2023

Articles dans une revue

Matthieu Sagot, Elise Bou, David Bourrier, Aline Cerf, Hervé Aubert, et al.. Bio-Impedance Spectroscopy of Retained Cells Using a Micro-Perforated Sensing Membrane Filtrating Whole Blood Samples under High Flowrate. Biosensors, 2023, 13 (12), pp.996. ⟨10.3390/bios13120996⟩. ⟨hal-04299355⟩

Botayna Bounor, Jensheer Shamsudeen Seenath, Sai Gourang Patnaik, David Bourrier, Chau Cam Hoang Tran, et al.. Low-cost micro-supercapacitors using porous Ni/MnO2 entangled pillars and Na-based ionic liquids. Energy Storage Materials, 2023, 63, pp.102986. ⟨10.1016/j.ensm.2023.102986⟩. ⟨hal-04224179⟩

Communications dans un congrès

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩

Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viêt Phung, Frédéric Richardeau, et al.. Concept and technology for full monolithic MOSFET and JBS vertical integration in multi-terminal 4H-SiC power converters. 20th International Conference on Silicon Carbide and Related Materials (ICSCRM) - ICSCRM 2023, Naples University - Federico II, Sep 2023, Sorrento, Italy. ⟨hal-04221605⟩

Maria Dolores Manrique-Juarez, Fabrice Mathieu, Guillaume Libaude, Véronique Conédéra, David Bourrier, et al.. A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding. The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. ⟨hal-03951363⟩

Etsuko Ota, David Bourrier, Naoto Usami, Ayako Mizushima, Naonobu Shimamoto, et al.. Technology transfer of supercritical fluid deposition technology from research group to use in open nanotechnology facilities. ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131030⟩

Shun Yasunaga, David Bourrier, Naonobu Shimamoto, Ayako Mizushima, Hugues Granier, et al.. Chip or Wafer -Small quantity fabrication. 3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131044⟩

Naonobu Shimamoto, Ayako Mizushima, David Bourrier, Etsuko Ota, Akio Higo, et al.. Micron-to-Submicron Cu electroplating in view of Agile-X LSI Chips Fabrication using Open Facility. ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France. ⟨hal-04131037⟩

David Bourrier, Ayako Mizushima, Naonobu Shimamoto, Etsuko Ota, Hugues Granier, et al.. Clean room engineers' exchanges: a win/win international collaboration. ENRIS, May 2023, Paris, Saclay, France. ⟨hal-04476508⟩

Ralph Makhoul, Abdelhakim Bourennane, Luong Viêt Phung, Frédéric Richardeau, Mihai Lazar, et al.. Full-SiC Single-Chip Buck and Boost MOSFET-JBS Converters for Ultimate Efficient Power Vertical Integration. IEEE 30th International Conference Mixed Design of Integrated Circuits and Systems, Institute of Computer Science of AGH University of Science and Technology, Jun 2023, Kraków, Poland. https://www.mixdes.org/Mixdes3/, ⟨10.23919/MIXDES58562.2023.10203213⟩. ⟨hal-04147862⟩

Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viet Phung, M. Lazar, et al.. Full-SiC Single-Chip High-Side and Low-Side Dual-MOSFET for Ultimate Power Vertical Integration -Basic Concept and Technology. 25th Conference on Power Electronics and Applications (and Exhibition), EPE ’23 (IEEE) ECCE Europe (Energy Conversion Congress and Expo Europe), Sep 2023, Aalborg, Denmark. ⟨10.23919/EPE23ECCEEurope58414.2023.10264325⟩. ⟨hal-04203163⟩

Autres documents

A Harouri, F Bouamrane, David Bourrier, A Garnache, N Isac, et al.. Thermal management of VECSEL-GaAs for high-power single-mode emission. C'Nano, Mar 2023, Poitier, France. , 2023. ⟨hal-04355523⟩

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2022 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 23229. 2023. ⟨hal-04124098⟩

Adrian Laborde, Laurent Mazenq, David Bourrier, Véronique Conédéra, Rémi Courson. Procédés de photolithographie développés au sein de la plateforme de micro et nanotechnologie du LAAS-CNRS. Rapport LAAS n° 23230. 2023. ⟨hal-04132932⟩

2022

Articles dans une revue

Pierre Moritz, Ilona Lecerf, Antoine Gonon, Georgiana Maties, Thomas Blon, et al.. Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems. Advanced Engineering Materials, 2022, 24 (12), pp.2200733. ⟨10.1002/adem.202200733⟩. ⟨hal-03778248⟩

