104documents trouvés
A miniaturized VCSEL-based system for optical sensing in a microfluidic channel
B.REIG, V.BARDINAL, T.CAMPS, J.B.DOUCET, E.DARAN
TEAM, MICA, N2IS
Manifestation avec acte : IEEE SENSORS 2012 du 28 octobre au 31 octobre 2012, Taipei (Taiwan), Octobre 2012, 4p. , N° 12479
Diffusable
128948Photo-chemical study and optical properties of microtips self-written on vertical laser diodes using NIR photo-polymerisation
D.BARAT, V.BARDINAL, I.DIKA, O.SOPPERA, P.DEBERNARDI, A.RUMYANTSEVA, B.REIG, M.RENAULT, T.CAMPS, A.BRUYANT, J.B.DOUCET, J-P.MALVAL, E.DARAN
MICA, IS2M, Politecnico Torino, LNIO, ICD-CNRS, N2IS, TEAM
Revue Scientifique : Optics Express, Vol.20, N°20, pp.22922-22933, Septembre 2012 , N° 12398
Diffusable
128097Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization
D.BARAT, V.BARDINAL, I.DIKA, O.SOPPERA, A.RUMYANTSEVA, B.REIG, M.RENAULT, A.BRUYANT, T.CAMPS, J.B.DOUCET, J-P.MALVAL, E.DARAN
MICA, IS2M, LNIO, ICD-CNRS, TEAM, N2IS
Manifestation avec acte : International Conference on Micro and Nano Engineering (MNE 2012), Toulouse (France), 16-20 Septembre 2012, 1p. , N° 12478
Diffusable
128204Development of soft UV-nanoimprint lithography for GaAs nanotructures
H.MAKHLOUFI, E.DARAN, C.FONTAINE
PH, TEAM
Manifestation avec acte : International Conference on Micro and Nano Engineering (MNE 2012), Toulouse (France), 16-20 Septembre 2012, 1p. , N° 12431
Diffusable
128203High reflectivity small aperture resonant grating filters for laser diode spectral stabilisation
X.BUET, A.MONMAYRANT, E.DARAN, D.BELHARET, F.LOZES-DUPUY, O.GAUTHIER-LAFAYE
PH, TEAM
Conférence invitée : International Conference on Transparent Optical Networks (ICTON 2012), Coventry (UK), 2-5 Juillet 2012, 3p. , N° 12392
Non diffusable
127772Mise au point de la lithographie douce par nano-impression assistée par rayonnement ultra-violet sur SiO2/GaAs à partir d'un moule souple de polymère
H.MAKHLOUFI, E.DARAN, C.FONTAINE
PH, TEAM
Manifestation sans acte : Journées Nationales du Réseau Doctoral en Microélectronique (JNRDM 2012), Marseille (France), 18-20 Juin 2012, 3p. , N° 12267
Diffusable
127467Fabrication of polymer-based optical microsystems arrays suited for the active focusing of vertical laser diodes
B.REIG, T.CAMPS, V.BARDINAL, D.BOURRIER, E.DARAN, J.B.DOUCET, J.LAUNAY, J.Y.FOURNIOLS
MICA, N2IS, TEAM
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.22, N°6, 065006p., Juin 2012 , N° 12133
Diffusable
127118Development of UV-nanoimprint lithography for GaAs nanostructures using soft mold
H.MAKHLOUFI, E.DARAN, C.FONTAINE
PH, TEAM
Manifestation avec acte : Epitaxy and Structural Analysis of III-V-N-Semiconductor Nanostructures, Heraklion (Grèce), 29 Avril - 2 Mai 2012, 2p. , N° 12235
Diffusable
127187High angular tolerance and reflectivity with narrow bandwidth cavity-resonator integrated guided-mode resonance filter
X.BUET, E.DARAN, D.BELHARET, F.LOZES-DUPUY, A.MONMAYRANT, O.GAUTHIER-LAFAYE
PH, TEAM
Revue Scientifique : Optics Express, Vol.20, N°8, pp.9322-9327, Avril 2012 , N° 12220
Non disponible
127096Polymer tunable microlens arrays suitable for VCSEL beam control
B.REIG, V.BARDINAL, T.CAMPS, Y.BOUCHER, C.LEVALLOIS, J.B.DOUCET, D.BOURRIER, E.DARAN, J.LAUNAY
N2IS, UEB, INSA Rennes, TEAM, MICA
Manifestation avec acte : Photonics Europe 2012, Bruxelles (Belgique), 16-19 Avril 2012, 11p. , N° 12148
Lien : http://hal.archives-ouvertes.fr/hal-00725891
Diffusable
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Abstract
We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 500x500 µm² enabling a rapid, low cost and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical displacement of 8 µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavior is found. Moreover, optical measurements of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication.