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Liviu Nicu

Liviu Nicu

Team

MEMS : Microelectromechanical systems

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Latest publications

2024

Journal articles

Rajat Gujrati, Ali Kassem, Cédric Ayela, Fabrice Mathieu, Liviu Nicu, et al.. Transfer of III-nitride epitaxial layers onto pre-patterned silicon substrates for the simple fabrication of free-standing MEMS. Applied Physics Letters, 2024, 124 (10), pp.104102. ⟨10.1063/5.0191772⟩. ⟨hal-04495378⟩

2023

Conference papers

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨hal-03951363⟩

2022

Journal articles

Jad Mahmoud Halabi, Isabelle Séguy, Ludovic Salvagnac, Panče Naumov, Thierry Leichle, et al.. Microelectromechanical devices driven by thermosalient effects. Cell Reports Physical Science, 2022, 3 (11), pp.101133. ⟨10.1016/j.xcrp.2022.101133⟩. ⟨hal-03840274⟩

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

Jose Elias Angulo Cervera, Mario Piedrahita-Bello, Baptiste Martin, Eric Dantras, Liviu Nicu, et al.. The crystallinity and piezoelectric properties of spray-coated films of P(VDF70-TrFE30): effect of film thickness and spin-crossover nanofillers. Journal of Materials Chemistry C, 2022, 10 (21), pp.8466-8473. ⟨10.1039/D2TC01162J⟩. ⟨hal-03670058⟩

Conference papers

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Laurent Colin, et al.. H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France. ⟨hal-03778623⟩

Proceedings

Vincent Gerbaud, Pierre Aimar, François Charru, Olivier Eichwald, Julia Hidalgo, et al.. Science en conscience, enjeux écologiques et de société - Bilan et perspectives des Assises toulousaines de la Recherche en Ingénierie 2022. Assises toulousaines de la Recherche en Ingénierie 2022, 2022. ⟨hal-04235199⟩

2021

Journal articles

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Barbora Brachňaková, Alejandro Enríquez-Cabrera, Liviu Nicu, et al.. Photoactuation of micromechanical devices by photochromic molecules. Materials Advances, 2021, 2 (15), pp.5057-5061. ⟨10.1039/d1ma00480h⟩. ⟨hal-03285954⟩

José Elías Angulo-Cervera, Mario Piedrahita-Bello, Fabrice Mathieu, Thierry Leichle, Liviu Nicu, et al.. Investigation of the Effect of Spin Crossover on the Static and Dynamic Properties of MEMS Microcantilevers Coated with Nanocomposite Films of [Fe(Htrz)2(trz)](BF4)@P(VDF-TrFE). Magnetochemistry, 2021, 7 (8), pp.114. ⟨10.3390/magnetochemistry7080114⟩. ⟨hal-03329761⟩

Conference papers

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maria Dolores Manrique-Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China. ⟨hal-03424049⟩

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maira Dolores Manrique Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials. 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021), Apr 2021, Xiamen, China. ⟨hal-03210652⟩

2020

Journal articles

Thierry Leichle, Liviu Nicu, Thomas Alava. MEMS Biosensors and COVID-19: Missed Opportunity. ACS Sensors, 2020, 5 (11), pp.3297-3305. ⟨10.1021/acssensors.0c01463⟩. ⟨hal-02972242⟩

Daisuke Saya, Denis Dezest, Aaron Welsh, Fabrice Mathieu, Olivier Thomas, et al.. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films. Journal of Micromechanics and Microengineering, 2020, 30 (3), pp.035004. ⟨10.1088/1361-6439/ab60bf⟩. ⟨hal-02453806v2⟩

Conference papers

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

2019

Journal articles

Denis Dezest, Thierry Leichle, Pattamon Teerapanich, Fabrice Mathieu, B Tse Sum Bui, et al.. Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers. Journal of Micromechanics and Microengineering, 2019, 29 (2), pp.025013. ⟨10.1088/1361-6439/aaf84e⟩. ⟨hal-02392367⟩

Conference papers

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Thomas Blon, et al.. Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩. ⟨hal-02413900⟩

2018

Journal articles

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Adrian Laborde, Sylvain Rat, Victoria Shalabaeva, et al.. Micromachining-compatible, facile fabrication of polymer nanocomposite spin crossover actuators. Advanced Functional Materials, 2018, 28 (29), pp.1801970. ⟨10.1002/adfm.201801970⟩. ⟨hal-01816709⟩

Adrien Casanova, Marie-Charline Blatché, Cécile Ferré, Hélène Martin, Daniel Gonzalez-Dunia, et al.. Self-Aligned Functionalization Approach to Order Neuronal Networks at the Single-Cell Level. Langmuir, 2018, 34 (22), pp.6612 - 6620. ⟨10.1021/acs.langmuir.8b00529⟩. ⟨hal-01816434⟩

