Integration of hybrid nanostructures into MEMS

Research topics >>


NEMS are usually based on the use of 1D nano-objects. However, the use of 3D nanostructures with extremely high surface to volume ratio, such as helical nanosprings allows to significantly enhance the electromechanical performances of functional nanodevices. In this project, amorphous silica nanotubes and nanohelices are transcribed from self-assembled amphiphilic molecules. They are then deposited and aligned on surfaces with trenches using capillary forces. Their mechanical properties have been characterized by Atomic Force Microscopy. A piezoresistive behavior was obtained by coating silica nanotubes and nanohelices with a thin metallic layer using EBID or IBID.

Figure 1: (Left) Schematic representation of the transcription of SiO2 and ZnO nanohelices from organic self-assembled amphiphilic molecules ; (Right) Suspended metallized nanohelice with clamped ends

Figure 2: Extraction of the Young’s modulus of SiO2 nanotubes using Atomic Force Microscopy



C. Bergaud

Financial Support:

ANR Project Nanospring 2011-2014


R. Oda, IECB, Bordeaux ; M.H. Delville, ICMCB, Bordeaux, F. Soilihi, Nanomade

Selective list of publications:

  • S. Houmadi, D. Devovets, S. Si, R. Tamoto, R. Oda, M.H. Delville, C. Bergaud, “Determination of the elastic properties of SiO2 nanotubes templated from organic amphiphilic self-assemblies through inorganic transcription”, Appl. Phys. Lett. 102(15), 151904, 2013
  • S. Houmadi, S. Habtoun, D. Devovets, S. Si, R. Tamoto, R. Oda, M.H. Delville, C. Bergaud,Synthesis and eleastic properties of SiO2 nanotubes and helical nanosprings template for organic amphiphilic self−assemblies through inorganic transcription”, Transducers, 17th International Conference on Solid−State Sensors, Actuators and Microsystems, June 16-20, 2013, Barcelona, Spain.