanium alloys. Materials Science in Semiconductor Processing, 2023, 165, pp.107635. ⟨10.1016/j.mssp.2023.107635⟩. ⟨hal-04344631⟩

Meiling Zhang, Jean-Marie Poumirol, Nicolas Chery, Hervé Rinnert, Alaa Giba, et al.. Hyperdoped Si nanocrystals embedded in silica for infrared plasmonics. Nanoscale, 2023, 15 (16), pp.7438-7449. ⟨10.1039/D3NR00035D⟩. ⟨hal-04088288v2⟩

Conference papers

Richard Daubriac, Leonardo Cancellara, Mohamed Ali Khaled, Lu Lu, Zeinab Chehadi, et al.. Study of the electrical and structural properties of Ru thin films annealed by Microsecond UV Laser Annealing for future BEOL interconnections. 2023 E-MRS Fall Meeting, Sep 2023, Warsaw, Poland. ⟨hal-04442370⟩

Yifang Wang, Houssem Rezgui, Mukherjee Chhandak, Marina Deng, Abhishek Kumar, et al.. Evidence of Trapping and Electrothermal Effects in Vertical Junctionless Nanowire Transistors. 9th Joint International EuroSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) 2023, May 2023, Tarragona, Spain. ⟨hal-04231605⟩

Guilhem Larrieu, Houssem Rezgui, Abhishek Kumar, Jonas Müller, Sylvain Pelloquin, et al.. Thermal consideration in nanoscale gate-all-around vertical transistors. Silicon Nanoelectronics Workshop (SNW 2023), Jun 2023, Kyoto, Japan. pp.27-28, ⟨10.23919/SNW57900.2023.10183951⟩. ⟨hal-04189328⟩

Qingyue Li, Vincent Raimbault, Pierre-François Calmon, Benjamin Reig, Pierluigi Debernardi, et al.. Direct 3D-printing of microlens on single mode polarization-stable VCSEL chip for miniaturized optical spectroscopy. VCSEL Day 2023 European Workshop, Sep 2023, Turin, Italy. ⟨hal-04366656⟩

Guilhem Larrieu, Jonas Müller, Sylvain Pelloquin, Abhishek Kumar, Konstantinos Moustakas, et al.. Advanced contacts on 3D nanostructured channels for vertical transport gate-all-around transistors. 21st International Workshop on Junction Technology (IWJT 2023), Jun 2023, Kyoto, Japan. pp.1-4, ⟨10.23919/IWJT59028.2023.10175172⟩. ⟨hal-04189319⟩

Richard Daubriac, Rémi Demoulin, Sébastien Kerdilès, P. Acosta-Alba, M. Opprecht, et al.. Study on the electrical properties of ultrathin in situ Boron-doped strained Si0.7Ge0.3 layers annealed by nanosecond pulsed laser. 2023 E-MRS Spring Meeting, May 2023, Strasbourg, France. ⟨hal-04442327⟩

Mohamed Ali Khaled, Richard Daubriac, Leonardo Cancellara, Quentin Gravelier, Thomas Blon, et al.. Topological insulator Bi1-xSbx films on GaAs substrates as current-induced Spin-Orbit Torques generators. 2023 E-MRS Fall Meeting, E-MRS, Sep 2023, Warsaw (Varsovie), Poland. ⟨hal-04297125⟩

Jonas Müller, Rémi Demoulin, Fuccio Cristiano, Guilhem Larrieu. Investigation of the formation of nickel silicides on vertical silicon nanostructured channel for advanced electronics. E-MRS 2023 SPRING MEETING, May 2023, Strasbourg, France. ⟨hal-04423814⟩

Konstantinos Moustakas, Bruno Neckel, Aurélie Lecestre, Fabrice Mathieu, Thomas Mikolajick, et al.. Engineering of HZO layer for the fabrication of ultimate 3D vertical transistors for Memory-in-Logic applications M. Materials engineering for advanced semiconductor devices. European Materials Research Society (EMRS ) spring meeting 2023, May 2023, Strasbourg, France. ⟨hal-04168229⟩

Yifan Wang, Mukherjee Chhandak, Houssem Rezgui, Marina Deng, Cristell Maneux, et al.. Electrothermal modeling of junctionless vertical Si nanowire transistors for 3D logic circuit design. IEEE 53rd European Solid-State Device Research Conference (ESSDERC 2023), Sep 2023, Lisbon, Portugal. pp.57-60, ⟨10.1109/ESSDERC59256.2023.10268560⟩. ⟨hal-04231616⟩

Nessim Jebali, Céline Molinaro, Julien Roul, Julie Jermann, Jean-Baptiste Doucet, et al.. Improvement of coupling tolerances of 850 nm single-mode optical links using self-aligned NIR photopolymerization. VCSEL Day 23 European Worshop, IEIIT Torino, Sep 2023, Turin, Italy. ⟨hal-04366632⟩

Other documents

M.A. Pinault-Thaury, Mohamed Bouras, Raid Gourad, Karine Isoird, Fuccio Cristiano, et al.. Locally Ion Implantation and Annealing Effects in Diamond. 3rd MOMENTOM INTERNATIONAL CONGRESS, Mar 2023, Gif-sur-yvette, France. 2023. ⟨hal-04271407⟩

Mohamed Bouras, Raid Gourad, Karine Isoird, Fuccio Cristiano, Josiane Tasselli, et al.. Locally Ion Implantation and Annealing Effects in Diamond. Hasselt Diamond Workshop 2023 - SBDD XXVII, Mar 2023, Hässelt, Belgium. ⟨hal-04396208⟩

Mohamed Bouras, Raid Gourad, Karine Isoird, Fuccio Cristiano, Josiane Tasselli, et al.. Locally Ion Implantation and Annealing Effects in Diamond. Hasselt Diamond Workshop 2023 - SBDD XXVII, Mar 2023, Hässelt, Belgium. ⟨hal-04269992⟩

Preprints, Working Papers, ...

