Annuaire

Bernard Legrand

Bernard Legrand

Équipe

MEMS : Microsystèmes électromécaniques

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Liens

Dernières Publications

2023

Articles dans une revue

Fabienne Berthier, Bernard Legrand. Influence of ordering phenomena on carbon segregation in tungsten screw dislocation. Acta Materialia, 2023, 245, pp.118610. ⟨10.1016/j.actamat.2022.118610⟩. ⟨hal-03765006v2⟩

Communications dans un congrès

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩

2022

Articles dans une revue

L Schwab, P E Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩. ⟨hal-03326075v2⟩

Hakim Amara, Jaysen Nelayah, Jérôme Creuze, Adrian Chmielewski, Damien Alloyeau, et al.. Effect of size on the surface energy of noble metal nanoparticles from analytical and numerical approaches. Physical Review B, 2022, 105 (16), pp.165403. ⟨10.1103/PhysRevB.105.165403⟩. ⟨hal-03863659⟩

Communications dans un congrès

Aleksandra Markovic, Gaël Pillonnet, Bernard Legrand. Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime. Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France. ⟨hal-03649053⟩

2021

Articles dans une revue

Denis Lagrange, Nicolas Mauran, Lucien Schwab, Bernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes. IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩. ⟨hal-02974151⟩

Pré-publications, documents de travail

Hakim Amara, Jaysen Nelayah, Jérôme Creuze, Adrian Chmielewski, Damien Alloyeau, et al.. Is There Really a Size effect on the Surface Energy of Nanoparticles ?. 2021. ⟨hal-03310351⟩

2020

Articles dans une revue

Pierre Etienne Allain, Lucien Schwab, Colin Mismer, Marc Gély, Estelle Mairiaux, et al.. Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces. Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩. ⟨hal-01908683v2⟩

2019

Articles dans une revue

Alexis Front, Bernard Legrand, Guy Tréglia, Christine Mottet. Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2019, 679, pp.128-138. ⟨10.1016/j.susc.2018.08.024⟩. ⟨hal-03547785⟩

Communications dans un congrès

Lucien Schwab, Pierre-Etienne Allain, Louise Banniard, Nicolas Mauran, Denis Lagrange, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩

Lucien Schwab, Pierre Allain, Didier Theron, Marc Faucher, Benjamin Walter, et al.. Optomechanics: a key towards next-generation experiments in atomic force microscopy?. International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France. ⟨hal-02407634⟩

Rapports

Laurent Mazenq, Lucien Schwab, Nicolas Mauran, Denis Lagrange, Xavier Dollat, et al.. Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide. [Rapport Technique] LAAS-CNRS. 2019. ⟨hal-03603368⟩

2018

Articles dans une revue

Alexis Front, Bernard Legrand, G. Tréglia, Christine Mottet. Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2018, 679, pp.128 - 138. ⟨10.1016/j.susc.2018.08.024⟩. ⟨hal-03891247⟩

Communications dans un congrès

Lucien Schwab, Pierre Etienne Allain, L Banniard, A Fafin, Marc Gely, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States. ⟨hal-01963015⟩

Olivier Thomas, Arthur Givois, Aurélien Grolet, Jean-François Deü, Cécile Fuinel, et al.. Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures. EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal. ⟨hal-01962993⟩

Didier Theron, Fei Wang, Thomas Dargent, Damien Ducatteau, Charlene Brillard, et al.. [Invited] SMM characterization of Au nanodots and FcC11SH molecules. XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria. ⟨hal-01962187⟩

Régis Hamelin, Géraldine Andrieux, Isabelle Chartier, Bahaa El Roustom, T. Healy, et al.. The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory. International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany. ⟨hal-01962997⟩

Bernard Legrand, Lucien Schwab, Pierre Allain, Ivan Favero, Marc Faucher, et al.. [Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors. AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States. ⟨hal-01908666⟩

2017

Articles dans une revue

Zhu Beien, Front Alexis, Hazar Guesmi, Jérôme Creuze, Bernard Legrand, et al.. Magic compositions in Pd-Au nanoalloys. Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩. ⟨hal-01426928⟩

Bernard Legrand, Jean-Paul Salvetat, Benjamin Walter, Marc Faucher, Didier Theron, et al.. Multi-MHz micro-electro-mechanical sensors for atomic force microscopy. Ultramicroscopy, 2017, 175, pp.46 - 57. ⟨10.1016/j.ultramic.2017.01.005⟩. ⟨hal-01765180⟩

Christine Mottet, Beien Zhu, Alexis Front, Hazar Guesmi, Jérôme Creuze, et al.. Magic compositions in Pd-Au nanoalloys. Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩. ⟨hal-03547790⟩

