2025

Articles dans une revue

Romain Calviac, Antoine Rouxel, Samuel Charlot, David Bourrier, Alexandre Arnoult, et al.. Bose-Einstein condensate source on a optical grating-based atom chip for quantum sensor applications. Physical Review Applied, 2025, 23, pp.L01100. ⟨10.1103/PhysRevApplied.23.L011001⟩. ⟨hal-04761479⟩

Stéphane Calvez, David Bourrier, Justine Bonneau, Ludovic Salvagnac, Isabelle Séguy, et al.. Grayscale evaporation of organic thin-film microstructures. Optical Materials Express, 2025, 15 (4), pp.604. ⟨10.1364/OME.551617⟩. ⟨hal-04975166⟩

2024

Articles dans une revue

Douglas Silva de Vasconcellos, David Bourrier, Éric Imbernon, Kata Hajdu, Yingning He, et al.. Process for integrating multiple porous silicon membranes with variable characteristics into planar microfluidics. Sensors and Actuators A: Physical , 2024, 377, pp.115715. ⟨10.1016/j.sna.2024.115715⟩. ⟨hal-04776651⟩

Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viet Phung, Frédéric Richardeau, et al.. Concept and technology for full monolithic MOSFET and JBS vertical integration in multi-terminal 4H-SiC power converters. Solid State Phenomena, 2024, 358, pp.23-30. ⟨10.4028/p-pzTJ4o⟩. ⟨hal-04697223⟩

Sylvain Landiech, Marianne Elias, Pierre Lapèze, Hajar Ajiyel, Marine Plancke, et al.. Parallel on-chip micropipettes enabling quantitative multiplexed characterization of vesicle mechanics and cell aggregates rheology. APL Bioengineering, 2024, 8 (2), pp.026122. ⟨10.1063/5.0193333⟩. ⟨hal-04616249⟩

Communications dans un congrès

Melik Maksem, Adrien Bourgine, Kosseila Ait-Oukaci, Georgiana Dragomir-Maties, Thierry Leichle, et al.. Intégration de nanoparticules magnétiques douces sur inductances planaires pour applications RF. XXIIIèmes Journées Nationales Microondes (JNM 2024), Jun 2024, Juan les bains, France. ⟨hal-04904622⟩

Stéphane Calvez, David Bourrier, Justine Bonneau, Ludovic Salvagnac, Pascal Dubreuil, et al.. Shadow-mask evaporation for the fabrication of optical filters with spatially tailored thickness. Photonics West 2024 -- Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, Jan 2024, San Francisco (CA, USA), United States. pp.128980J-3, ⟨10.1117/12.3000178⟩. ⟨hal-04515494⟩

Stéphane Calvez, J. Bonneau, David Bourrier, Ludovic Salvagnac, Pascal Dubreuil, et al.. Dépôts 2.5D par évaporation à travers des masques demi-teinte. Journées Nationales des Technologies Emergentes, Nov 2024, Saint Etienne, France. ⟨hal-04815070⟩

Autres documents

M Sagot, D Rojas, David Bourrier, A Arcas, A Ferrand, et al.. Clip-Chips: 3D printed microfluidic and characterization modules for cell culture applications. NanoBioTech 2024, Nov 2024, Montreux (Switzerland), Switzerland. 2024. ⟨hal-04885986⟩

Y. Sobhi, E. Donadio, B. Duployer, Jean-Christophe Marrot, David Bourrier, et al.. Etude de couches minces de titanate de barium déposées par pulvérisation. Journées Nationales des Technologies Emergentes, Nov 2024, Saint Etienne (FR), France. 2024. ⟨hal-04802588⟩

Rapports

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre Francois Calmon, et al.. Bilan des activités 2023 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2024. ⟨hal-04583613⟩

2023

Articles dans une revue

Botayna Bounor, Jensheer Shamsudeen Seenath, Sai Gourang Patnaik, David Bourrier, Chau Cam Hoang Tran, et al.. Low-cost micro-supercapacitors using porous Ni/MnO2 entangled pillars and Na-based ionic liquids. Energy Storage Materials, 2023, 63, pp.102986. ⟨10.1016/j.ensm.2023.102986⟩. ⟨hal-04224179⟩

Matthieu Sagot, Elise Bou, David Bourrier, Aline Cerf, Hervé Aubert, et al.. Bio-Impedance Spectroscopy of Retained Cells Using a Micro-Perforated Sensing Membrane Filtrating Whole Blood Samples under High Flowrate. Biosensors, 2023, 13 (12), pp.996. ⟨10.3390/bios13120996⟩. ⟨hal-04299355⟩

Communications dans un congrès

Etsuko Ota, David Bourrier, Naoto Usami, Ayako Mizushima, Naonobu Shimamoto, et al.. Technology transfer of supercritical fluid deposition technology from research group to use in open nanotechnology facilities. ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131030⟩