Ilona Lecerf, Pierre Moritz, José Elías Angulo-Cervera, Fabrice Mathieu, David Bourrier, et al.. Optimization of a vibrating MEMS electromagnetic energy harvester using simulations. The European Physical Journal. Special Topics, 2022, 231, pp.4205-4211. ⟨10.1140/epjs/s11734-022-00577-8⟩. ⟨hal-03778260⟩

Lotfi Benali Karroubi, Sai Gourang Patnaik, Birhanu Desalegn Assresahegn, Botayna Bounor, Chau Cam Hoang Tran, et al.. Highly porous scaffolds for Ru-based microsupercapacitor electrodes using hydrogen bubble templated electrodeposition. Energy Storage Materials, 2022, 47, pp.134-140. ⟨10.1016/j.ensm.2022.02.009⟩. ⟨hal-03585171⟩

Clement Cointe, Adrian Laborde, Lionel Nowak, Dina N Arvanitis, David Bourrier, et al.. Scalable Batch Fabrication of Ultrathin Flexible Neural Probes using Bioresorbable Silk Layer. Microsystems & Nanoengineering, 2022, 8, pp.21. ⟨10.1038/s41378-022-00353-7⟩. ⟨hal-03456630⟩

Communications dans un congrès

Stéphane Calvez, Lijun Zhang, Margaux Loison, Olivier Gauthier-Lafaye, David Bourrier, et al.. Spin-crossover molecular complexes for visible-light modulators. Photonics Europe, SPIE, Apr 2022, Strasbourg, France. pp.35. ⟨hal-03748945⟩

Autres documents

A Harouri, F Bouamrane, David Bourrier, A Garnache, N Isac, et al.. Thermal management of VECSEL-GaAs for high-power single-mode emission. Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication (JNTE 2022), Nov 2022, Beasnçon, France. 2022. ⟨hal-04355565⟩

Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, Franck Carcenac, et al.. Bilan des activités 2021 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 22125. 2022. ⟨hal-03646902⟩

Pascal Dubreuil, Marrot Jean Christophe, Éric Imbernon, Ludovic Salvagnac, Guillaume Libaude, et al.. Equipements en 2022 de dépôts de matériaux dans la plateforme de micro et nano technologies du LAAS-CNRS. Journées RENATECH Dépôts, Oct 2022, RENNES, France. 2022. ⟨hal-03940369⟩

2021

Articles dans une revue

Yingning He, Douglas Silva de Vasconcellos, David Bourrier, Kata Hajdu, Jean-Olivier Durand, et al.. Lateral porous silicon interferometric transducer for on-chip flow-through sensing applications. Sensors and Actuators A: Physical , 2021, 332 (Part 1), pp.113089. ⟨10.1016/j.sna.2021.113089⟩. ⟨hal-03377090⟩

Sai Gourang Patnaik, Jensheer Shamsudeen Seenath, David Bourrier, Sagar Prabhudev, Daniel Guay, et al.. Porous RuOxNySz Electrodes for Microsupercapacitors and Microbatteries with Enhanced Areal Performance. ACS Energy Letters, 2021, 6, pp.131-139. ⟨10.1021/acsenergylett.0c02017⟩. ⟨hal-03063689⟩

Pierre Moritz, Antoine Gonon, Thomas Blon, Nicolas Ratel-Ramond, Fabrice Mathieu, et al.. Magnetophoresis-Assisted Capillary Assembly: A Versatile Approach for Fabricating Tailored 3D Magnetic Supercrystals. ACS Nano, 2021, 15 (3), pp.5096-5108. ⟨10.1021/acsnano.0c10215⟩. ⟨hal-03156435⟩

Autres documents

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Bilan des activités 2020 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 21194. 2021. ⟨hal-03263205⟩

2020

Communications dans un congrès

Ayad Ghannam, Alessandro Magnani, David Bourrier, Thierry Parra. Embedded 3D-IPD Technology based on Conformal 3D-RDL: Application for Design and Fabrication of Compact, High-Performance Diplexer and Ultra-Wide Band Balun. 2020 IEEE 70th Electronic Components and Technology Conference (ECTC), Jun 2020, Orlando, United States. pp.1867-1874, ⟨10.1109/ECTC32862.2020.00292⟩. ⟨hal-03178281⟩

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Antoine Gonon, et al.. Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS. IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS 2020), Jan 2020, Vancouver, Canada. pp.1175-1178, ⟨10.1109/MEMS46641.2020.9056402⟩. ⟨hal-03011866⟩

Autres documents

Hugues Granier, Franck Carcenac, Pierre-François Calmon, Véronique Conédéra, Monique Dilhan, et al.. Bilan des activités 2019 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 21084. 2020. ⟨hal-03187781⟩

