Research topics - MEMS
Advanced Material Integration
- Dielectric transduction for MEMS (contact: B. Legrand)
- Piezoelectric transduction for MEMS (contact: L. Nicu/D. Saya)
- Spin-cross over materials for MEMS transduction (contact: L. Nicu/T. Leichle)
- Integration of hybrid nanostructures into MEMS (contact: C. Bergaud)
- Electroactive polymer-based actuators for artificial muscles and soft robotics (contact: C. Bergaud)
- Osmotic muscle: from an original active material to an innovative actuator for robotic (contact: V. Mansard)
- Portable magnetic devices (contact: T. Leichle)
Instrumentation/Mechanical Characterization
- MEMS-based high-speed AFM (contact: B. Legrand)
- Ultra-low-power logic gates based on capacitive MEMS devices operating in adiabatic regime (contact: B. Legrand)
Biosensing
- Neural probe for brain recording and stimulation (contact: C. Bergaud)
- Resonating MEMS biosensors (contact: L. Nicu/T. Leichle)
- Biofunctionalization strategies (contact: L. Nicu/T. Leichle)
- Nanofluidic-based biosensors (contact: T. Leichle)
- Lateral porous silicon membranes for lab-on-a-chip (contact: T. Leichle)