PHOTO : Innovative fabrication technological processes

Monolithically-integrated devices and innovative photonics systems require to keep on improving the fabrication technological processes. In that context, we develop III-V semiconductor technological processes among which is the oxidation of AlAs which is a key fabrication step to make VCSELs. Furthermore, we exploit microelectronics industry tools and processes to make photonics devices, and address the specific issues arising from their use with non-silicon-based technological platforms (glass, GaAs...). In particular, we have developped a soft-mold nanoimprint lithography process to be able to make high-resolution features on large-area transparent substrates.

• III-V semiconductor technology
• Selective wet oxidation of AlGaAs semiconductors
• 3D electro-optic confinement for III-V semiconductor photonic devices
• Soft-mold nanoimprint lithography.