Characterization Area

Technical staff

The means of characterization in clean room allow studies and validation of the different step of process for component’s realization. This means are in free service after training. 
The characterizations of finished component are doing on the electrical characterization area. 

 

 

Means of Charactérization

AFM with force, thermal and electrical module 

 

Dual Beam (SEM + FIB) FEI Hélios 600i 

 

 

SEM Hitachi S4800 and MEBS3700N 

 

 

 

 

Mecanic profilmeter KLA Tencor 
P15 et P16+ 

 

 

 

Optical profilmeter Veeco 

 

 

Ellipsometer Horiba Jobin Yvon 

 

 

Resistivity meter 

 

 

Contact angle and surface energy measurement  

 

 

Métrologie du masqueur laser 
(in  lithographie laser

 

 

Confocal microscope 

 

 

Optical microscope 

 

 

Make know 

Observations at all scale (optical microscopy, SEM, AFM), physical characterization (ellipsometry, EDS in SEM), topography characterization (optical and mechanical profilometer), surface energy (water droplet contact angle).

AFM image of photonic crystal

 

AFM image of a membrane

 

 

3D image with the optical profilometer (MEMS-RF)

 

 

Topogrphy image (left) and leakage current (right) obtain with tunneling mode on NiFe/PTCTE/Co layer.