Shun Yasunaga, David Bourrier, Naonobu Shimamoto, Ayako Mizushima, Hugues Granier, et al.. Chip or Wafer -Small quantity fabrication. 3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131044⟩

José Elías Angulo-Cervera, Frederico Orlandini Keller, Ilona Lecerf, Pierre Moritz, Fabrice Mathieu, et al.. Monolithic integration of thick NDFEB micro-magnets into MEMS: application to electromagnetic energy harvesting. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Jun 2023, Kyoto, Japan. ⟨hal-04660346⟩

Ralph Makhoul, Abdelhakim Bourennane, Luong Viêt Phung, Frédéric Richardeau, Mihai Lazar, et al.. Full-SiC Single-Chip Buck and Boost MOSFET-JBS Converters for Ultimate Efficient Power Vertical Integration. IEEE 30th International Conference Mixed Design of Integrated Circuits and Systems, Institute of Computer Science of AGH University of Science and Technology, Jun 2023, Kraków, Poland. https://www.mixdes.org/Mixdes3/, ⟨10.23919/MIXDES58562.2023.10203213⟩. ⟨hal-04147862⟩

Naonobu Shimamoto, Ayako Mizushima, David Bourrier, Etsuko Ota, Akio Higo, et al.. Micron-to-Submicron Cu electroplating in view of Agile-X LSI Chips Fabrication using Open Facility. ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131037⟩

Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viet Phung, M. Lazar, et al.. Full-SiC Single-Chip High-Side and Low-Side Dual-MOSFET for Ultimate Power Vertical Integration -Basic Concept and Technology. 25th Conference on Power Electronics and Applications (and Exhibition), EPE ’23 (IEEE) ECCE Europe (Energy Conversion Congress and Expo Europe), Sep 2023, Aalborg, Denmark. ⟨10.23919/EPE23ECCEEurope58414.2023.10264325⟩. ⟨hal-04203163⟩

David Bourrier, Ayako Mizushima, Naonobu Shimamoto, Etsuko Ota, Hugues Granier, et al.. Clean room engineers' exchanges: a win/win international collaboration. ENRIS, May 2023, Paris, Saclay, France. ⟨hal-04476508⟩

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩

Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viêt Phung, Frédéric Richardeau, et al.. Concept and technology for full monolithic MOSFET and JBS vertical integration in multi-terminal 4H-SiC power converters. ICSCRM 2023 - International Conference on Silicon Carbide and Related Materials, Sep 2023, Sorrente, Italy. ⟨hal-04221605⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨10.1109/MEMS49605.2023.10052563⟩. ⟨hal-03951363⟩

Autres documents

Matthieu Sagot, Bastien Venzac, David Bourrier, Aurélie Lecestre, Adrian Laborde, et al.. 3D Integration of a µSieve for Particle Filtration Combined with real-time in-situ Analysis within Complex Media. Micro and Nano Engineering Conference 2023, Sep 2023, Berlin, Germany. , 2023. ⟨hal-04582810⟩

A Harouri, F Bouamrane, David Bourrier, A Garnache, N Isac, et al.. Thermal management of VECSEL-GaAs for high-power single-mode emission. C'Nano, Mar 2023, Poitier, France. , 2023. ⟨hal-04355523⟩

Rapports

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2022 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2023. ⟨hal-04124098⟩

Adrian Laborde, Laurent Mazenq, David Bourrier, Véronique Conédéra, Rémi Courson. Procédés de photolithographie développés au sein de la plateforme de micro et nanotechnologie du LAAS-CNRS. 2023. ⟨hal-04132932⟩

2022

Articles dans une revue

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

Clement Cointe, Adrian Laborde, Lionel Nowak, Dina N Arvanitis, David Bourrier, et al.. Scalable Batch Fabrication of Ultrathin Flexible Neural Probes using Bioresorbable Silk Layer. Microsystems & Nanoengineering, 2022, 8, pp.21. ⟨10.1038/s41378-022-00353-7⟩. ⟨hal-03456630⟩

Lotfi Benali Karroubi, Sai Gourang Patnaik, Birhanu Desalegn Assresahegn, Botayna Bounor, Chau Cam Hoang Tran, et al.. Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition. Energy Storage Materials, 2022, 47, pp.134-140. ⟨10.1016/j.ensm.2022.02.009⟩. ⟨hal-03585171⟩

Communications dans un congrès

Stéphane Calvez, Lijun Zhang, Margaux Loison, Olivier Gauthier-Lafaye, David Bourrier, et al.. Spin-crossover molecular complexes for visible-light modulators. Photonics Europe, SPIE, Apr 2022, Strasbourg, France. pp.35. ⟨hal-03748945⟩

