2023

Articles dans une revue

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications (Adv. Mater. 39/2023). Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202370281⟩. ⟨hal-04234509⟩

Inès Muguet, Ali Maziz, Fabrice Mathieu, Laurent Mazenq, Guilhem Larrieu. Combining PEDOT:PSS Polymer Coating with Metallic 3D Nanowires Electrodes to Achieve High Electrochemical Performances for Neuronal Interfacing Applications. Advanced Materials, 2023, 35 (39), pp.2302472. ⟨10.1002/adma.202302472⟩. ⟨hal-04234494⟩

Zacchari Ben Meriem, Tiphaine Mateo, Julien Faccini, Céline Denais, Romane Dusfour-Castan, et al.. A microfluidic mechano-chemostat for tissues and organisms reveals that confined growth is accompanied with increased macromolecular crowding. Lab on a Chip, 2023, 20, pp.4445-4455. ⟨10.1039/d3lc00313b⟩. ⟨hal-04214597⟩

Communications dans un congrès

Aleksandra Markovic, Laurent Mazenq, Adrian Laborde, Herve Fanet, Gael Pillonnet, et al.. Ultra-Low-Power Logic with Contactless Capacitive MEMS. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩. ⟨hal-03946985⟩

Adrian Laborde, Ayoub Choukri, Laurent Mazenq, Mairame Diallo. Process management in an academic laboratory: recipe library, data access, monitoring, different tools to be implemented. ENRIS 2023, May 2023, Palaiseau, France. ⟨hal-04102746⟩

Aleksandra Marković, Hervé Fanet, Gaël Pillonnet, Bernard Legrand, Laurent Mazenq, et al.. ADIABATIC LOGIC GATES FOR ULTRA-LOW-POWER OPERATION USING CONTACTLESS CAPACITIVE MEMS. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2023, Kyoto (Japan), Japan. pp.546-549. ⟨hal-04241697⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨hal-03951363⟩

Autres documents

Adrian Laborde, Laurent Mazenq, David Bourrier, Véronique Conédéra, Rémi Courson. Procédés de photolithographie développés au sein de la plateforme de micro et nanotechnologie du LAAS-CNRS. Rapport LAAS n° 23230. 2023. ⟨hal-04132932⟩

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2022 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 23229. 2023. ⟨hal-04124098⟩

Laurent Mazenq, Franck Carcenac, Pierre-François Calmon, Emmanuelle Daran, Adrian Laborde, et al.. Moyens de lithographies de la plateforme de Micro et Nanotechnologies du LAAS-CNRS. Renatech Litho Gravure, Jan 2023, Lille, France. 2023. ⟨hal-03976338⟩

2022

Articles dans une revue

L Schwab, P E Allain, Nicolas Mauran, Xavier Dollat, Laurent Mazenq, et al.. Very high frequency probes for atomic force microscopy with silicon optomechanics. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩. ⟨hal-03326075v2⟩

Communications dans un congrès

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Laurent Colin, et al.. H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France. ⟨hal-03778623⟩

Inès Muguet, Fabrice Mathieu, Ali Maziz, Laurent Mazenq, Guilhem Larrieu. Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution. Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France. ⟨hal-03845587⟩

Autres documents

Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, Franck Carcenac, et al.. Bilan des activités 2021 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 22125. 2022. ⟨hal-03646902⟩

2021

Communications dans un congrès

Inès Muguet, Ali Maziz, Laurent Mazenq, Fabrice Mathieu, Guilhem Larrieu. Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity. 2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States. ⟨hal-03845567⟩

Autres documents

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2020 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 21194. 2021. ⟨hal-03263205⟩

2020

Communications dans un congrès

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩

Autres documents

Hugues Granier, Franck Carcenac, Pierre-François Calmon, Véronique Conédéra, Monique Dilhan, et al.. Bilan des activités 2019 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 21084. 2020. ⟨hal-03187781⟩

2019

Articles dans une revue

Ludovic Marigo-Lombart, Christophe Viallon, Alexandre Rumeau, Alexandre Arnoult, Aurelie Lecestre, et al.. Electro-Absorption Modulator vertically integrated on a VCSEL: microstrip-based high-speed electrical injection on top of a BCB layer. Journal of Lightwave Technology, 2019, 37 (15), pp.3861-3868. ⟨10.1109/jlt.2019.2921806⟩. ⟨hal-03012166⟩

