Resonating MEMS biosensors

Summary:

Transfer printing, a technique that is used to transfer diverse materials from DNA molecules or photoresist, to semiconductor nanowires, has been proven useful for the fabrication of various static and mobile structures under the name of micro-masonry. Here, we introduce a simple and straightforward fabrication process based on micro-masonry to realize nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. This approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer or the backside of a silicon wafer. Because the cavities used for electrostatic transduction are tight sealed, nanoplates fabricated via micro-masonry are suitable for liquid environment operation and are thus a promising solution for biosensing applications.

 

 

Contacts:

T. Leichle/L. Nicu

 

Collaborations:

  • S. Kim, University of Illinois at Urbana-Champaign, USA

 

Selective list of publication:

  • A. Bhaswara, H. Keum, S. Rhee, B. Legrand, F. Mathieu, S. Kim, L. Nicu, and T. Leïchlé, "Fabrication of nanoplate resonating structures via micro-masonry", Journal of Micromechanics and Microengineering, 24 (11), pp. 115012 (2014)
  • A. Bhaswara, H. Keum, F. Mathieu, B. Legrand, S. Kim, L. Nicu, and T. Leïchlé, "A simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes", Frontiers in Mechanical Engineering, 2, pp. 1-7 (2016)