187documents trouvés
Recrystallized polysilicon films deposited from disilane: simulation and characterization
R.MAHAMDI, F.MANSOUR, HBOURIDAH, P.TEMPLE BOYER, E.SCHEID, L.JALABERT
Constantine, M2D, TEAM
Manifestation sans acte : 7th International Workshop on Epitaxial Semiconductors on Patterned Substrates and Novel Index Surfaces (ESPS NIS), Marseille (France), 21-24 Avril 2008, 17p. , N° 08239
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Mots-Clés / Keywords
Activation; Diffusivity; SIMS profile; Grain size; Boron;
Micromachined inclinometer based on fluid convection
N.CRESPY, J.COURTEAUD, P.COMBETTE, P.TEMPLE BOYER, A.GIANI, A.FOUCARAN
IES, M2D
Manifestation avec acte : Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP of MEMS & MOEMS 2008), Nice (France), 9-11 Avril 2008, 3p. , N° 08213
Lien : http://hal.archives-ouvertes.fr/hal-00277704/fr/
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Abstract
This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavity. By applying a tilt to the sensor, the profile shifts in the same direction of the sensible axis corresponding to the horizontal one to one. The temperature profile and the sensitivity according to the CO2 gas and mineral oil SAE50 have been studied using numerical resolution of fluid dynamics equations with the computational fluid dynamics (CFD) software package Fluent V6.2. We have shown that the sensitivity of liquid sensors is higher than the gas sensors one. By using micromachined silicon technique, a thermal inclinometer with one pair of detectors placed at 300 um from the heater has been made. Experimental measurements corroborate with the numerical simulation.
Plasma-enhanced chemical vapor deposition of silicon oxynitride for micromachined millimeter-wave devices
M.SAADAOUI, D.PEYROU, H.ACHKAR, F.PENNEC, L.BOUSCAYROL, B.ROUSSET, P.TEMPLE BOYER, E.SCHEID, P.PONS, R.PLANA
M2D, MINC, TEAM
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.18, N°3, 035032p., Mars 2008 , N° 08861
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118622Microdevices innovative designing for bacterial activity detection
M.L.POURCIEL, S.ASSIE-SOULEILLE, P.TEMPLE BOYER
M2D, 2I
Manifestation avec acte : 3rd International Workshop on Biosensors for Food Safety and Environmental Monitoring, Fes (Maroc), 18-20 Octobre 2007, 1p. (Résumé) , N° 07587
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111794Conception d'un microdispositif pour la détection d'activités bactériennes
M.L.POURCIEL, S.ASSIE-SOULEILLE, P.TEMPLE BOYER
M2D, 2I
Manifestation sans acte : Journée Thématique CMC2. Microcapteurs Biologiques et leurs Applications, Rennes (France), 25 Octobre 2007, 1p. , N° 07592
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112993Chemical sensors passivating method based on benzocyclobutene layer using spin coating and photolithography techniques
J.LAUNAY, J.B.DOUCET, B.TORBIERO, M.L.POURCIEL, P.TEMPLE BOYER
TEAM, M2D
Manifestation avec acte : EUROanalysis XIV, Antwerp (Belgique), 9-14 Septembre 2007, 1p. , N° 07769
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112676Effects of thermal annealing and nitrogen content on amorphous silicon thin films crystallization
H.BOURIDAH, F.MANSOUR, R.MAHAMDI, N.BOUNAR, P.TEMPLE BOYER
JIJEL, Constantine, M2D
Revue Scientifique : Physica Status Solidi (a), Vol.204, N°7, pp.2347-2354, Juillet 2007 , N° 07383
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Abstract
We study the influence of high-temperature annealing (1100-1200 °C) on the crystallization of nitrogen-doped silicon films deposited by LPCVD (low-pressure chemical vapor deposition) at low temperature (465 °C) from disilane Si2H6 and ammonia NH3. Scanning electron microscopy (SEM) and X-ray diffraction, studies of films are used to analyze crystallinity evolution and grain orientations. Results show the transformation of films deposited in amorphous phase to a typically polycrystalline structure after high-temperature annealing with a large grain size exceeding 1 m. The structural properties are strongly influenced by the annealing conditions and the nitrogen ratio in each film. It is shown that the film crystallinity increases with the duration of annealing, and that the nitrogen content inhibits the crystallization phenomena.
Effects of nitrogen on boron doped polysilicon thin films properties
H.BOURIDAH, F.MANSOUR, R.MAHAMDI, P.TEMPLE BOYER
JIJEL, Constantine, M2D
Manifestation avec acte : IEEE International Symposium on Industrial Electronics (ISIE 2007), Vigo (Espagne), Juin 2007, 4p. , N° 07269
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110563Physico-chemical characterization of polysilicon films
R.MAHAMDI, L.SACI, F.MANSOUR, P.TEMPLE BOYER, E.SCHEID, L.JALABERT
Constantine, M2D, TEAM, Univ Hadj Lakdar
Manifestation avec acte : La Rencontre Internationale de Spectroscopie et d'Optique (RISO 2007), Kenitra (Maroc), 1-2 Juin 2007, 10p. , N° 07267
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110547Polysiloxane thin films optimisation for potassuim detection using electrochemical impedance spectroscopy characterization with microelectrode structures
J.LAUNAY, B.TORBIERO, A.MARTINEZ, P.TEMPLE BOYER
M2D
Manifestation avec acte : 7th International Symposium on "Electrochemical Impedance Spectroscopy" (EIS 2007), Argelès-sur-Mer (France), 3-8 Juin 2007, 2p. , N° 07784
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