Ludovic Marigo-Lombart, Christophe Viallon, Alexandre Rumeau, Alexandre Arnoult, Aurélie Lecestre, et al.. Electro-Absorption Modulator Vertically Integrated on a VCSEL: Microstrip-Based High-Speed Electrical Injection on Top of a BCB Layer. Journal of Lightwave Technology, 2019, 37 (15), pp.3861-3868. ⟨10.1109/JLT.2019.2921806⟩. ⟨hal-02391594⟩

Communications dans un congrès

Ludovic Marigo-Lombart, Alexandre Arnoult, Stéphane Calvez, Christophe Viallon, Olivier Gauthier-Lafaye, et al.. Technological bricks development for the vertical integration of a Modulator onto a VCSEL for high-speed communications. Journées Nationales sur les Technologies Emergentes, Nov 2019, Grenoble, France. 2p. ⟨hal-02449214⟩

Benjamin Reig, Laurent Mazenq, Pierre-François Calmon, Aurélie Lecestre, Jean Baptiste Doucet, et al.. New user's training procedure in an open academic platform: LAAS-CNRS example. European Nanofabrication Research Infrastructure Symposium (ENRIS) 2019, Jun 2019, Enschede, Netherlands. ⟨hal-02159090⟩

Autres documents

Hugues Granier, Pierre-François Calmon, Franck Carcenac, Véronique Conédéra, Monique Dilhan, et al.. Bilan 2018 des activités de la centrale de micro et nanotechnologies du LAAS-CNRS et du service TEAM. Rapport LAAS n° 19151. 2019. ⟨hal-02137930⟩

Rapports

Laurent Mazenq, Lucien Schwab, Nicolas Mauran, Denis Lagrange, Xavier Dollat, et al.. Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide. [Rapport Technique] LAAS-CNRS. 2019. ⟨hal-03603368⟩

2018

Communications dans un congrès

Léopold Macé, Olivier Gauthier-Lafaye, Antoine Monmayrant, Henri Camon, Pascal Dubreuil, et al.. Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range. 20th International Conference on Transparent Optical Networks (ICTON 2018), Jul 2018, Bucharest, Romania. ⟨hal-01917558⟩

Autres documents

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 18107. 2018. ⟨hal-01767583⟩

Julien Joneau, Laurent Mazenq, Séverine Vivies, Adrian Laborde, Hugues Granier. Mise au point de procédés de lithographie UV sur l'équipement Suss Microtec MA-BA6 Gen4. Rapport LAAS n° 18348. 2018. ⟨hal-01911255⟩

Rapports

Julien Joneau, Adrian Laborde, Laurent Mazenq. Développement de procédés de lithographie UV de résines photosensibles sur l'équipement Suss Microtec MA6 Gen 4. [Rapport Technique] Rapport LAAS n° 18698, LAAS-CNRS. 2018. ⟨hal-02902736⟩

Séverine Vivies, Adrian Laborde, Julien Joneau, Laurent Mazenq, Hugues Granier. Mise au point d'un dépôt HMDS sur la plaque OBDUCAT QS V 200 BM. [Rapport Technique] LAAS-CNRS. 2018. ⟨hal-02572420⟩

2017

Communications dans un congrès

Matthieu Joly, Laurent Mazenq, Maurane Marlet, Pierre Temple-Boyer, Céline Durieu, et al.. Multimodal probe based on ISFET electrochemical microsensors for in-situ monitoring of soil nutrients in agriculture. 31th European Conference on Solid-State Transducers, EUROSENSORS XXXI, Sep 2017, Paris, France. ⟨hal-01687830⟩

Cécile Fuinel, Fabrice Mathieu, Adrian Laborde, Laurent Mazenq, Christian Bergaud, et al.. High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration. 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩. ⟨hal-01962426⟩