Autres documents

Pascal Dubreuil, Marrot Jean Christophe, Éric Imbernon, Ludovic Salvagnac, Guillaume Libaude, et al.. Equipements en 2022 de dépôts de matériaux dans la plateforme de micro et nano technologies du LAAS-CNRS. Journées RENATECH Dépôts, Oct 2022, RENNES, France. 2022. ⟨hal-03940369⟩

Matthieu Sagot, Elise Bou, David Bourrier, Aline Cerf, Hervé Aubert, et al.. Micro-perforated membrane for label-free cell capture and integrated electrical detection operating in whole blood. 2022. ⟨hal-04582845⟩

A Harouri, F Bouamrane, David Bourrier, A Garnache, N Isac, et al.. Thermal management of VECSEL-GaAs for high-power single-mode emission. Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication (JNTE 2022), Nov 2022, Beasnçon, France. 2022. ⟨hal-04355565⟩

Rapports

Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, Franck Carcenac, et al.. Bilan des activités 2021 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2022. ⟨hal-03646902⟩

2021

Articles dans une revue

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

Yingning He, Douglas Silva de Vasconcellos, David Bourrier, Kata Hajdu, Jean-Olivier Durand, et al.. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications. Sensors and Actuators A: Physical , 2021, 332 (Part 1), pp.113089. ⟨10.1016/j.sna.2021.113089⟩. ⟨hal-03377090⟩

Sai Gourang Patnaik, Jensheer Shamsudeen Seenath, David Bourrier, Sagar Prabhudev, Daniel Guay, et al.. Porous RuOxNySz Electrodes for Microsupercapacitors and Microbatteries with Enhanced Areal Performance. ACS Energy Letters, 2021, 6, pp.131-139. ⟨10.1021/acsenergylett.0c02017⟩. ⟨hal-03063689⟩

Rapports

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2020 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2021. ⟨hal-03263205⟩

2020

Communications dans un congrès

Ayad Ghannam, Alessandro Magnani, David Bourrier, Thierry Parra. Embedded 3D-IPD Technology based on Conformal 3D-RDL: Application for Design and Fabrication of Compact, High-Performance Diplexer and Ultra-Wide Band Balun. 2020 IEEE 70th Electronic Components and Technology Conference (ECTC), Jun 2020, Orlando, United States. pp.1867-1874, ⟨10.1109/ECTC32862.2020.00292⟩. ⟨hal-03178281⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

Rapports

Hugues Granier, Franck Carcenac, Pierre-François Calmon, Véronique Conédéra, Monique Dilhan, et al.. Bilan des activités 2019 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2020. ⟨hal-03187781⟩

2019

Articles dans une revue

Alejandro Kayum Jimenez Zenteno, Aurore Estève, Hélène Cayron, Elise Bou, David Bourrier, et al.. A novel 3D microdevice for the in vivo capture of cancer‐associated cells. Medical Devices and Sensors, 2019, 2 (5-6), pp.e10056. ⟨10.1002/mds3.10056⟩. ⟨hal-03098347⟩

Anaïs Ferris, David Bourrier, David Pech, Daniel Guay, Sebastien Garbarino. Three-Dimensional Interdigitated Microsupercapacitors with Record Areal Cell Capacitance. Small, 2019, 15 (27), pp.1901224. ⟨10.1002/smll.201901224⟩. ⟨hal-02132089⟩

Pierre Champigneux, Cyril Renault-Sentenac, David Bourrier, Carole Rossi, Marie-Line Délia-Dupuy, et al.. Effect of surface roughness, porosity and roughened micro-pillar structures on the early formation of microbial anodes. Bioelectrochemistry, 2019, 128, pp.17-29. ⟨10.1016/j.bioelechem.2019.03.002⟩. ⟨hal-02279662⟩

Elise Bou, Alejandro Kayum Jimenez Zenteno, Aurore Estève, David Bourrier, Christophe Vieu, et al.. Fabrication of 3D microdevices from planar electroplating for the isolation of cancer associated cells in blood. Microelectronic Engineering, 2019, 213, pp.69-76. ⟨10.1016/j.mee.2019.04.010⟩. ⟨hal-02336950⟩

Communications dans un congrès

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Thomas Blon, et al.. Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩. ⟨hal-02413900⟩

Rapports

Hugues Granier, Pierre-François Calmon, Franck Carcenac, Véronique Conédéra, Monique Dilhan, et al.. Bilan 2018 des activités de la centrale de micro et nanotechnologies du LAAS-CNRS et du service TEAM. 2019. ⟨hal-02137930⟩

2018

Articles dans une revue

Pierre Champigneux, Cyril Renault-Sentenac, David Bourrier, Carole Rossi, Marie-Line Délia-Dupuy, et al.. Effect of surface nano/micro-structuring on the early formation of microbial anodes with Geobacter sulfurreducens : Experimental and theoretical approaches. Bioelectrochemistry, 2018, 121 (121), pp.191-200. ⟨10.1016/j.bioelechem.2018.02.005⟩. ⟨hal-01713422⟩