Pauline Bennet, Denis Langevin, Chaymae Essoual, Abdourahman Khaireh-Walieh, Olivier Teytaud, et al.. An illustrated tutorial on global optimization in nanophotonics. 2023. ⟨hal-04240545⟩

Denis Langevin, Pauline Bennet, Abdourahman Khaireh-Walieh, Peter Wiecha, Olivier Teytaud, et al.. PyMoosh : a comprehensive numerical toolkit for computing the optical properties of multilayered structures. 2023. ⟨hal-04240570⟩


Journal articles

Daya Dhungana, Nicolas Mallet, Pier-Francesco Fazzini, Guilhem Larrieu, Fuccio Cristiano, et al.. Self-catalyzed InAs nanowires grown on Si: the key role of kinetics on their morphology. Nanotechnology, 2022, 33 (48), pp.485601. ⟨10.1088/1361-6528/ac8bdb⟩. ⟨hal-03775839⟩

Florent Henri Marty, Luca Bettamin, Anne Thouard, Karine Bourgade, Sophie Allart, et al.. Borna disease virus docks on neuronal DNA double-strand breaks to replicate and dampens neuronal activity. iScience, 2022, 25 (1), pp.103621. ⟨10.1016/j.isci.2021.103621⟩. ⟨hal-03766679⟩

Gaetano Calogero, Domenica Raciti, Pablo Acosta, Fuccio Cristiano, Ioannis Deretzis, et al.. Multiscale modeling of ultrafast melting phenomena. npj Computational Materials, 2022, 8, pp.1-10. ⟨10.1038/s41524-022-00720-y⟩. ⟨hal-03795924⟩

Yoann Brûlé, Peter Wiecha, Aurélien Cuche, Vincent Paillard, Gérard Colas Des Francs. Magnetic and electric Purcell factor control through geometry optimization of high index dielectric nanostructures. Optics Express, 2022, 30 (12), pp.20360-20372. ⟨10.1364/OE.460168⟩. ⟨hal-03757244⟩

Meiling Zhang, Jean-Marie Poumirol, Nicolas Chery, Clement Majorel, Rémi Demoulin, et al.. Infrared nanoplasmonic properties of hyperdoped embedded Si nanocrystals in the few electrons regime. Nanophotonics, 2022, 2022, pp.0283. ⟨10.1515/nanoph-2022-0283⟩. ⟨hal-03737737⟩

Nemanja Peric, Corentin Durand, Maxime Berthe, Yan Lu, Kekeli N'Konou, et al.. Direct measurement of band offsets on selective area grown In0.53Ga0.47As/InP heterojunction with multiple probe scanning tunneling microscopy. Applied Physics Letters, 2022, 121 (19), pp.192104. ⟨10.1063/5.0104807⟩. ⟨hal-03846293⟩

Takafumi Yamaguchi, Naoto Usami, Kei Misumi, Atsushi Toyokura, Akio Higo, et al.. Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping. Journal of Microelectromechanical Systems, 2022, 31 (5), pp.802-812. ⟨10.1109/JMEMS.2022.3187428⟩. ⟨hal-03864769⟩

Aurélie Lecestre, Mickael Martin, Fuccio Cristiano, Thierry Baron, Guilhem Larrieu. Large-Scale Monolithic Fabrication of III–V Vertical Nanowires on a Standard Si(100) Microelectronic Substrate. ACS Omega, 2022, 7, pp.5836 - 5843. ⟨10.1021/acsomega.1c05876⟩. ⟨hal-03600996⟩

Ana Estrada-Real, Abdourahman Khaireh-Walieh, Bernhard Urbaszek, Peter R. Wiecha. Inverse design with flexible design targets via deep learning: Tailoring of electric and magnetic multipole scattering from nano-spheres. Photonics and Nanostructures - Fundamentals and Applications, 2022, 52, pp.101066. ⟨10.1016/j.photonics.2022.101066⟩. ⟨hal-03800170⟩

Mélodie Humbert, Peter Wiecha, Gérard Colas Des Francs, Xiao Yu, Nicolas Mallet, et al.. Tailoring wavelength and emitter-orientation dependent propagation of single photons in silicon nanowires. Physical Review Applied, 2022, 17 (1), pp.014008. ⟨10.1103/PhysRevApplied.17.014008⟩. ⟨hal-03611963⟩

Clément Majorel, Christian Girard, Arnaud Arbouet, Otto L. Muskens, Peter Wiecha. Deep learning enabled strategies for modelling of complex aperiodic plasmonic metasurfaces of arbitrary size. ACS photonics, 2022, 9 (2), pp.575-585. ⟨10.1021/acsphotonics.1c01556⟩. ⟨hal-03367168⟩