Maria Dolores Manrique-Juarez, Sylvain Rat, Laurent Mazenq, Fabrice Mathieu, Isabelle Séguy, et al.. Spin crossover materials for MEMS actuation: Film integration and characterization. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩. ⟨hal-01816366⟩

Matthieu Joly, Laurent Mazenq, Maurane Marlet, Pierre Temple-Boyer, Céline Durieu, et al.. All-solid-state multimodal probe based on ISFET electrochemical microsensors for in-situ soil nutrients monitoring in agriculture. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994028⟩. ⟨hal-01871403⟩

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩. ⟨hal-01871397⟩

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Development of all-around, SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors Si-nw-ChemFET. EUROSENSORS XXXI, Sep 2017, Paris, France. ⟨hal-01687839⟩

Autres documents

Nicolas Mauran, Denis Lagrange, Xavier Dollat, Laurent Mazenq, Lucien Schwab, et al.. High Speed Atomic Force Microscope. NI-Week 2017, May 2017, Austin, TX, United States. , 2017. ⟨hal-01529673⟩

Marianne Brillat, Inès Massiot, Laurent Mazenq, Adrian Laborde, Olivier Gauthier-Lafaye, et al.. Développement d'un procédé de gravure submicronique : Approche basée sur les copolymères à blocs auto-assemblés. Rapport LAAS n° 17669. 2017. ⟨hal-01911188⟩

Hugues Granier, Véronique Conédéra, Monique Dilhan, Franck Carcenac, Pierre-François Calmon, et al.. Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS. Rapport LAAS n° 17056. 2017. ⟨hal-01485548⟩

Rapports

Ksenia Sharshavina, Philippe Arguel, Pierre-François Calmon, Franck Carcenac, Emmanuelle Daran, et al.. Réalisation d'un filtre étroit dans l'infrarouge thermique en technologie nanophotonique. Rapport final.. CNES, 18 avenue Edouard Belin 31401 Toulouse. 2017. ⟨hal-01945955⟩

2016

Articles dans une revue

Laura Oudjedi, Jean-Bernard Fiche, Sara Abrahamsson, Laurent Mazenq, Aurélie Lecestre, et al.. Astigmatic multifocus microscopy enables deep 3D super-resolved imaging. Biomedical optics express, 2016, 7 (6), pp.2163. ⟨10.1364/BOE.7.002163⟩. ⟨hal-02060576⟩

Communications dans un congrès

Ludovic Marigo-Lombart, Alexandre Arnoult, Laurent Mazenq, Pascal Dubreuil, Benjamin Reig, et al.. VCSELs fabricated using self-aligned processing. Workshop VCSEL Day 2016, Jun 2016, Darmstadt, Germany. 2p. ⟨hal-01857634⟩

Mathieu Joly, Sandrine Assié-Souleille, Laurent Mazenq, Maurane Marlet, Pierre Temple-Boyer, et al.. Development of an ISFET-based analysis microsystem for nitrogen cycle monitoring in durum wheat crop Introduction. 4th CIGR international conference of agriculture engineering, CIGR AgEng 2016, Jun 2016, Aarhus, Denmark. 12p. ⟨hal-01871427⟩

Cécile Fuinel, Khadim Daffé, Adrian Laborde, Olivier Thomas, Laurent Mazenq, et al.. HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩. ⟨hal-01279717⟩

Ludovic Marigo-Lombart, Laurent Mazenq, Ludovic Salvagnac, Guillaume Libaude, Bernard Rousset, et al.. VCSELs fabricated using self-aligned processing. 42nd Micro and Nano Engineering (MNE), Sep 2016, Vienna, Austria. ⟨hal-01857636⟩

Andréa Nicollet, Sandrine Assié-Souleille, Ludovic Glavier, Laurent Mazenq, Ludovic Salvagnac, et al.. Design, realization and characterization of several types of micro-initiators integrating Al/CuO nanothermite: role of metallic micro-heater and substrate on fire/no fire characteristics. 42nd International Pyrotechnics Seminar, Jul 2016, Grand Junction, CO, United States. ⟨hal-01688039⟩

Autres documents

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS. Rapport LAAS n° 16053. 2016. ⟨hal-01867462⟩

