405documents trouvés
Self Calibrating pressure sensor for biomedical applications
P.YAMEOGO, U.ZAGHLOUL HEIBA, M.AL BAHRI, P.PONS
M2D, MINC
Manifestation avec acte : IEEE SENSORS 2009, Christchurch (Nouvelle Zélande), 25-28 Octobre 2009, 4p. , N° 09952
Lien : http://hal.archives-ouvertes.fr/hal-00670168
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Abstract
In this paper we present for the first time a wireless self calibrating pressure sensor for biomedical applications. The proposed system consists of a piezoresistive pressure sensor implemented on a thin silicon membrane, a catheter tube and finally a protection capsule fabricated from a biocompatible polymer (PEEK). A double side flex with embedded conductors has been used to create the interconnections between the pressure sensor and the control circuit which is further connected to a wireless transceiver. The auto calibration capability of the proposed sensor enables to avoid the existing problem of drift with time and hence provides an excellent solution for long term monitoring. Moreover, the catheter of the proposed system has a reduced length of only 200mm in comparison to the 1m length for the existing wired solutions.
Dielectric charging in silicon nitride films for MEMS capacitive switches: effect of film thickness and deposition conditions
U.ZAGHLOUL HEIBA, G.J.PAPAIOANNOU, F.COCCETTI, P.PONS, R.PLANA
MINC, Athenes, 2I
Manifestation avec acte : 20th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2009), Arcachon (France), 5-9 Octobre 2009, pp.1309-1314 , N° 09520
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Mots-Clés / Keywords
Silicon nitride; RF MEMS switches; Poole-Frenkel law; PECVD; Dielectric charging;
Wireless interrogation techniques for a passive pressure micro-sensor using an EM transducer
M. M.JATLAOUI, F.CHEBILA, P.PONS, H.AUBERT
M2D, MINC
Manifestation avec acte : 39th European Microwave Conference : European Microwave week 2009 (EuMA: EuMC), Rome (Italie), 28 Septembre-2 octobre 2009, pp.53-56 , N° 09437
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119096Design and manufacturing of tunable badpass filter for millimeter wave applications
A.TAKACS, P.F.CALMON, A.RUMEAU, H.AUBERT, P.PONS, A.MULLER, D.NECULOIU, R.PLANA
TEAM, 2I, IMT, MINC
Manifestation avec acte : Workshop on Micromachining, Micromechanics and Microsystems (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09922
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122555Optimization of MEMS gold bridge planarization
C.VILLENEUVE, P.PONS, R.PLANA
MINC
Manifestation avec acte : 20th MicroMechanics europe Workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09823
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120233Wafer-Wafer Packaging for high Temperature Soi Pressurre Sensor
J.F.LE NEAL, S.BRIDA, S.METIVET, J-Y.PAJAK, P.PONS, O.STOJANOVIC, I.VALLET
Esterline Sensor Gpe, M2D
Manifestation avec acte : 20th MicroMechanics europe Workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09837
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120281Validation of bending test by nanoidentification for micro-contact analysis of RF-MEMS switches
A.BROUE, T.FOURCADE, J.DHENNIN, F.COURTADE, C.DIEPPEDALE, P.PONS, X.LAFONTAN, R.PLANA
NOVAMEMS, CNES, CEA/LETI/MINATEC, MINC
Manifestation avec acte : Workshop on Micromachining Micromechanics and Microsystems (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09953
Lien : http://hal.archives-ouvertes.fr/hal-00670198
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127037Thermal behavior of silicon capacitive pressure sensors using electrostatic pressure
M.AL BAHRI, P.PONS, P.MENINI
M2D
Manifestation avec acte : 20th MicroMechanics Europe workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09658
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119558Experimental verification of TCR coefficients for uniformly doped resistors
M.OLSZACKI, C.MAJ, M.AL BAHRI, P.PONS, A.NAPIERALSKI
M2D, Lodz
Manifestation avec acte : 20th MicroMechanics Europe workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009 , N° 09615
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119563Simulations Approach for an EM Transduction Based Pressure Sensor
M.DING, M. M.JATLAOUI, P.PONS, H.AUBERT
ISGE, MINC
Manifestation avec acte : 20th MicroMechanics Europe workshop (MME 2009), Toulouse (France), 20-22 Septembre 2009, 4p. , N° 09599
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