2019

Articles dans une revue

Elise Bou, Alejandro Kayum Jimenez Zenteno, Aurore Estève, David Bourrier, Christophe Vieu, et al.. Fabrication of 3D microdevices from planar electroplating for the isolation of cancer associated cells in blood. Microelectronic Engineering, 2019, 213, pp.69-76. ⟨10.1016/j.mee.2019.04.010⟩. ⟨hal-02336950⟩

Anaïs Ferris, David Bourrier, David Pech, Daniel Guay, Sebastien Garbarino. Three-Dimensional Interdigitated Microsupercapacitors with Record Areal Cell Capacitance. Small, 2019, 15 (27), pp.1901224. ⟨10.1002/smll.201901224⟩. ⟨hal-02132089⟩

Pierre Champigneux, Cyril Renault-Sentenac, David Bourrier, Carole Rossi, Marie-Line Délia-Dupuy, et al.. Effect of surface roughness, porosity and roughened micro-pillar structures on the early formation of microbial anodes. Bioelectrochemistry, 2019, 128, pp.17-29. ⟨10.1016/j.bioelechem.2019.03.002⟩. ⟨hal-02279662⟩

Alejandro Kayum Jimenez Zenteno, Aurore Estève, Hélène Cayron, Elise Bou, David Bourrier, et al.. A novel 3D microdevice for the in vivo capture of cancer‐associated cells. Medical Devices and Sensors, 2019, 2 (5-6), pp.e10056. ⟨10.1002/mds3.10056⟩. ⟨hal-03098347⟩

Communications dans un congrès

Pierre Moritz, Fabrice Mathieu, David Bourrier, Daisuke Saya, Thomas Blon, et al.. Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩. ⟨hal-02413900⟩

Autres documents

Hugues Granier, Pierre-François Calmon, Franck Carcenac, Véronique Conédéra, Monique Dilhan, et al.. Bilan 2018 des activités de la centrale de micro et nanotechnologies du LAAS-CNRS et du service TEAM. Rapport LAAS n° 19151. 2019. ⟨hal-02137930⟩

2018

Articles dans une revue

Pierre Champigneux, Cyril Renault-Sentenac, David Bourrier, Carole Rossi, Marie-Line Délia-Dupuy, et al.. Effect of surface nano/micro-structuring on the early formation of microbial anodes with Geobacter sulfurreducens : Experimental and theoretical approaches. Bioelectrochemistry, 2018, 121 (121), pp.191-200. ⟨10.1016/j.bioelechem.2018.02.005⟩. ⟨hal-01713422⟩

Christophe Escriba, Julien Roux, Georges Soto-Romero, Pascal Acco, David Bourrier, et al.. Advanced thermopile IR dual line sensor for smart home. Journal of Sensor Technology, 2018, 8 (4), ⟨10.4236/jst.2018.84006⟩. ⟨hal-01916914⟩

Communications dans un congrès

Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Lateral Porous Silicon Interferometric Transducer for Sensing Applications. 2018 IEEE SENSORS, Oct 2018, New Delhi, India. ⟨10.1109/ICSENS.2018.8589773⟩. ⟨hal-03212723⟩

Yingning He, Douglas Silva de Vasconcellos, Véronique Bardinal, David Bourrier, Éric Imbernon, et al.. Optical interferometry on lateral porous silicon. Porous Semiconductors Science and Technology (PSST) Conference, Mar 2018, La Grande Motte, France. ⟨hal-03212768v2⟩

Julien Alibert, Maxime Bordoux, David Bourrier, Antoine Monmayrant, Olivier Gauthier-Lafaye, et al.. Développement de puces hybrides pour la Condensation de Bose-Einstein bi-espèce.. Optique 2018, Jul 2018, Toulouse, France. ⟨hal-01927101⟩

Autres documents

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 18107. 2018. ⟨hal-01767583⟩

Elise Bou, Alejandro Kayum Jimenez Zenteno, Aurore Estève, David Bourrier, Christophe Vieu, et al.. A 3D microdevice for the isolation of cancer-associated circulating cells within the bloodstream. Micro and Nano Engineering (MNE 2018), Sep 2018, Copenhague, Denmark. 2018. ⟨hal-02387107⟩

2017

Articles dans une revue

Aziliz Lecomte, Aurélie Lecestre, David Bourrier, Marie-Charline Blatché, Laurent Jalabert, et al.. Deep plasma etching of Parylene C patterns for biomedical applications. Microelectronic Engineering, 2017, 177, pp.70 - 73. ⟨10.1016/j.mee.2017.02.012⟩. ⟨hal-01528381⟩