Adrien Casanova, Luca Bettamin, Marie-Charline Blatché, Fabrice Mathieu, Daniel Gonzalez-Dunia, et al.. Nanowire based bioprobes for electrical monitoring of electrogenic cells. Journal of Physics: Condensed Matter, 2018, 30 (46), pp.464001. ⟨10.1088/1361-648X/aae5aa⟩. ⟨hal-01942304⟩

Mirko Mikolasek, Maria Dolores Manrique-Juarez, H. J. Shepherd, Karl Ridier, Sylvain Rat, et al.. Complete set of elastic moduli of a spin-crossover solid: Spin-state dependence and mechanical actuation. Journal of the American Chemical Society, 2018, 140 (28), pp.8970-8979. ⟨10.1021/jacs.8b05347⟩. ⟨hal-01961781⟩

Conference papers

Olivier Thomas, Arthur Givois, Aurélien Grolet, Jean-François Deü, Cécile Fuinel, et al.. Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures. EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal. ⟨hal-01962993⟩

2017

Journal articles

María Dolores Manrique-Juárez, Fabrice Mathieu, Victoria Shalabaeva, Jean Cacheux, Sylvain Rat, et al.. A Bistable Microelectromechanical System Actuated by Spin-Crossover Molecules. Angewandte Chemie International Edition, 2017, 56 (28), pp.8074-8078. ⟨10.1002/anie.201702739⟩. ⟨hal-01687804⟩

Aaron Welsh, Denis Dezest, Liviu Nicu, Susan Trolier-Mckinstry. Additively patterned ferroelectric thin films with vertical sidewalls. Journal of the American Ceramic Society, 2017, 100 (3), pp.848-858. ⟨10.1111/jace.14566⟩. ⟨hal-01687796⟩

Conference papers

Adrien Casanova, Marie-Charline Blatché, Fabrice Mathieu, Luca Bettamin, Hélène Martin, et al.. Integration of FinFETs and 3D nanoprobes devices on a common bio-platform for monitoring electrical activity of single neurons. 2017 IEEE International Electron Devices Meeting (IEDM), Dec 2017, San Francisco, United States. ⟨10.1109/IEDM.2017.8268464⟩. ⟨hal-01816371⟩

Daisuke Saya, Denis Dezest, Thierry Leichle, Fabrice Mathieu, Liviu Nicu, et al.. Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films. 2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), May 2017, Atlanta, United States. ⟨10.1109/ISAF.2017.8000219⟩. ⟨hal-01816372⟩

Maria Dolores Manrique-Juarez, Sylvain Rat, Laurent Mazenq, Fabrice Mathieu, Isabelle Séguy, et al.. Spin crossover materials for MEMS actuation: Film integration and characterization. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩. ⟨hal-01816366⟩

Adrien Casanova, Marie-Charline Blatché, Fabrice Mathieu, Aurélie Lecestre, Cécile Ferré, et al.. Probing electrical activity of single neurons based on 1D nanostructures: from extra to intracellular interfacing.. 11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Oct 2016, Toulouse, France. 2p. ⟨hal-01462968⟩

Pierre-Henri Ducrot, Isabelle Dufour, Liviu Nicu, Fabrice Mathieu, Cédric Ayela. Full system for piezoelectric organic MEMS resonators operating in liquid media. Transducers 2017, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2017, Kaohsiung, Taiwan. pp.1372-1375, ⟨10.1109/TRANSDUCERS.2017.7994312⟩. ⟨hal-01500133⟩

2016

Journal articles

Constantin Lefter, Sylvain Rat, José Sánchez Costa, María Dolores Manrique-Juárez, Carlos M. Quintero, et al.. Current Switching Coupled to Molecular Spin-States in Large-Area Junctions. Advanced Materials, 2016, 28 (34), pp. 7508-7514. ⟨10.1002/adma.201601420⟩. ⟨hal-01471630⟩

María Dolores Manrique-Juárez, Sylvain Rat, Lionel Salmon, Gábor Molnár, Quintero Pinzon Carlos Mario, et al.. Switchable molecule-based materials for micro- and nanoscale actuating applications: Achievements and prospects. Coordination Chemistry Reviews, 2016, 308, pp.395 - 408. ⟨10.1016/j.ccr.2015.04.005⟩. ⟨hal-01687805⟩

María Dolores Manrique-Juárez, Sylvain Rat, Fabrice Mathieu, Daisuke Saya, Isabelle Séguy, et al.. Microelectromechanical systems integrating molecular spin crossover actuators. Applied Physics Letters, 2016, 109 (6), pp.061903/1-5. ⟨10.1063/1.4960766⟩. ⟨hal-01687800⟩