Communications dans un congrès

Cécile Fuinel, Fabrice Mathieu, Adrian Laborde, Laurent Mazenq, Christian Bergaud, et al.. High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration. 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩. ⟨hal-01962426⟩

Cécile Fuinel, Fabrice Mathieu, Bernard Legrand. Driving and sensing M/NEMS flexural vibration using dielectric transduction. 31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-01962981⟩

Autres documents

Nicolas Mauran, Denis Lagrange, Xavier Dollat, Laurent Mazenq, Lucien Schwab, et al.. High Speed Atomic Force Microscope. NI-Week 2017, May 2017, Austin, TX, United States. , 2017. ⟨hal-01529673⟩

2016

Articles dans une revue

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩. ⟨hal-01960876⟩

C. Goyhenex, G. Tréglia, Bernard Legrand. Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2016, 646 (SI), pp.261-268. ⟨10.1016/j.susc.2015.09.004⟩. ⟨hal-01455014⟩

Beien Zhu, Jérôme Creuze, Christine Mottet, Bernard Legrand, Hazar Guesmi. CO adsorption-induced surface segregation and formation of Pd chains on AuPd(100) alloy: density functional theory based ising model and Monte Carlo simulations. Journal of Physical Chemistry C, 2016, 120, pp.350-359. ⟨10.1021/acs.jpcc.5b10158⟩. ⟨hal-01267581⟩

Communications dans un congrès

Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩. ⟨hal-01279717⟩

Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction. 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria. ⟨hal-01962410⟩

2015

Articles dans une revue

B. Zhu, H. Guesmi, J. Creuze, Bernard Legrand, C. Mottet. Crossover among structural motifs in Pd–Au nanoalloys. Physical Chemistry Chemical Physics, 2015, 17, pp.28129-28136. ⟨10.1039/C5CP00491H⟩. ⟨hal-01222110⟩

Zhuang Xiong, Bernard Legrand. Design and measurement of AFM probe based on MEMS resonator. High Power Laser and Particle Beams, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩. ⟨hal-01961045⟩

Jérôme Creuze, Hazar Guesmi, Christine Mottet, Beien Zhu, Bernard Legrand. Surface segregation in AuPd alloys: Ab initio analysis of the driving forces. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2015, 639, pp.48 - 53. ⟨10.1016/j.susc.2015.04.017⟩. ⟨hal-01378430⟩

Denis Faure, Patricia Bonin, Robert Duran, Pierre Amato, Florence Arsene-Ploetze, et al.. Environmental microbiology as a mosaic of explored ecosystems and issues. Environmental Science and Pollution Research, 2015, 22 (18), pp.13577-13598. ⟨10.1007/s11356-015-5164-5⟩. ⟨hal-01247096⟩

Communications dans un congrès

Adhitya Bhaswara, Denis Dezest, Liviu Nicu, Thierry Leichle, Bernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩. ⟨hal-01687809⟩

Olivier Thomas, Bernard Legrand, Cécile Fuinel. Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications. ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩. ⟨hal-01203144⟩

S. Houmadi, Bernard Legrand, J.P. Salvetat, B. Walter, E. Mairiaux, et al.. When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency. 28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩. ⟨hal-01962374⟩

F. Wang, Thomas Dargent, D. Ducatteau, Gilles Dambrine, Kamel Haddadi, et al.. Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry. 45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩. ⟨hal-01962399⟩

2014

Articles dans une revue

Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, et al.. Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope. Nanotechnology, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩. ⟨hal-01960609⟩

Adhitya Bhaswara, Hohyun Keum, S Rhee, Bernard Legrand, Fabrice Mathieu, et al.. Fabrication of nanoplate resonating structures via micro-masonry. Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩. ⟨hal-01687810⟩

Zhuang Xiong, Estelle Mairiaux, Benjamin Walter, Marc Faucher, Lionel Buchaillot, et al.. A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection. Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩. ⟨hal-01960848⟩

Zhuang Xiong, Estelle Mairiaux, Benjamin Walter, Marc Faucher, Lionel Buchaillot, et al.. Two types of MEMS-based oscillating AFM probes. Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141. ⟨hal-01960910⟩

Communications dans un congrès

Fei Wang, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, Bernard Legrand, et al.. Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry. European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom. ⟨hal-01962209⟩

A. Grira, C. Rotinat-Libersa, Bernard Legrand, L. Buchaillot. A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution. 1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417. ⟨cea-01844451⟩

Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?. IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩. ⟨hal-01962163⟩

Fei Wang, Nicolas Clément, Damien Ducatteau, David Troadec, Bernard Legrand, et al.. Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p. ⟨hal-01018379⟩