Publications

Journals

Optomechanical resonating probe for very high speed sensing of atomic forces
P.E. Allain, L. Schwab, C. Misner, M. Gely, E. Mairiaux, M. Hermouet, B. Walter, G. Leo, S. Hentz, M. Faucher, G. Jourdan, B. Legrand, and I. Favero
Nanoscale, 12 (2020) 2939-2945
https://doi.org/10.1039/C9NR09690F

https://hal.archives-ouvertes.fr/hal-02997481v1

Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes
D. Lagrange, N. Mauran, L. Schwab, and B. Legrand
IEEE Transactions on Control Systems Technology, 29, 5 (2020) 2264-2270
https://ieeexplore.ieee.org/document/9229238
https://hal.archives-ouvertes.fr/hal-02974151v1

A multiphysics model for high frequency optomechanical sensors optically actuated and detected in the oscillating mode
S. Sbarra, P.E. Allain, S. Suffit, A. Lemaître, and I. Favero

Physics Optics, 6 (2021) 086111
http://doi.org/10.1063/5.0050061

https://arxiv.org/abs/2103.09509
 
Very high frequency probes for atomic force microscopy with silicon optomechanics
L. Schwab, P.E. Allain, N. Mauran, X. Dollat, L. Mazenq, D. Lagrange, M. Gély, S. Hentz, G. Jourdan, I. Favero and B. Legrand

Nature Microsystems and Nanoengineering, 8 (2022) 32
http://doi.org/10.1038/s41378-022-00364-4
 

International communications

Silicon nanomechanical resonators and cavity optomechanics for biological sensing
S. Hentz
Biomechanics Conference, Virtual 2021, may 4-7

Optomechanics: a key towards next-generation experiments in atomic force microscopy?
L. Schwab, P. Allain, D. Théron, M. Faucher, B. Walter, S. Hentz, G. Jourdan, I. Favero, and B. Legrand
International Conference on Quantum Sensing and Metrology, IQuMS 2019, Paris, France, december 9-13, 2019

130-MHz optomechanical vibrating sensor: towards high-bandwidth / ultrasensitive measurements
L. Schwab, P.E. Allain, L. Banniard, N. Mauran, D. Lagrange, A. Fafin, M. Gely, M. Hermouet, G. Jourdan, S. Hentz, I. Favero, and B. Legrand
Proceedings of 32nd IEEE Conference on Micro Electro Mechanical Systems, IEEE MEMS 2019, Seoul, Korea, january 27-31, 2019, pp. 819-822
https://ieeexplore.ieee.org/document/8870718

MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors
B. Legrand, L. Schwab, P. Allain, I. Favero, M. Faucher, D. Théron, B. Walter, J.P. Salvetat, S. Hentz, and G. Jourdan
AVS 65th International Symposium & Exhibition, Long Beach, CA, USA, october 21-26, 2018 (invited)

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors
L. Schwab, P.E. Allain, L. Banniard, A. Fafin, M. Gely, O. Lemonnier, P. Grosse, M. Hermouet, S. Hentz, I. Favero, B. Legrand, and G. Jourdan
Proceedings of 64th IEEE International Electron Devices Meeting, IEEE IEDM 2018, San Francisco, CA, USA, december 3-5, 2018, pp. 4.7.1-4.7.4
https://ieeexplore.ieee.org/document/8614508

Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators? (invited)
M. Hermouet, M. Sansa, M. Martial Defoort, L. Banniard, S. Dominguez-Medina, S. Fostner, U. Palanchoke, A. Fafin, M. Gely, L. Hutin, C. Plantier, E. Rolland, C. Tabone, G. Usai, T. Ernst, P. Villard, G. Billiot, P. Mattei, G. Nonglaton, C. Fontelaye, C. Barrois, O. Castany, E. Gil Santos, P. E. Allain, E. Vernhes, P. Boulanger, A. Brenac, C. Masselon, I. Favero, T. Alava, G. Jourdan and S. Hentz

Proceedings of 64th IEEE International Electron Devices Meeting, IEEE IEDM 2018, San Francisco, CA, USA, december 3-5, 2018, pp. 12.4.1-12.4.3
https://ieeexplore.ieee.org/document/8614532

Optomechanical probe for an ultra-fast AFM
L. Schwab, P. Allain, I. Favero, B. Legrand
11th NAMIS school, IMTEK – University of Freiburg, Germany, Oct. 2-6, 2017

High-frequency optomechanical force sensing
P. Allain, B. Guha, L. Schwab, A. Lemaître, G. Leo, I. Favero
Conference on Physics and Applications of Nanoelectronic and Nanomechanical Systems, Pyeongchang, Korea, Aug. 28-30, 2017 (invited)

High-speed Atomic Force Microscope (invited)
N. Mauran, D. Lagrange, X. Dollat, L. Mazenq, L. Schwab, J.P. Salvetat, B. Legrand
National Instruments Week, NI Week 2017
Austin, Texas, USA, May 22-25, 2017
 

National communications

Applied cavity optomechanics: high-speed atomic force microscopy (HS-AFM)
L. Schwab, P. Allain, I. Favero, B. Legrand
3rd annual meeting GdR MecaQ, Paris, September 12, 2018

DYNAMIC – Instrumentation et contrôle pour la microscopie à force atomique à haute vitesse d’acquisition
B. Legrand, J.-P. Salvetat, D. Lagrange, N. Mauran, X. Dollat, L. Mazenq, P. Merzeau, L. Buisson
Défi Instrumentation aux limites, Colloque de restitution
Paris, France, May 4, 2017 (poster)

 

Institutional communications

Une sonde de microscope à force atomique ultra-rapide pour étudier les interactions moléculaires
B. Legrand, I. Favero
La Lettre Innovation CNRS, n° 60, 2020
https://www.cnrs.fr/lettre-innovation/actus.php?numero=656

Sonde optomécanique de forces atomiques à très haute fréquence
Communication du CEA-LETI

Merging optics and mechanics to sense the fifth dimension
S. Hentz
LETI Innovation Days, october 2020

 

Thesis

Optomechanical probes for high-speed atomic force microscopy
Lucien Schwab
Thesis manuscript prepared at LAAS-CNRS and presented in partial fulfillment of the requirements towards the doctoral degreee from University of Toulouse
Thesis defense: September 25th 2020

Full text available
 

Patents

Sonde pour microscope à force atomique équipé d'un résonateur optomécanique, et microscope à force atomique comportant une telle sonde
Probe for atomic force microscope equipped with an optomechanical resonator, and atomic force microscope comprising such a probe

B. Legrand, L. Duraffourg, S. Hentz, I. Favero, M. Faucher, B. Walter and P. Allain
Priority: FR20170050471 filed on 01/20/2017
International extension filed on 01/19/2018, PCT/EP2018/051360
Publication: FR3062214 (A1) 2018-07-27 and WO2018134377 (A1) 2018-07-26
Partners: LAAS, MPQ, IEMN, CEA-LETI, Vmicro SAS
https://bases-brevets.inpi.fr/fr/document/FR3062214.html
https://bases-brevets.inpi.fr/fr/document/WO2018134377.html