Eléna Bedel-Pereira, Julien Bassaler, Hugo Laval, J Holec, Richard Monflier, et al.. Benzohexacene guide in accurate determination of field effect carrier mobilities in long acenes. RSC Advances, 2022, 12 (2), pp.671 - 680. ⟨10.1039/d1ra07808a⟩. ⟨hal-03529654⟩

Kai Sun, Evangelos Vassos, Xingzhao Yan, Callum Wheeler, James Churm, et al.. Wafer‐Scale 200 mm Metal Oxide Infrared Metasurface with Tailored Differential Emissivity Response in the Atmospheric Windows. Advanced Optical Materials, 2022, 10 (17), pp.2200452. ⟨10.1002/adom.202200452⟩. ⟨hal-03822489⟩

Ziyang Gan, Ioannis Paradisanos, Ana Estrada-Real, Julian Picker, Emad Najafidehaghani, et al.. Chemical Vapor Deposition of High‐Optical‐Quality Large‐Area Monolayer Janus Transition Metal Dichalcogenides. Advanced Materials, 2022, 34 (38), pp.2205226. ⟨10.1002/adma.202205226⟩. ⟨hal-03822483⟩

Simon Grall, Abhishek Kumar, Laurent Jalabert, Soo-Hyeon Kim, Guilhem Larrieu, et al.. Random telegraph signals in nanoscale vertical junctionless transistor with gate-all-around. Applied Physics Letters, 2022, 15 (7), pp.075001. ⟨10.35848/1882-0786/ac72f6⟩. ⟨hal-03607609⟩

Nicolas Chery, Meiling Zhang, Nicolas Mallet, Grégory Seine, Vincent Paillard, et al.. Study of recrystallization and activation processes in thin and highly doped silicon-on-insulator layers by nanosecond laser thermal annealing. Journal of Applied Physics, 2022, 131 (6), pp.014008. ⟨10.1063/5.0073827⟩. ⟨hal-04236606⟩

Clément Majorel, Adelin Patoux, Ana Estrada-Real, Bernhard Urbaszek, Christian Girard, et al.. Generalizing the exact multipole expansion: density of multipole modes in complex photonic nanostructures. Nanophotonics, 2022, 11 (16), pp.3663-3678. ⟨10.1515/nanoph-2022-0308⟩. ⟨hal-03800162⟩

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Panče Naumov, Thierry Leichle, et al.. Microelectromechanical devices driven by thermosalient effects. Cell Reports Physical Science, 2022, 3 (11), pp.101133. ⟨10.1016/j.xcrp.2022.101133⟩. ⟨hal-03840274⟩

Yuteng Zhang, Lijun Zhang, Karl Ridier, Lionel Salmon, Isabelle Séguy, et al.. Switching endurance of the molecular spin crossover complex [Fe(HB(tz)3)2]: from single crystals to thin films and electronic devices. Materials Advances, 2022, 3 (22), pp.8193-8200. ⟨10.1039/D2MA00802E⟩. ⟨hal-03790181⟩

Dima Sadek, Richard Daubriac, Corentin Durand, Richard Monflier, Quentin Gravelier, et al.. Structural and Electrical Characterizations of BiSb Topological Insulator Layers Epitaxially Integrated on GaAs. Crystal Growth & Design, 2022, 22 (8), pp.5081-5091. ⟨10.1021/acs.cgd.2c00585⟩. ⟨hal-03775836⟩

Bruno Neckel Wesling, Marina Deng, Mukherjee Chhandak, Magali de Matos, Abhishek Kumar, et al.. Extraction of small-signal equivalent circuit for de-embedding of 3D vertical nanowire transistor. Solid-State Electronics, 2022, 194, pp.108359. ⟨10.1016/j.sse.2022.108359⟩. ⟨hal-03657781⟩

Conference papers

L.A. Lozano-Hernández, Jean Baptiste Doucet, Benjamin Reig, Ludovic Salvagnac, Isabelle Séguy, et al.. Design and optimization of a Blue fluorescent Microcavity-Organic Light-Emitting Diode (MOLED) for an algae excitation light source application. 15th International Symposium on Flexible Organic Electronics (ISFOE22), Jul 2022, Thessaloniki, Greece. ⟨hal-04255819⟩

Bruno Neckel Wesling, Marina Deng, Mukherjee Chhandak, Abhishek Kumar, Guilhem Larrieu, et al.. Extraction of small signal equivalent circuit for de-embedding of 3D vertical nanowire transistor. 8th Joint International EuroSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS 2022), May 2022, Udine, Italy. à paraître. ⟨hal-03864048⟩

Stéphane Calvez, Lijun Zhang, Margaux Loison, Olivier Gauthier-Lafaye, David Bourrier, et al.. Spin-crossover molecular complexes for visible-light modulators. Photonics Europe, SPIE, Apr 2022, Strasbourg, France. pp.35. ⟨hal-03748945⟩

Cristell Maneux, Mukherjee Chhandak, Marina Deng, Bruno Neckel Wesling, Lucas Réveil, et al.. Circuit Design Flow dedicated to 3D vertical nanowire FET. IEEE Latin American Electron Devices Conference (LAEDC 2022), Jul 2022, Puebla, Mexico. ⟨10.1109/LAEDC54796.2022.9908233⟩. ⟨hal-03765071⟩