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩. ⟨hal-01960876⟩

Conference papers

Pierre-Henri Ducrot, Isabelle Dufour, Fabrice Mathieu, Liviu Nicu, Marie-Christine Durrieu, et al.. Study of cells mechanical properties thanks to organic piezoelectric MEMS resonators. Journées de l’école doctorale SPI Université de Bordeaux, Mar 2016, Bordeaux, France. ⟨hal-01415864⟩

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction. 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria. ⟨hal-01962410⟩

Pierre-Henri Ducrot, Isabelle Dufour, Cédric Ayela, Fabrice Mathieu, Liviu Nicu. Electronic scheme for full control of organic piezoelectric MEMS resonatorss. 2016 IEEE International Frequency Control Symposium (IFCS 2016), May 2016, La Nouvelle Orléans, LA, United States. ⟨10.1109/FCS.2016.7546797⟩. ⟨hal-01271757⟩

Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩. ⟨hal-01279717⟩

Pierre-Henri Ducrot, Isabelle Dufour, Fabrice Mathieu, Liviu Nicu, Martin Heinisch, et al.. Simple fabrication process for organic piezoelectric resonators : application to viscosity measurement. 13th International Workshop on Nanomechanical Sensing (NMC 2016), Jun 2016, Delft, Netherlands. ⟨hal-01301323⟩

2015

Journal articles

Denis Dezest, Olivier Thomas, Fabrice Mathieu, Laurent Mazenq, Caroline Soyer, et al.. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩. ⟨hal-01169283⟩

Denis Remiens, Jean Costecalde, Denis Dezest, Fabrice Mathieu, Liviu Nicu. PFM Performances Analysis of PZT Piezoelectric Nano Cantilevers Fabricated on Si Wafer. Nanoscience &Nanotechnology-Asia, 2015, 5 (1), pp.15-24. ⟨10.2174/2210681205666150601215725⟩. ⟨hal-03525030⟩

Mohand-Tayeb Boudjiet, Johan Bertrand, Fabrice Mathieu, Liviu Nicu, Laurent Mazenq, et al.. Geometry optimization of uncoated silicon microcantilever-based gas density sensors. Sensors and Actuators B: Chemical, 2015, 208, pp.600-607. ⟨10.1016/j.snb.2014.11.067⟩. ⟨hal-01082346⟩

Maéva Collet, Sven Salomon, Naiara Yohanna Klein, Florent Seichepine, Christophe Vieu, et al.. Large-Scale Assembly of Single Nanowires through Capillary-Assisted Dielectrophoresis. Advanced Materials, 2015, 27 (7), pp.1268-1273. ⟨10.1002/adma.201403039⟩. ⟨hal-01942320⟩

Conference papers

Adhitya Bhaswara, Denis Dezest, Liviu Nicu, Thierry Leichle, Bernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩. ⟨hal-01687809⟩

Denis Dezest, Fabrice Mathieu, Laurent Mazenq, Liviu Nicu, Caroline Soyer, et al.. PZT Nanofilm-Based Wafer Scale Nanoresonators. IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p. ⟨hal-01144194⟩

2014

Journal articles

Florian Larramendy, Amel Bendali, Marie-Charline Blatché, Fabrice Mathieu, Serge Picaud, et al.. MISFET-based biosensing interface for neurons guided growth and neuronal electrical activities recording. Sensors and Actuators B: Chemical, 2014, 203, pp.375 - 381. ⟨10.1016/j.snb.2014.06.106⟩. ⟨hal-01504965⟩

Adhitya Bhaswara, Hohyun Keum, S Rhee, Bernard Legrand, Fabrice Mathieu, et al.. Fabrication of nanoplate resonating structures via micro-masonry. Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩. ⟨hal-01687810⟩

Héloïse Colder, B. Domengès, Corentin Jorel, P. Marie, M. Boisserie, et al.. Structural characterisation of BaTiO3 thin films deposited on SrRuO3/YSZ buffered silicon substrates and silicon microcantilevers. Journal of Applied Physics, 2014, 115 (5), pp.053506. ⟨10.1063/1.4863542⟩. ⟨hal-00977777⟩

Conference papers

Mohand-Tayeb Boudjiet, Johan Bertrand, Laurent Mazenq, Thierry Leichle, Fabrice Mathieu, et al.. Sensitivity optimization of silicon microcantilever-based density sensor for hydrogen detection. 11th Nanomechanical Sensing Workshop NMC 2014, Apr 2014, Madrid, Spain. 2 p. ⟨hal-00951760⟩