PHOTO : Novel concepts - Monolithic vertical integration
To carry out the integration of multiple functions in integrated photonic devices, we have chosen to exploit the vertical integration scheme since it allows the distribution of the different functions on different planes, each of which exploiting the optimum material and geometrical parameters, and helps organise the sequence of functions thanks to successive couplings which can be precisely adjusted and controlled. This technological approach has been successfully used to demonstrate an integrated-modulator-laser system for high-speed optical communications between datacenters, and to make microdisk resonators with subjacent access waveguides with a view to create on-chip frequency combs.
VCSEL-type laser vertically-integrated with its electro-absorptive modulator
C. Arlotti, O. Gauthier-Lafaye, A. Monmayrant, and S. Calvez, “Achromatic critically-coupled racetrack resonators”, J. Opt. Society of America B 34 (11), 2343-2351, 2017. L. Marigo-Lombart, S. Calvez, A. Arnoult, H. Thienpont, K. Panajotov, Krassimir and G. Almuneau, “Oxide-confined VCSELs fabricated with a simple self-aligned process flow”, Semicond. Sci. Technol. 32, 125004, 2017. S. Calvez, G. Lafleur, A. Larrue, P.-F. Calmon, A. Arnoult, G. Almuneau and O. Gauthier-Lafaye, “Vertically-coupled microdisk resonators using AlGaAs/AlOx technology”, IEEE Photonics Technology Letters 27, 982-985, 2015.