Nano Impression Area

Technical staff

Principe de la nano-impression

The principle of this new-generation lithography technique is simple: it is to replicate nanoscale patterns uysing moulding

Since July 2010, LAAS is equipped with specifically dedicated nano-imprint machine, a Nanonex NX-2500. Thisequipment allows thermal or UV methods.

Technical means

Nanonex NX-2500 
Processes : 

  • Thermoplastic and thermoreticulables resists
  • Photosensitive resists (UV) 
     

Patent : Air Cushion Press 

  • optimization of printing uniformity
  • any type of samples: from few mm² to 6 inches 
  • any type of materials: Si, GaAs, glass, polymers, quartz,... 
     

Alignement : 1µm 


 

Know-How 

1-NIL mould fabrication : 
 

  • Electronic lithography on 4 "glass and Si wafer
  • Glass (100nm) and Si ICP-RIE etching
  • Resolution: 40nm with a 100nm step
  • Non-sticky OTS liquid surface treatment
     

2- UV Nanoimprint : 

 

Substrate surface preparation
Nanonex resists (AMONIL, MRT, and Nanonex) 
Resolution: 40nm 
 

                           
 

 

GaAs imprint (NX-2500)     

Fused silica mould