Rémi Demoulin, Richard Daubriac, Louis Thuries, Emmanuel Scheid, Fabien Rozé, et al.. Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films. IEEE International Interconnect Technology Conference (IITC) 2022, Jun 2022, San José, California, United States. ⟨10.1109/iitc52079.2022.9881308⟩. ⟨hal-03795894⟩

Jonas Müller, Aurélie Lecestre, Rémi Demoulin, Fuccio Cristiano, J. M. Hartmann, et al.. Advances in top-down fabrication and processing of vertical SiGe nanowire arrays for future nanoelectronics applications. J2N 2022 - Journées Nationales Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03771519⟩

Inès Muguet, Fabrice Mathieu, Ali Maziz, Laurent Mazenq, Guilhem Larrieu. Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution. Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03845587⟩

Arnaud Poittevin, Ian O'Connor, Cédric Marchand, Alberto Bosio, Cristell Maneux, et al.. A Logic Cell Design and routing Methodology Specific to VNWFET. 2022 20th IEEE Interregional NEWCAS Conference (NEWCAS), Jun 2022, Quebec City, Canada. pp.460-464, ⟨10.1109/NEWCAS52662.2022.9842100⟩. ⟨hal-03864493⟩

Karine Isoird, Josiane Tasselli, Yohann Spiegel, Raid. Gourad, Fuccio Cristiano, et al.. Locally Ion Implantation and Annealing Effects in Diamond. E-MRS 2022 Fall Meeting., Sep 2022, Warsaw, Poland. ⟨hal-03766749⟩

Lucas Réveil, Mukherjee Chhandak, Cristell Maneux, Marina Deng, François Marc, et al.. Analysis of an Inverter Logic Cell based on 3D Vertical NanoWire Junction-Less Transistors. 30th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC 2022), Oct 2022, Patras, Greece. 2 p., ⟨10.1109/VLSI-SoC54400.2022.9939576⟩. ⟨hal-03765079⟩

Other documents

Pascal Dubreuil, Emmanuel Scheid. Investigating the nucleation of Al2O3 on clean Si in ALD : plasma post and pre-processing. School of Atomic Layer Deposition, Oct 2022, Autrans, France. , 2022. ⟨hal-03843720⟩

Pascal Dubreuil, Emmanuel Scheid. Investigating the nucleation of Al2O3 on clean Si in ALD : plasma post and pre-processing. School of Atomic Layer Deposition, Oct 2022, AUTRANS, France. 2022. ⟨hal-03845065⟩

Jonas Müller, Aurélie Lecestre, Rémi Demoulin, Fuccio Cristiano, J. M. Hartmann, et al.. Top-Down Fabrication of Vertical Nanostructured Channel Arrays on SiGe for Future Nanoelectronics Applications. MNE Eurosensors 2022, Sep 2022, Leuven, Belgium. 2022. ⟨hal-03771503⟩

Preprints, Working Papers, ...

Q. Zhang, D. Sánchez-Garcia, R. Desgarceaux, A. Gomez, P. Escofet-Majora, et al.. Nanostructure engineering of epitaxial piezoelectric {\alpha}-quartz thin films on silicon. 2022. ⟨hal-02290299⟩

Abhishek Kumar, Jonas Müller, Aurélie Lecestre, Guilhem Larrieu. Vertical Junction-less Gate-All-Around Transistors with Reliable 3D Multilevel Contact Engineering for High Performance and Low Power Applications. 2022. ⟨hal-03600982⟩


Journal articles

Peter Wiecha, Arnaud Arbouet, Christian Girard, Otto L. Muskens. Deep learning in nano-photonics: inverse design and beyond. Photonics research, 2021, 9 (5), pp. B182-B200. ⟨10.1364/PRJ.415960⟩. ⟨hal-03040153⟩

Peter Wiecha, Clément Majorel, Arnaud Arbouet, Adelin Patoux, Yoann Brûlé, et al.. "pyGDM" - new functionalities and major improvements to the python toolkit for nano-optics full-field simulations. Computer Physics Communications, 2021, 270, pp.108142. ⟨10.1016/j.cpc.2021.108142⟩. ⟨hal-03224983⟩

Ahmet Lale, Matthieu Joly, Samir Mekkaoui, Xavier Joly, Emmanuel Scheid, et al.. Effect of thermal annealing on the dielectric, passivation and pH detection properties of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition. Thin Solid Films, 2021, 732, pp.138761. ⟨10.1016/j.tsf.2021.138761⟩. ⟨hal-03380757⟩

Richard Monflier, Toshiyuki Tabata, Hiba Rizk, Julien Roul, Karim Huet, et al.. Investigation of Oxygen penetration during UV Nanosecond Laser Annealing of Silicon at high energy densities. Applied Surface Science, 2021, 536, pp.149071. ⟨10.1016/j.apsusc.2021.149071⟩. ⟨hal-03098053⟩

Mukherjee Chhandak, Arnaud Poittevin, Ian O'Connor, Guilhem Larrieu, Cristell Maneux. Compact Modeling of 3D Vertical Junctionless Gate-allaround Silicon Nanowire Transistors Towards 3D Logic Design. Solid-State Electronics, 2021, 183, pp.108125. ⟨10.1016/j.sse.2021.108125⟩. ⟨hal-03429568⟩