Théo Calais, David Bourrier, Aurélien Bancaud, Yves J. Chabal, Alain Estève, et al.. DNA grafting and arrangement on oxide surfaces for self-assembly of Al and CuO nanoparticles. Langmuir, 2017, 33 (43), pp.12193-12203. ⟨10.1021/acs.langmuir.7b02159⟩. ⟨hal-01613194⟩

Communications dans un congrès

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩. ⟨hal-01871397⟩

Ahmet Lale, Auriane Grappin, David Bourrier, Laurent Mazenq, Aurélie Lecestre, et al.. Development of all-around, SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors Si-nw-ChemFET. EUROSENSORS XXXI, Sep 2017, Paris, France. ⟨hal-01687839⟩

Autres documents

Hugues Granier, Véronique Conédéra, Monique Dilhan, Franck Carcenac, Pierre-François Calmon, et al.. Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS. Rapport LAAS n° 17056. 2017. ⟨hal-01485548⟩

David Bourrier, Arnaud Durlach. COMPARISON OF THICK COPPER PLATING RESULTS WITH LABORATORY AND INDUSTRIAL ELECTROPLATING TOOLS. Journées Nationales sur les Technologies Emergentes en micro-nanofabrication (JNTE 2017), Oct 2017, Orléans, France. 1p., 2017. ⟨hal-01873753⟩

2016

Communications dans un congrès

David Bourrier, Monique Dilhan, Hugues Granier, Arnaud Durlach. Les dépôts électrolytiques appliqués aux micro-dispositifs au LAAS. Journée Toulousaine d'Electrochimie (JTE 2016), Jul 2016, Toulouse, France. ⟨hal-01873836⟩

Aziliz Lecomte, Aurélie Lecestre, David Bourrier, Marie-Charline Blatché, Emeline Descamps, et al.. Deep plasma etching of Parylene C patterns for biomedical applications. MNE 2016, Sep 2016, Toulouse, France. ⟨hal-01415391⟩

Aurélie Lecestre, Aziliz Lecomte, David Bourrier, Pascal Dubreuil, Emeline Descamps, et al.. Plasma etching of thick Parylene C for fabrication of biocompatible electrodes . 9th Workshop on Plasma Etch and Strip in Microtechnology (PESM2016), May 2016, Grenoble, France. ⟨hal-01326492⟩

Autres documents

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS. Rapport LAAS n° 16053. 2016. ⟨hal-01867462⟩

2015

Articles dans une revue

Thierry Leichle, David Bourrier. Integration of lateral porous silicon membranes into planar microfluidics. Lab on a Chip, 2015, 15 (3), pp.833-838. ⟨10.1039/c4lc01094a⟩. ⟨hal-01108903⟩

Autres documents

Rémi Courson, David Bourrier. Réalisation de puces microfluidique sur substrat de verre de faible épaisseur < 200μm. Rapport LAAS n° 15113. 2015. ⟨hal-01875343⟩

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Bilan 2014 des zones de la plateforme de micro et nanotechnologies. Rapport LAAS n°15168. 2015, 105p. ⟨hal-01867464⟩

2014

Articles dans une revue

Yen Mai Nguyen, David Bourrier, Samuel Charlot, Zarel Valdez Nava, Vincent Bley, et al.. Soft ferrite cores characterization for integrated micro- inductors. Journal of Micromechanics and Microengineering, 2014, 24 (10), ⟨10.1088/0960-1317/24/10/104003⟩. ⟨hal-01443220⟩

David Bourrier, Ayad Ghannam, Monique Dilhan, Hugues Granier. Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio. Microsystem Technologies, 2014, 20 (10-11), pp.2089 - 2096. ⟨10.1007/s00542-014-2071-5⟩. ⟨hal-01873715⟩

Communications dans un congrès

Sébastien Cargou, Marc Fouet, Armelle Montrose, David Bourrier, Karine Reybier, et al.. AN INTEGRATED MAGNETIC PLANAR ACTUATOR REDEFINING MULTILEVEL (3D) MICROFLUIDIC STRATEGIES. 10th International Conference on the Scientific and Clinical Applications of Magnetic Cerriers, Jun 2014, Dresden, Germany. pp63. ⟨hal-00987976⟩

Autres documents

Hugues Granier, Adrian Laborde, Alexandre Arnoult, Antoine Maiorano, Aurélie Lecestre, et al.. Plate forme de micro et nanotechnologies Bilan 2013 des zones. Rapport LAAS n° 14772. 2014, 108p. ⟨hal-01867468⟩

Hugues Granier, Alexandre Arnoult, David Bourrier, Laurent Bouscayrol, Pierre-François Calmon, et al.. Protocole d'arrêt général de la plateforme de micro et nanotechnologies du LAAS-CNRS. Rapport LAAS n° 14267. 2014. ⟨hal-01867458⟩