MEMS - Microelectromechanical systems
Christian BERGAUD Student representative : Clément COINTE Twitter, LinkedIn
NEWS
- 09/05/2022: Venkata Suresh Vajrala presented his work at MRS spring meeting in Hawaii!
- 04/05/2022: Ilona Lecerf's work has been published in the EPJ ST: https://link.springer.com/article/10.1140/epjs/s11734-022-00577-8
- 03/05/2022: José Elias Angulo Cervera's article has been published in Journal of Materials Chemistry C: https://pubs.rsc.org/en/Content/ArticleLanding/2022/TC/D2TC01162J
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Microelectromechanical Systems (MEMS) are tiny devices with movable/vibrating parts providing solutions for sensors and actuators. Initially derived from the microelectronic industry, MEMS are now found in a wide range of consumer products.
The MEMS research team at LAAS works towards increasing the performance, the reliability, and the integrability of MEMS devices but also towards providing new functionalities and transduction mechanisms. To this aim, projects developed in our team focus on three research themes: the exploration of novel materials and alternative fabrication methods; the integration and implementation of new functions at the system level; and finally the development of dedicated instrumentation and the applications of MEMS as sensors and probing elements.
The MEMS team gathers researchers of various and complementary backgrounds. Research projects conducted within the MEMS team are carried out in the framework of the LAAS technological platforms, among which an extensive cleanroom, characterization facilities and a biochemical lab, allowing our team to work at all stages of MEMS fabrication, from the device design to its integration.