Nicholas J Dinsdale, Peter Wiecha, Matthew Delaney, Jamie Reynolds, Martin Ebert, et al.. Deep learning enabled design of complex transmission matrices for universal optical components. ACS photonics, 2021, 8 (1), pp.283-295. ⟨10.1021/acsphotonics.0c01481⟩. ⟨hal-02994029⟩

Jean-Marie Poumirol, Clément Majorel, Nicolas Chery, Christian Girard, Peter Wiecha, et al.. Hyper-doped silicon nanoantennas and metasurfaces for tunable infrared plasmonics. ACS photonics, 2021, 8 (5), pp.1393-1399. ⟨10.1021/acsphotonics.1c00019⟩. ⟨hal-03040170⟩

Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter Wiecha, et al.. Challenges in nanofabrication for efficient optical metasurfaces. Scientific Reports, 2021, 11 (1), pp.5620. ⟨10.1038/s41598-021-84666-z⟩. ⟨hal-03367438⟩

Dima Sadek, Daya S Dhungana, Roland Coratger, Corentin Durand, Arnaud Proietti, et al.. Integration of the Rhombohedral BiSb(0001) Topological Insulator on a Cubic GaAs(001) Substrate. ACS Applied Materials & Interfaces, 2021, 13 (30), pp.36492-36498. ⟨10.1021/acsami.1c08477⟩. ⟨hal-03407922⟩

Hao Tang, Corentin Durand, Roland Coratger. Adsorption of single metallic atoms on self-assembled molecular domain of terephthalic acid. Surfaces and Interfaces, 2021, 25, pp.101170. ⟨10.1016/j.surfin.2021.101170⟩. ⟨hal-03374709⟩


Fuccio Cristiano, Antonino La Magna (Dir.). Laser annealing processes in semiconductor technology: Theory, modeling, and applications in nanoelectronics. Elsevier, 426p., 2021, 9780128202555. ⟨hal-03341138⟩

Book sections

Ray Duffy, Enrico Napolitani, Fuccio Cristiano. Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors. Laser Annealing Processes in Semiconductor Technology. Theory, Modeling and Applications in Nanoelectronics, Chapter 5, Elsevier, pp.175-250, 2021, 9780128202555. ⟨hal-03341171⟩

Arnaud Poittevin, Chhandak Mukherjee, Ian O'Connor, Cristell Maneux, Guilhem Larrieu, et al.. 3D Logic Cells Design and Results Based on Vertical NWFET Technology Including Tied Compact Model. VLSI-SoC: Design Trends, 621, Springer International Publishing, pp.301-321, 2021, IFIP Advances in Information and Communication Technology, ⟨10.1007/978-3-030-81641-4_14⟩. ⟨hal-03371673⟩

Conference papers

Inès Muguet, Ali Maziz, Laurent Mazenq, Fabrice Mathieu, Guilhem Larrieu. Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity. 2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States. ⟨hal-03845567⟩

Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter Wiecha, et al.. Influence of nanofabrication errors on optical metasurfaces performances: study and minimization strategies. Flat Optics: Components to Systems 2021, Jun 2021, Washington, DC, United States. ⟨hal-03371657⟩

Takafumi Yamaguchi, Naoto Usami, Kei Misumi, Atsushi Toyokura, Akio Higo, et al.. Self-Deformable Flexible Mems Tweezer Made of Poly (Vinylidene Fluoride) /Ionic Liquid Gel with Electrical Measurement Capability. 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2021, Orlando (on line), United States. pp.18-21, ⟨10.1109/Transducers50396.2021.9495482⟩. ⟨hal-03426266⟩

Toshiyuki Tabata, Pierre - Edouard Raynal, Fabien Rozé, Sébastien Halty, Louis Thuries, et al.. Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing. IEEE International Interconnect Technology Conference (IITC 2021), Jul 2021, Kyoto (virtual), Japan. ⟨10.1109/IITC51362.2021.9537312⟩. ⟨hal-03412643⟩

Cristell Maneux, Mukherjee Chhandak, Marina Deng, Maeva Dubourg, Lucas Réveil, et al.. Why neuromorphic computing need novel 3D technologies? A view from FVLLMONTI European project consortium (Invited). High Performance Embedded Architecture and Compilation, Computing Systems Week, (HiPEAC CSW) Autumn 2021, Oct 2021, Lyon, France. ⟨hal-03408071⟩

Antoine Jay, Anne Hémeryck, Fuccio Cristiano, Denis Rideau, Pierre-Louis Julliard, et al.. Clusters of Defects as a Possible Origin of Random Telegraph Signal in Imager Devices: a DFT based Study. International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2021, Dallas, United States. pp.128-132, ⟨10.1109/SISPAD54002.2021.9592553⟩. ⟨hal-03366621⟩

Fuccio Cristiano, Richard Monflier, Richard Daubriac, Rémi Demoulin, Emmanuel Scheid, et al.. Stress relaxation and dopant activation in nsec laser annealed SiGe. IWJT - International Workshop on Junction Technology, Jun 2021, Kyoto (on line), Japan. ⟨10.23919/IWJT52818.2021.9609361⟩. ⟨hal-03449341⟩

Peter Wiecha, Guilhem Larrieu, Aurélie Lecestre, Otto Muskens. Overcoming Limits in Nano-Optical Simulations, Design and Experiments Using Deep Learning. META, Jul 2021, Warsaw, Poland. ⟨hal-03611990⟩

