47documents trouvés
High resolution HSQ nanopillar arrays with low energy electron beam lithography
Y.GUERFI, F.CARCENAC, G.LARRIEU
MPN, TEAM
Manifestation avec acte : Toulouse (France), 1p. , N° 12569
Diffusable
128308Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system
A.MARTINEZ RIVAS, F.CARCENAC, D.SAYA, C.SEVERAC, L.NICU, C.VIEU
NBS, TEAM
Revue Scientifique : Nanotechnology, Vol.23, N°10, 105302p., Mars 2012 , N° 12159
Diffusable
126899Thin films of Prussian blue: sequencial assembly, patterning and electron transport properties at the nanometric scale
S.COBO, G.MOLNAR, F.CARCENAC, P.SZILAGYI, L.SALMON, C.VIEU, A.BOUSSEKSOU
LCC, NBS, TEAM
Revue Scientifique : Journal of Nanoscience and Nanotechnology, Vol.10, N°8, pp.5042-5050, Août 2010 , N° 10711
Diffusable
123119650 NF/MM2 3D Capacitors Integrated in Silicon Based on NanoLithography and Electrochemical Etching
M.BRUNET, P.KLEIMANN, E.DARAN, F.CARCENAC, L.JALABERT, P.DUBREUIL
ISGE, INL, TEAM
Manifestation avec acte : 20th MicroMechanics europe Workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09825
Non diffusable
120231Filtres spectraux de nouvelle génération, très sélectifs en longueur d'onde, travaillant dans le moyen infrarouge
K.CHAN SHIN YU, P.ARGUEL, A.ARNOULT, S.BONNEFONT, F.CARCENAC, V.CONEDERA, E.DARAN, O.GAUTHIER-LAFAYE, F.LOZES-DUPUY, A.MONMAYRANT, C.TOURTE
TEAM, 2I, PH
Rapport de Contrat : 92629/00, lot. 6000013631. CNES. Rapport d'avancement n° 1, Août 2009, 7p. , N° 09516
Non diffusable
118764Porous silicon membrane, with an integrated aqueous supply, for two chamber AFM
C.THIBAULT, F.CARCENAC, E.DAGUE, J.CHALMEAU, C.VIEU
NBS, TEAM
Revue Scientifique : Microelectronic Engineering, Vol.86, N°4-6, pp.1393-1395, Avril-Juin 2009 , N° 09762
Diffusable
119883Masking strategy for all ICP-RIE etching of high aspect ratio photonic crystals in GaAs
A.LARRUE, P.DUBREUIL, D.BELHARET, F.CARCENAC, S.BONNEFONT, O.GAUTHIER-LAFAYE, F.LOZES-DUPUY
PH, TEAM
Manifestation avec acte : Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication, Toulouse (France), 19-21 Novembre 2008, 2p. , N° 08738
Diffusable
Plus d'informations
Abstract
We develop a method of masking to improve the aspect ratio of GaAs-based Photonic Crystals (PhC). The masking consists of the combination of Cr layer with SiO2 layer. A study on the PhC patterning in Cr is performed as well as the optimization of the SiO2 etching for holes ranging from 150 to 250nm.
Self-aligned patterns of multiple biomolecules printed in one step
J.CHALMEAU, C.THIBAULT, F.CARCENAC, C.VIEU
NBS, TEAM
Revue Scientifique : Applied Physics Letters, Vol.93, N°13, pp.133901-1-133901-3, Octobre 2008 , N° 08503
Diffusable
Plus d'informations
Abstract
We describe an adaptation of the microcontact printing technique for generating self-aligned patterns of two different molecules in one printing step. Elastomeric stamps exhibiting different levels of topography are designed and fabricated so that, by external pressure, their deformation enables two planes, selectively inked with two different molecules, to contact the surface. The fabrication of 1 µm wide biomolecular patterns aligned into 5 µm wide patterns of another biomolecule is demonstrated through fluorescence imaging and atomic force microscopy.
Wafer scale contact deposition of liquid solutions on interdigitated nanoelectrode devices for high sensitivity multiplexed biological analysis
A.MARTINEZ RIVAS, C.SEVERAC, F.CARCENAC, D.SAYA, L.NICU, C.VIEU
TEAM, NBS
Manifestation avec acte : 34th Micro and Nano Engineering Conference (MNE 2008), Athènes (Grèce), 15-18 Septembre 2008, 2p. , N° 08220
Diffusable
Plus d'informations
Abstract
This work reports the combination of liquid contact deposition using a MEMs system on interdigitated nanoelectrode devices. Our methodology and tools allows the deposition of different biological solutions on 103 nanoelectrode devices in less than one hour on a 4 inch wafer.
Micro-Contact Printing of Two Different Biomolecules in One Step Using Deformable Poly(dimethylsiloxane)-Based Stamp
J.CHALMEAU, C.THIBAULT, F.CARCENAC, C.VIEU
NBS, TEAM
Revue Scientifique : Japanese Journal of Applied Physics, Vol.47, N°6, pp.5221-5225, 20 Juin 2008 , N° 08879
Diffusable
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