Christophe Escriba, Julien Roux, Georges Soto-Romero, Pascal Acco, David Bourrier, et al.. Advanced thermopile IR dual line sensor for smart home. Journal of Sensor Technology, 2018, 8 (4), ⟨10.4236/jst.2018.84006⟩. ⟨hal-01916914⟩

Communications dans un congrès

Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Lateral Porous Silicon Interferometric Transducer for Sensing Applications. 2018 IEEE SENSORS, Oct 2018, New Delhi, India. ⟨10.1109/ICSENS.2018.8589773⟩. ⟨hal-03212723⟩

Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Optical interferometry on lateral porous silicon. Porous Semiconductors Science and Technology (PSST) Conference, Mar 2018, La Grande Motte, France. ⟨hal-03212768v2⟩

Julien Alibert, Maxime Bordoux, David Bourrier, Antoine Monmayrant, Olivier Gauthier-Lafaye, et al.. Développement de puces hybrides pour la Condensation de Bose-Einstein bi-espèce.. Optique 2018, Jul 2018, Toulouse, France. ⟨hal-01927101⟩

Autres documents

Elise Bou, Alejandro Kayum Jimenez Zenteno, Aurore Estève, David Bourrier, Christophe Vieu, et al.. A 3D microdevice for the isolation of cancer-associated circulating cells within the bloodstream. Micro and Nano Engineering (MNE 2018), Sep 2018, Copenhague, Denmark. 2018. ⟨hal-02387107⟩

Rapports

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS. 2018. ⟨hal-01767583⟩

2017

Articles dans une revue

Théo Calais, David Bourrier, Aurélien Bancaud, Yves J. Chabal, Alain Estève, et al.. DNA grafting and arrangement on oxide surfaces for self-assembly of Al and CuO nanoparticles. Langmuir, 2017, 33 (43), pp.12193-12203. ⟨10.1021/acs.langmuir.7b02159⟩. ⟨hal-01613194⟩

Aziliz Lecomte, Aurélie Lecestre, David Bourrier, Marie-Charline Blatché, Laurent Jalabert, et al.. Deep plasma etching of Parylene C patterns for biomedical applications. Microelectronic Engineering, 2017, 177, pp.70 - 73. ⟨10.1016/j.mee.2017.02.012⟩. ⟨hal-01528381⟩

Communications dans un congrès

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Development of all-around, SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors Si-nw-ChemFET. EUROSENSORS XXXI, Sep 2017, Paris, France. ⟨hal-01687839⟩

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩. ⟨hal-01871397⟩

Autres documents

David Bourrier, Arnaud Durlach. COMPARISON OF THICK COPPER PLATING RESULTS WITH LABORATORY AND INDUSTRIAL ELECTROPLATING TOOLS. Journées Nationales sur les Technologies Emergentes en micro-nanofabrication (JNTE 2017), Oct 2017, Orléans, France. 1p., 2017. ⟨hal-01873753⟩

Rapports

Hugues Granier, Véronique Conédéra, Monique Dilhan, Franck Carcenac, Pierre-François Calmon, et al.. Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS. 2017. ⟨hal-01485548⟩

2016

Communications dans un congrès

Aziliz Lecomte, Aurélie Lecestre, David Bourrier, Marie-Charline Blatché, Emeline Descamps, et al.. Deep plasma etching of Parylene C patterns for biomedical applications. MNE 2016, Sep 2016, Toulouse, France. ⟨hal-01415391⟩

Aurélie Lecestre, Aziliz Lecomte, David Bourrier, Pascal Dubreuil, Emeline Descamps, et al.. Plasma etching of thick Parylene C for fabrication of biocompatible electrodes . 9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France. ⟨hal-01326492⟩

David Bourrier, Monique Dilhan, Hugues Granier, Arnaud Durlach. Les dépôts électrolytiques appliqués aux micro-dispositifs au LAAS. Journée Toulousaine d'Electrochimie (JTE 2016), Jul 2016, Toulouse, France. ⟨hal-01873836⟩

Rapports

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS. 2016. ⟨hal-01867462⟩

2015

Articles dans une revue

Thierry Leichle, David Bourrier. Integration of lateral porous silicon membranes into planar microfluidics. Lab on a Chip, 2015, 15 (3), pp.833-838. ⟨10.1039/c4lc01094a⟩. ⟨hal-01108903⟩

Rapports

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2014 des zones de la plateforme de micro et nanotechnologies. 2015, 105p. ⟨hal-01867464⟩

Rémi Courson, David Bourrier. Réalisation de puces microfluidique sur substrat de verre de faible épaisseur < 200μm. 2015. ⟨hal-01875343⟩