Ian O'Connor, Arnaud Poittevin, Sébastien Le Beux, Alberto Bosio, Zlatan Stanojevic, et al.. Analysis of Energy-Delay-Product of a 3D Vertical Nanowire FET Technology. EuroSOI-ULIS, Sep 2021, Caen, France. ⟨10.1109/EuroSOI-ULIS53016.2021.9560180⟩. ⟨hal-03407210⟩

Pierre-Louis Julliard, Antoine Jay, Miha Gunde, Nicolas Salles, Frederic Monsieur, et al.. Kinetic Monte Carlo for Process Simulation: First Principles Calibrated Parameters for BO 2. International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2021, Dallas, United States. pp.219-223, ⟨10.1109/SISPAD54002.2021.9592580⟩. ⟨hal-03366600⟩

Cristell Maneux, Mukherjee Chhandak, Marina Deng, Maeva Dubourg, Lucas Réveil, et al.. Modelling of vertical and ferroelectric junctionless technology for efficient 3D neural network compute cube dedicated to embedded artificial intelligence (Invited). 67th Annual IEEE International Electron Devices Meeting (IEDM 2021), Dec 2021, San Fransisco, United States. ⟨10.1109/IEDM19574.2021.9720572⟩. ⟨hal-03408078⟩

Lya Fontaine, Karine Isoird, Josiane Tasselli, Patrick Austin, Emmanuel Scheid, et al.. Développement de briques technologiques pour la fabrication de composants MOS diamant : contacts ohmiques et capacités MIS sur diamant de type P. SYMPOSIUM DE GENIE ELECTRIQUE (SGE 2020), Jul 2021, Nantes, France. ⟨hal-02918490v2⟩

Lya Fontaine, Karine Isoird, Josiane Tasselli, Emmanuel Scheid, Patrick Austin, et al.. Fabrication and characterization of Si3N4-MIS structures on p-type diamond. 31st International Conference on Diamond and Carbon Materials, Sep 2021, On line, Spain. ⟨hal-03445543⟩

Other documents

Y Zhang, L Zhang, Isabelle Séguy, K Ridier, V Shalabaeva, et al.. MODULATION OPTIQUE VISIBLE INDUITE PAR UN MATERIAU A CHANGEMENT DE PHASE. Optique 2021, Jul 2021, Dijon, France. 2021. ⟨hal-03354756⟩

Cristell Maneux, David Atienza, Alexandre Levisse, Giovanni Ansaloni, Oskar Baumgartner, et al.. How novel technologies can boost neuromorphic computing? A view from European project consortia (Invited). Workshop NEUROTECH, 2021. ⟨hal-03408059⟩

Josiane Tasselli, Lya Fontaine, Karine Isoird, Emmanuel Scheid, Patrick Austin, et al.. Study of Ti/Pt/Au ohmic contacts on P-type boron doped (100) diamond with linear and circular TLM structures. 31st International Conference on Diamond and Carbon Materials, Sep 2021, ONLINE, Spain. 2021. ⟨hal-03445531⟩

Pascal Dubreuil, Jean-Christophe Marrot, Emmanuel Scheid, Éric Imbernon. Protocole d'utilisation du four de dépôt LPCVD Tempress pour le dépôt de silicium polycristallin dopé B. Rapport LAAS n° 21083. 2021. ⟨hal-03181950⟩


Journal articles

Yuteng Zhang, Karl Ridier, Victoria Shalabaeva, Isabelle Séguy, Sylvain Pelloquin, et al.. A molecular spin-crossover film allows for wavelength tuning of the resonance of a Fabry–Perot cavity. Journal of Materials Chemistry C, 2020, 8 (24), pp.8007-8011. ⟨10.1039/d0tc02094j⟩. ⟨hal-02882283⟩

Jean-Marie Poumirol, Ioannis Paradisanos, Shivangi Shree, Gonzague Agez, Xavier Marie, et al.. Unveiling the optical emission channels of monolayer semiconductors coupled to silicon nanoantennas. ACS photonics, 2020, 7 (11), pp.3106-3115. ⟨10.1021/acsphotonics.0c01175⟩. ⟨hal-03075337⟩

Qianzhe Zhang, David Sánchez-Fuentes, Rudy Desgarceaux, Pau Escofet-Majoral, Judith Oró-Soler, et al.. Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon. ACS Applied Materials & Interfaces, 2020, 12 (4), pp.4732-4740. ⟨10.1021/acsami.9b18555⟩. ⟨hal-03093824⟩

Z. Su, R. Žitko, P. Zhang, H. Wu, D. Car, et al.. Erasing odd-parity states in semiconductor quantum dots coupled to superconductors. Physical Review B, 2020, 101 (23), pp.235315. ⟨10.1103/PhysRevB.101.235315⟩. ⟨hal-02881117⟩

L. Dagault, S. Kerdilès, P Acosta-Alba, J.-M. Hartmann, J.-P. Barnes, et al.. Investigation of recrystallization and stress relaxation in nanosecond laser annealed Si 1−x Ge x /Si epilayers. Applied Surface Science, 2020, 527, pp.146752. ⟨10.1016/j.apsusc.2020.146752⟩. ⟨hal-02983939⟩

