405documents trouvés
A new iterative algorithm for the solution for the load deflection square membranes
H.YOUSSEF, A.FERRAND, P.PONS, R.PLANA
MINC
Manifestation avec acte : 11th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Micro/Nanoelectronics and Systems (EuroSimE 2010), Bordeaux (France), 26-28 Avril 2010, pp.82-82 , N° 10219
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121195RF MEMS fluidic variable inductor
I.EL GMATI, R.FULCRAND, P.F.CALMON, A.BOUKABACHE, P.PONS, H.BOUSSETTA, M.A.KALLALA, KBESBES
MINC, N2IS, TEAM, Monastir
Manifestation avec acte : International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTSI 2010), Hammamet (Tunisie), 23-25 Mars 2010, 3p. , N° 10156
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121996Thermal and topological characterization of Au, Ru and Au/Ru based MEMS contacts using nanoindenter
A.BROUE, J.DHENNIN, F.COURTADE, P.L.CHARVET, P.PONS, X.LAFONTAN, R.PLANA
NOVAMEMS, CNES, Toulouse, MINC
Manifestation avec acte : International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong (Chine), 24-28 Janvier 2010, 4p. , N° 10951
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125315Characterization of Au/Au, Au/Ru and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology
A.BROUE, J.DHENNIN, F.COURTADE, C.DIEPPEDALE, P.PONS, X.LAFONTAN, R.PLANA
NOVAMEMS, CNES, CEA/LETI/MINATEC, MINC
Manifestation avec acte : SPIE Photonics West 2011, San Francisco (USA), 23-28 Janvier 2010, 13p. , N° 10950
Lien : http://hal.archives-ouvertes.fr/hal-00624780/fr/
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Abstract
Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact physics. Experimental measurements are obtained to characterize the response of a 5-μm2-square contact bump under electromechanical stress with increased applied current. The data provide a better understanding of microcontact behavior related to the impact of current at low- to medium-power levels. Contact temperature rise is observed, leading to shifts of the mechanical properties of contact materials and modifications of the contact surface. The stability of the contact resistance, when the contact force increases, is studied for contact pairs of soft (Au/Au contact), harder (Ru/Ru contact), and mixed material configuration (Au/Ru contact). An enhanced stability of the bimetallic contact Au/Ru is demonstrated, onsidering sensitivity to power increase related to creep effects and topological modifications of the contact surfaces. These results are compared to previous ones and discussed in a theoretical way by considering the temperature distribution around the hottest area at the contact interface.
Capteur de pression passif à traduction électromagnétique
M. M.JATLAOUI, F.CHEBILA, P.PONS, H.AUBERT
MINC
Manifestation avec acte : Colloque Interdisciplinaire en Instrumentation (C2I 2010), Le Mans (France), 26-27 Janvier 2010, 7p. , N° 10095
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121033New Micro-sensors Identification Techniques Based on Reconfigurable Multi-band Scatterers
M. M.JATLAOUI, F.CHEBILA, P.PONS, H.AUBERT
MINC
Manifestation avec acte : Asia Pacific Microwave Conference (APMC 2009), Singapore (Singapore), Décembre 2009, 4p. , N° 09680
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119819Fabrication and characterization of RF-MEMS switch in V-band
T.M.VU, G.PRIGENT, J.RUAN, A.RUMEAU, P.PONS, R.PLANA
MINC, LAPLACE
Manifestation avec acte : Asia Pacific Microwave Conference (APMC 2009), Singapore (Singapore), 7-10 Décembre 2009, 4p. , N° 09681
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119818Tunable bandpass MEMS filters for millimeter wave appications : design and results
A.TAKACS, D.NECULOIU, D.VASILACHE, A.MULLER, P.PONS, L.BARY, P.F.CALMON, H.AUBERT, R.PLANA
IMT, 2I, TEAM, MINC
Revue Scientifique : MTA Review, Vol.XIX, N°4, pp.409-418, Décembre 2009 , N° 09761
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119881Effect of humidity on dielectric charging process in electrostatic capacitive RF MEMS switches based on kevin probe microscopy surface potential measurements
U.ZAGHLOUL HEIBA, G.J.PAPAIOANNOU, F.COCCETTI, P.PONS, R.PLANA
MINC, Athenes, 2I
Manifestation avec acte : MRS Fall Meeting, Boston (USA), 30 Novembre - 4 Décembre 2009, 6p. , N° 09885
Lien : http://hal.archives-ouvertes.fr/hal-00670181
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Abstract
In this article we investigate the effect of relative humidity on dielectric charging/discharging processes in electrostatically actuated MEMS devices. The assessment procedure is based on surface potential measurements using Kelvin Probe Force Microscopy (KPFM) and it targets in this specific work PECVD silicon nitride films in view of application in electrostatic capacitive RF MEMS switches. Charges have been injected through the AFM tip and the induced surface potential has been measured under different relative humidity levels. The impact of the charge injection duration and the bias level as well as bias polarity applied during the charge injection step, have been explored. Finally, the effect of the dielectric film thickness under different relative humidity levels has been assessed through depositing SiN films with different thicknesses.
Frequency scalable model for MEMS capacitive shunt switches at millimeter wave frequencies
V.PUYAL, D.DRAGOMIRESCU, C.VILLENEUVE, J.RUAN, P.PONS, R.PLANA
MINC
Revue Scientifique : IEEE Transactions on Microwave Theory and Techniques, Vol.57, N°11, pp.2824-2833, 10 Novembre 2009 , N° 09508
Lien : http://hal.archives-ouvertes.fr/hal-00591017/fr/
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Abstract
This paper presents an approach to RF MEMS capacitive shunt switch design from K band up to W-band, based on the scalability of the RF MEMS switch with frequency. The parameters of the switch's equivalent circuit model also follow scaling rules. The measurement results of the fabricated switches show an excellent agreement with simulations which allow to validate the MEMS model in the entire band from 20 GHz up to 94 GHz. This model is going to be used in phase shifter circuit design for antenna array applications. First 60 GHz phase shifter results are also reported here.
Mots-Clés / Keywords
RF MEMS; Capacitive; Shunt switches; Phase shifters; Modelling;