Ludovic Marigo-Lombart, Alexandre Arnoult, Laurent Mazenq, Pascal Dubreuil, Jean-Baptiste Doucet, et al.. Développement de briques technologiques pour la fabrication d’un VCSEL avec un modulateur intégré verticalement. 15eme Journees Nano, Micro et Optoelectronique (JNMO), May 2016, Les Issambres, France. 2016. ⟨hal-01857638⟩

2015

Articles dans une revue

Denis Dezest, Olivier Thomas, Fabrice Mathieu, Laurent Mazenq, Caroline Soyer, et al.. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT). Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩. ⟨hal-01169283⟩

Mohand-Tayeb Boudjiet, Johan Bertrand, Fabrice Mathieu, Liviu Nicu, Laurent Mazenq, et al.. Geometry optimization of uncoated silicon microcantilever-based gas density sensors. Sensors and Actuators B: Chemical, 2015, 208, pp.600-607. ⟨10.1016/j.snb.2014.11.067⟩. ⟨hal-01082346⟩

Florian Larramendy, Marie-Charline Blatché, Laurent Mazenq, Adrian Laborde, Pierre Temple-Boyer, et al.. Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays. Journal of Micromechanics and Microengineering, 2015, 25 (4), pp.045010. ⟨10.1088/0960-1317/25/4/045010⟩. ⟨hal-01225646⟩

Fadhila Sekli-Belaidi, Aurélie Civélas, Valentina Castagnola, Aliki Tsopela, Laurent Mazenq, et al.. PEDOT-modified integrated microelectrodes for the detection of ascorbic acid, dopamine and uric acid. Sensors and Actuators B: Chemical, 2015, 214, pp. 1-9. ⟨10.1016/j.snb.2015.03.005⟩. ⟨hal-01148710⟩

Communications dans un congrès

Denis Dezest, Fabrice Mathieu, Laurent Mazenq, Liviu Nicu, Caroline Soyer, et al.. PZT Nanofilm-Based Wafer Scale Nanoresonators. IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p. ⟨hal-01144194⟩

Philippe Menini, Brieux Durand, Guilhem Larrieu, Audrey Chapelle, Aurélie Lecestre, et al.. Micro and nanotechnology evolution towards vertical Silicon nanowires for ultra-sensitive gas detection. IX International Workshop on Semiconductor Gas Sensors SGS 2015, Dec 2015, Zakopane, Poland. ⟨hal-02048921⟩

Brieux Durand, Aurélie Lecestre, Laurent Mazenq, Philippe Menini, Guilhem Larrieu. Capteurs de gaz à base de nanofils verticaux et ordonnés de silicium. Journées Nationales du Réseau Doctoral en Microélectronique (JNRDM2015), May 2015, Bordeaux, France. 4p. ⟨hal-01216418⟩

Brieux Durand, Aurélie Lecestre, Laurent Mazenq, Philippe Menini, Guilhem Larrieu. 3D silicon nanowires sensors for NO2 detection down to ppb levels. 2015 MRS Fall Meeting & Exhibit, Nov 2015, Boston, United States. ⟨hal-02048342⟩

Autres documents

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2014 des zones de la plateforme de micro et nanotechnologies. Rapport LAAS n°15168. 2015, 105p. ⟨hal-01867464⟩

2014

Communications dans un congrès

Mohand-Tayeb Boudjiet, Johan Bertrand, Laurent Mazenq, Thierry Leichle, Fabrice Mathieu, et al.. Sensitivity optimization of silicon microcantilever-based density sensor for hydrogen detection. 11th Nanomechanical Sensing Workshop NMC 2014, Apr 2014, Madrid, Spain. 2 p. ⟨hal-00951760⟩

Autres documents

Fadhila Sekli-Belaidi, Aurélie Civélas, Aliki Tsopela, Laurent Mazenq, Jérôme Launay, et al.. PEDOT-modified electrochemical microsensors: a versatile probe for the detection of antioxidant biomarkers. 13th world congress on biosensors, BIOSENSORS 2014, May 2014, Melbourne, Australia. 2014. ⟨hal-01874795⟩

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Protocole d'arrêt général de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 14267. 2014. ⟨hal-01867458⟩