Raghda Makarem, Fuccio Cristiano, Dominique Muller, Pier-Francesco Fazzini. An Improved STEM/EDX Quantitative Method for Dopant Profiling at the Nanoscale. Microscopy and Microanalysis, 2020, 26 (1), pp.76 - 85. ⟨10.1017/s1431927619015241⟩. ⟨hal-03097328⟩

Yuteng Zhang, Isabelle Séguy, Karl Ridier, Victoria Shalabaeva, Mario Piedrahita-Bello, et al.. Resistance Switching in Large-Area Vertical Junctions of the Molecular Spin Crossover Complex [Fe(HB(tz) 3 ) 2 ]: ON/OFF Ratios and Device Stability. Journal of Physics: Condensed Matter, 2020, 32 (21), pp.214010. ⟨10.1088/1361-648X/ab741e⟩. ⟨hal-03019003⟩

Fadhila Sekli-Belaidi, Ludovic Salvagnac, Sandrine Assié-Souleille, Marie-Charline Blatché, Eléna Bedel-Pereira, et al.. Accurate physiological monitoring using lab-on-a-chip platform for aquatic micro-organisms growth and optimized culture. Sensors and Actuators B: Chemical, 2020, 321, pp.128492. ⟨10.1016/j.snb.2020.128492⟩. ⟨hal-03004590⟩

Conference papers

P.L. Julliard, P. Dumas, F. Monsieur, F. Hilario, D. Rideau, et al.. Implant heating contribution to amorphous layer formation: a KMC approach. 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2020, Kobe, Japan. pp.43-46, ⟨10.23919/SISPAD49475.2020.9241608⟩. ⟨hal-03095123⟩

Mukherjee Chhandak, Guilhem Larrieu, Cristell Maneux. Compact Modeling of 3D Vertical Junctionless Gate-all-around Silicon Nanowire Transistors. EuroSOI-ULIS 2020, Sep 2020, Caen, France. ⟨hal-02869216⟩

Mukherjee Chhandak, Marina Deng, François Marc, Cristell Maneux, Arnaud Poittevin, et al.. 3D logic cells design and results based on Vertical NWFET technology including tied compact model. 28th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC) 2020, Oct 2020, Salt Lake City (virtual), United States. ⟨10.1109/VLSI-SOC46417.2020.9344094⟩. ⟨hal-03166674⟩

Anne-Sophie Royet, L. Dagault, Sebastien Kerdiles, Pablo Acosta Alba, J.P P Barnes, et al.. Undoped SiGe material calibration for numerical nanosecond laser annealing simulations. SISPAD International Conference on Simulation of Semiconductor Processes and Devices, Sep 2020, VIRTUAL CONFERENCE, Japan. ⟨10.23919/SISPAD49475.2020.9241664⟩. ⟨hal-03097960⟩

Preprints, Working Papers, ...

Ian O'Connor, Zlatan Stanojevic, Oskar Baumgartner, Chhandak Mukherjee, Guilhem Larrieu, et al.. Analysis of Energy-Delay-Product for a 3D Vertical Nanowire FET Technology for Logic Applications. 2020. ⟨hal-02732902⟩


Journal articles

M. Schnedler, T. Xu, Isabelle Lefebvre, J.-P. Nys, S R Plissard, et al.. Iuliacumite: A Novel Chemical Short-Range Order in a Two-Dimensional Wurtzite Single Monolayer InAs 1– x Sb x Shell on InAs Nanowires. Nano Letters, 2019, 19 (12), pp.8801-8805. ⟨10.1021/acs.nanolett.9b03584⟩. ⟨hal-03036942⟩

J G Kroll, F Borsoi, K L van Der Enden, W Uilhoorn, D de Jong, et al.. Magnetic-Field-Resilient Superconducting Coplanar-Waveguide Resonators for Hybrid Circuit Quantum Electrodynamics Experiments. Physical Review Applied, 2019, 11, ⟨10.1103/PhysRevApplied.11.064053⟩. ⟨hal-02332254⟩

J Chen, B D Woods, P Yu, M. Hocevar, D. Car, et al.. Ubiquitous Non-Majorana Zero-Bias Conductance Peaks in Nanowire Devices. Physical Review Letters, 2019, 123 (10), pp.107703. ⟨10.1103/PhysRevLett.123.107703⟩. ⟨hal-02332243⟩

Georgios Gakis, Hugues Vergnes, Emmanuel Scheid, Constantin Vahlas, Andreas Boudouvis, et al.. Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water. Chemical Engineering Science, 2019, 195, pp.399-412. ⟨10.1016/j.ces.2018.09.037⟩. ⟨hal-02329135⟩

M. Schnedler, T Xu, V Portz, J-P Nys, S.R. Plissard, et al.. Composition modulation by twinning in InAsSb nanowires Composition modulation by twinning in InAsSb nanowires. Nanotechnology, 2019, 30 (32), ⟨10.1088/1361-6528/aaf9ce⟩. ⟨hal-02332273⟩

Georgios Gakis, Constantin Vahlas, Hugues Vergnes, Sandrine Dourdain, Yann Tison, et al.. Investigation of the initial deposition steps and the interfacial layer of Atomic Layer Deposited (ALD) Al 2 O 3 on Si. Applied Surface Science, 2019, 492, pp.245 - 254. ⟨10.1016/j.apsusc.2019.06.215⟩. ⟨hal-02396239⟩

