132documents trouvés
A miniaturized VCSEL-based system for optical sensing in a microfluidic channel
B.REIG, V.BARDINAL, T.CAMPS, J.B.DOUCET, E.DARAN
TEAM, MICA, N2IS
Manifestation avec acte : IEEE SENSORS 2012 du 28 octobre au 31 octobre 2012, Taipei (Taiwan), Octobre 2012, 4p. , N° 12479
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128948Photo-chemical study and optical properties of microtips self-written on vertical laser diodes using NIR photo-polymerisation
D.BARAT, V.BARDINAL, I.DIKA, O.SOPPERA, P.DEBERNARDI, A.RUMYANTSEVA, B.REIG, M.RENAULT, T.CAMPS, A.BRUYANT, J.B.DOUCET, J-P.MALVAL, E.DARAN
MICA, IS2M, Politecnico Torino, LNIO, ICD-CNRS, N2IS, TEAM
Revue Scientifique : Optics Express, Vol.20, N°20, pp.22922-22933, Septembre 2012 , N° 12398
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128097Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization
D.BARAT, V.BARDINAL, I.DIKA, O.SOPPERA, A.RUMYANTSEVA, B.REIG, M.RENAULT, A.BRUYANT, T.CAMPS, J.B.DOUCET, J-P.MALVAL, E.DARAN
MICA, IS2M, LNIO, ICD-CNRS, TEAM, N2IS
Manifestation avec acte : International Conference on Micro and Nano Engineering (MNE 2012), Toulouse (France), 16-20 Septembre 2012, 1p. , N° 12478
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128204Instrumentation d'un capteur en poly-silicium pour l'analyse des vibrations des structures composites
C.CODREANU, J.LUBIN, T.CAMPS, R.FRANCOIS
N2IS, LMDC
Manifestation sans acte : Journées Nationales du Réseau Doctoral en Microélectronique ( JNRDM ) 2012 du 18 juin au 20 juin 2012, Marseille (France), Juin 2012, 4p. , N° 12786
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129106Fabrication of polymer-based optical microsystems arrays suited for the active focusing of vertical laser diodes
B.REIG, T.CAMPS, V.BARDINAL, D.BOURRIER, E.DARAN, J.B.DOUCET, J.LAUNAY, J.Y.FOURNIOLS
MICA, N2IS, TEAM
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.22, N°6, 065006p., Juin 2012 , N° 12133
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127118Polymer tunable microlens arrays suitable for VCSEL beam control
B.REIG, V.BARDINAL, T.CAMPS, Y.BOUCHER, C.LEVALLOIS, J.B.DOUCET, D.BOURRIER, E.DARAN, J.LAUNAY
N2IS, UEB, INSA Rennes, TEAM, MICA
Manifestation avec acte : Photonics Europe 2012, Bruxelles (Belgique), 16-19 Avril 2012, 11p. , N° 12148
Lien : http://hal.archives-ouvertes.fr/hal-00725891
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Abstract
We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 500x500 µm² enabling a rapid, low cost and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical displacement of 8 µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavior is found. Moreover, optical measurements of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication.
Development of polysilicon devices for microfluidic thermal instrumentation
T.CAMPS, J.TASSELLI, J.LUBIN, D.LAGRANGE, L.BOUSCAYROL, A.MARTY
N2IS, ISGE, 2I, TEAM
Rapport LAAS N°12153, http://dx.doi.org/10.1016/j.sna.2012.10.004, Mars 2012, 11p.
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126875VCSEL beam control with collective and self aligned polymer technologies
V.BARDINAL, T.CAMPS, B.REIG, P.DEBERNARDI, O.SOPPERA, D.BARAT, J.B.DOUCET, E.DARAN
MICA, N2IS, Politecnico Torino, IS2M, PH, TEAM
Conférence invitée : SPIE Photonics West, San Francisco (USA), 21-26 Janvier 2012, 9p. , N° 12114
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126769Collective micro-optics technologies for VCSEL photonic integration
V.BARDINAL, T.CAMPS, B.REIG, D.BARAT, E.DARAN, J.B.DOUCET
PH, N2IS, TEAM
Revue Scientifique : Advances in Optical Technologies, Vol.2011, N°paper ID 609643, 11p., Novembre 2011 , N° 11381
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126643Micro-optique intégrée dur diodes laser verticales
V.BARDINAL, B.REIG, D.BARAT, T.CAMPS, E.DARAN, J.B.DOUCET
PH, N2IS, TEAM
Conférence invitée : HORIZONS de l'Optique, Marseille (France), 4-7 Juillet 2011, 2p. , N° 11677
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