38documents trouvés
High aspect ratio GaAs nanowires made by ICP-RIE etching using Cl2/N2 chemistry
L.JALABERT, P.DUBREUIL, F.CARCENAC, S.PINAUD, L.SALVAGNAC, H.GRANIER, C.FONTAINE
TEAM, PH
Revue Scientifique : Microelectronic Engineering, Vol.85, N°5-6, pp.1173-1178, Mai 2008 , N° 08182
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Abstract
We report an experimental study of GaAs etching by ICP-RIE based on Cl2:N2 chemistry. The influence of the RF source power, the chlorine dilution, the RF platen power, and the process pressure at several substrate temperatures are investigated. An optimized process is proposed to get routinely GaAs nanowires of 1 ¼m high and about 30 nm in diameter with a full top-down approach combining electron beam lithography and Ni lift-off steps.
Mots-Clés / Keywords
GaAs nanowires; Top-down; Plasma etching; ICP-RIE; Cl2/N2 chemistry;
La gravure profonde du silicium de réseaux de tranchées denses à fort facteur de forme
P.DUBREUIL, M.BRUNET, H.E.DKOTB MAHFOZ, G.TOULON, H.GRANIER
TEAM, ISGE
Rapport LAAS N°07625, Novembre 2007, 26p.
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111969Electrostatic polymer-based micro-deformable mirror for adaptive optics
F.ZAMKOTSIAN, V.CONEDERA, H.GRANIER, A.LIOTARD, P.LANZONI, L.SALVAGNAC, N.FABRE, H.CAMON
LAM Marseille, TEAM, MIS
Manifestation avec acte : SPIE Conference, MEMS Adaptive Optics, San José (USA), 20-25 Juin 2007, 12p. , N° 07185
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Abstract
Future adaptive optics (AO) systems require deformable mirrors with very challenging parameters, up to 250 000 actuators and inter-actuator spacing around 500 &mgr;m. MOEMS-based devices are promising for the development of a complete generation of new deformable mirrors. Our micro-deformable mirror (MDM) is based on an array of electrostatic actuators with attachments to a continuous mirror on top. The originality of our approach lies in the elaboration of layers made of polymer materials. Mirror layers and active actuators have been demonstrated. Based on the design of this actuator and our polymer process, realization of a complete polymer-MDM has been done using two process flows: the first involves exclusively polymer materials while the second uses SU8 polymer for structural layers and SiO2 and sol-gel for sacrificial layers. The latest shows a better capability in order to produce completely released structures. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. Then, we have developed a dedicated 14-bit electronics in order to "linearize" the actuation, using a calibration and a sixth-order polynomial fitting strategy. The response is nearly perfect over our 3×3 MDM prototype with a standard deviation of 3.5 nm; the influence function of the central actuator has been measured. First evaluation on the cross non-linarities has also been studied on OKO mirror and a simple look-up table is sufficient for determining the location of each actuator whatever the locations of the neighbor actuators. Electrostatic MDM are particularly well suited for open-loop AO applications.
Mots-Clés / Keywords
Micro-deformable mirror; Polymer materials; High-order perturbation correction; Adaptive optics; Open-loop driving;
Foturan cap and BCB sealing-ring for RF MEMS packaging applications
D.PEYROU, P.PONS, A.NICOLAS, J.TAO, H.GRANIER, R.PLANA
M2D, MEMSCAP, LEN7, TEAM, MINC
Manifestation avec acte : 36th European Microwave Conference (EuMC'2006), Manchester (GB), 10-15 Septembre 2006, 8p. , N° 06438
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107972Electrostatic polymer-based micro-deformable mirror for adaptive optics
F.ZAMKOTSIAN, V.CONEDERA, H.GRANIER, A.LIOTARD, P.LANZONI, L.SALVAGNAC, N.FABRE, H.CAMON
LAM Marseille, TEAM, MIS
Manifestation avec acte : SPIE Conference on Astronomical Telescopes and Instrumentation (SPIE 6272), Orlando (USA), 24-31 Mai 2006, 12p. , N° 06238
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109923Développement d'une micro-source de pression pour des applications microfluidiques
G.A.ARDILA RODRIGUEZ, C.ROSSI, D.ESTEVE, V.CONEDERA, H.GRANIER
MIS, TEAM
Manifestations avec acte à diffusion limitée : 9èmes Journées Nationales du Réseau Doctorat en Microélectronique (JNRD'2006), Rennes (France), 10-12 Mai 2006, 4p. , N° 06063
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106979First approach to the use of liquid crystal elastomers for chemical sensors
C.BINET, D.BOURRIER, M.DILHAN, D.ESTEVE, S.FERRERE, J.C.GARRIGUE, H.GRANIER, A.LATTES, A.M.GUE, M.MAUZAC, A.F.MINGOTAUD
MIS, TEAM, LIMRCP, IMRCP
Revue Scientifique : Talanta, Vol.69, N°3, pp.757-762, Mai 2006 , N° 06004
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108324Multiphysics softwares benchmark on ANSIS/COMSOL applied for RF MEMS switches packaging simulations
D.PEYROU, P.PONS, H.GRANIER, D.LERAY, A.FERRAND, K.YACINE, M.SAADAOUI, A.NICOLAS, J.TAO, R.PLANA
M2D, TEAM, INSA-DGM, MEMSCAP, LEN7, MINC
Manifestation avec acte : 7th International Conference Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE'2006), Como (Italie), 24-26 Avril 2006, 8p. , N° 06102
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106810Détection latérale intégrée dans un VCSEL via un contact Schottky
C.AMAT, T.CAMPS, V.BARDINAL, E.DARAN, J.C.MARROT, H.GRANIER, J.B.DOUCET, G.ALMUNEAU, C.FONTAINE
PH, TEAM
Manifestations avec acte à diffusion limitée : 11èmes Journées Nano-Micro Electronique et Optoélectronique (JNMO), Aussois (France), 4-7 Avril 2006, 2p. , N° 06226
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106643Filière technologique CMOS/LIGBT/bipolaires/LDMOS à isolation diélectrique enterrée localisée obtenue par la technique LEGO
H.GRANIER, I.BERTRAND, B.ROUSSET, M.BAFLEUR, J.M.DILHAC, L.BOUSCAYROL, C.GANIBAL, P.DUBREUIL
TEAM, ISGE, 2I
Rapport LAAS N°06187, Mars 2006, 84p.
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