Daya Dhungana, Anne Hémeryck, Nicolo Sartori, Pier-Francesco Fazzini, Fuccio Cristiano, et al.. Insight of surface treatments for CMOS compatibility of InAs nanowires. Nano Research, 2019, 12, pp.581-586. ⟨10.1007/s12274-018-2257-8⟩. ⟨hal-02017661⟩

Adrian Díaz Álvarez, Nemanja Peric, Nathali Alexandra Franchina Vergel, Jean-Philippe Nys, Maxime Berthe, et al.. Importance of point defect reactions for the atomic-scale roughness of III-V nanowire sidewalls. Nanotechnology, 2019, 30 (32), pp.324002. ⟨10.1088/1361-6528/ab1a4e⟩. ⟨hal-02332261⟩

Peter Wiecha, Clément Majorel, Christian Girard, Arnaud Arbouet, Bruno Masenelli, et al.. Enhancement of electric and magnetic dipole transition of rare-earth-doped thin films tailored by high-index dielectric nanostructures. Applied optics, 2019, 58 (7), pp.1682. ⟨10.1364/AO.58.001682⟩. ⟨hal-02086098⟩

Fadhila Sekli-Belaidi, Léa Farouil, Ludovic Salvagnac, Pierre Temple-Boyer, Isabelle Séguy, et al.. Towards integrated multi-sensor platform using dual electrochemical and optical detection for on-site pollutant detection in water. Biosensors and Bioelectronics, 2019, 132, pp.90-96. ⟨10.1016/j.bios.2019.01.065⟩. ⟨hal-02048795⟩

Peter Wiecha, Aurélie Lecestre, Nicolas Mallet, Guilhem Larrieu. Pushing the limits of optical information storage using deep learning. Nature Nanotechnology, 2019, 14 (3), pp.237-244. ⟨10.1038/s41565-018-0346-1⟩. ⟨hal-02382045⟩

Luis Marques, María Aboy, Iván Santos, Pedro López, Fuccio Cristiano, et al.. On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2019, 458, pp.179-183. ⟨10.1016/j.nimb.2018.09.030⟩. ⟨hal-01921136⟩

Eléna Bedel-Pereira, Richard Monflier, Mathieu Thene, Bernard Franc, Ludovic Salvagnac, et al.. Magnetic Field Effects in X-Ray Damaged NPB and MADN OLEDs. IEEE Transactions on Magnetics, 2019, 55 (2), pp.1-4. ⟨10.1109/TMAG.2018.2856590⟩. ⟨hal-02051962⟩

Léa Dagault, P. Acosta-Alba, S. Kerdiles, J. P. Barnes, J. M. Hartmann, et al.. Impact of UV Nanosecond Laser Annealing on Composition and Strain of Undoped Si0.8Ge0.2 Epitaxial Layers. ECS Journal of Solid State Science and Technology, 2019, 8 (3), pp.202-208. ⟨10.1149/2.0191903jss⟩. ⟨cea-02186445⟩

Georgios Gakis, Hugues Vergnes, Fuccio Cristiano, Yann Tison, Constantin Vahlas, et al.. Ιn situ N 2 -NH 3 plasma pre-treatment of silicon substrate enhances the initial growth and restricts the substrate oxidation during alumina ALD. Journal of Applied Physics, 2019, 126 (12), pp.125305. ⟨10.1063/1.5113755⟩. ⟨hal-02396236⟩

Jouri Bommer, Hao Zhang, Önder Gül, Bas Nijholt, Michael Wimmer, et al.. Spin-Orbit Protection of Induced Superconductivity in Majorana Nanowires. Physical Review Letters, 2019, 122, ⟨10.1103/PhysRevLett.122.187702⟩. ⟨hal-02332269⟩

Conference papers

A-S. Royet, S. Kerdiles, P. Acosta Alba, Caroline Bonafos, Vincent Paillard, et al.. Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures. 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Sep 2019, Udine, Italy. pp.1-4, ⟨10.1109/SISPAD.2019.8870529⟩. ⟨hal-02392503⟩

Peter Wiecha, Clément Majorel, Christian Girard, Arnaud Arbouet, Bruno Masenelli, et al.. Tailoring electric and magnetic dipole emissions by high-refractive index dielectric nanostructures. 10th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2019), Jul 2019, Lisbonne, Portugal. ⟨hal-02303763⟩

European Projects

ANR Projects

  • PRC "3D-BEAM-FLEX" (2020-2024)
  • JCJC "NAINOS" (2022-2026)
  • PRC "VERDICT" (2023-2026)
  • PRC "AIM" (2023-2027)
  • PRC "MOBInACENE" (2023-2027)
  • PRC "TopMemo" (2024-2027)


  • PhD fellowship, EpiCentre (2024-2027)
  • IQO postDoc grant "HypTop" (2023-2024)
  • nanoX postDoc grant "TOPOSOT" (2023-2024)
  • IQO postDoc grant "CryoSup" (2024-2025)
  • TIRIS "Scaling up MolElec" (2023-2027)

Editorial activities

  • Dr. S. Plissard: Associate Editor of The European Physical Journal Applied Physics (EPJ AP)
  • Dr. V. Bardinal: Associate Editor of the Journal of Optical Microsystems



  • O. Soppera, V. Bardinal et al. U.S. Patent No 11,054,579, 6 (2021)

Jobs / Interships



Notre équipe de recherche

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