405documents trouvés
Push-pull seesaw principle capacitive RF-MEMS shunt switch
J.RUAN, C.VILLENEUVE, F.COCCETTI, P.PONS, N.NOLHIER, R.PLANA
MINC, ISGE
Manifestation avec acte : International Symposiumon RF MEMS and RF Microsystems (MEMSWAVE 2010), Otranto (Italie), 28-30 Juin 2010, 4p. , N° 10611
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122757Experimental verification of temperature coefficients of resistance for uniformly doped P-type resistors in SOI
M.OLSZACKI, C.MAJ, M.AL BAHRI, J.C.MARROT, A.BOUKABACHE, P.PONS, A.NAPIERALSKI
TEAM, N2IS, Lodz, M2D
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.20, N°6, 064008p., Juin 2010 , N° 10799
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123494Planarization optimization of RF-MEMS switches with a gold membrane
C.VILLENEUVE, P.PONS, V.PUYAL, R.PLANA
MINC
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.20, N°6, 064013p., Juin 2010 , N° 10943
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125179A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy
U.ZAGHLOUL HEIBA, G.J.PAPAIOANNOU, F.COCCETTI, P.PONS, R.PLANA
MINC, Athenes
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.20, N°6, 064016p., Juin 2010 , N° 10603
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122727New ultra-sensitive passive microsensor based on EM transduction for remote sensing
D.MINGLI, M. M.JATLAOUI, P.PONS, H.AUBERT
EXT, MINC
Manifestation avec acte : E-MRS Spring Meeting, Strasbourg (France), 7-11 Juin 2010, 1p. (Résumé) , N° 10396
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121980RF modeling and characterization of RF-MEMS switches for reconfigurable reflectarray applications
A.TAKACS, T.IDDA, S.AOUBA, H.AUBERT, P.PONS, E.GIRARD
MINC, 2I, TEAM, Thalès Alenia Space
Manifestation avec acte : International Symposiumon RF MEMS and RF Microsystems (MEMSWAVE 2010), Otranto (Italie), 28 Juin - 1 Juillet 2010, 4p. , N° 10548
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122537Loi de comportement de matériau composite déposé en couche mince
H.YOUSSEF, A.FERRAND, P.PONS, R.PLANA
MINC
Manifestation avec acte : International Symposium on Aircraft Materials (ACMA 2010), Marrakech (Maroc), 12-14 Mai 2010, 7p. , N° 10223
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121455An experimental characterization of Au- and Ru- based microcontacts for MEMS switches
A.BROUE, J.DHENNIN, P.L.CHARVET, F.COURTADE, P.HEEB, P.PONS, R.PLANA
NOVAMEMS, CEA, CNES, NTB, MINC
Manifestation avec acte : Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2010), Seville (Espagne), 5-7 Mai 2010, 2p. , N° 10962
Lien : http://hal.archives-ouvertes.fr/hal-00670159
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Abstract
From several years, NOVA MEMS has developed a new set-up for the characterization of contact materials used in micro- switches. Comparisons between several pairs of contact materials have been done with this methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate the underlying physics that drives the surface-related failure modes. The data provides a better understanding of micro-contact behaviour related to the impact of current at low- to mediumpower levels. The decrease of the contact resistance, when the contact force increases, is measured for contact pairs of soft material (Au/Au contact), harder materials (Ru/Ru and Rh/Rh contacts) and mixed configuration (Au/Ru and Au/Ni contacts). The super-temperatures of the contacts have been calculated and compared to the theoretical values of softening temperature for each material. It can be shown that this temperature can be reached for gold, ruthenium and rhodium material, with different levels of current intensity. However, no softening behaviour has been highlighted for mixed contact. An enhanced stability of the bimetallic contacts Au/Ru and Au/Ni was demonstrated considering sensitivity to power increase, related to thermo-mechanical deformations and topological modifications of the contact asperities. These results are discussed in a theoretical way by considering the temperature distri
A novel low cost failure analysis technique for dielectric charging phenomenon in electrostatically actuated MEMS devices
U.ZAGHLOUL HEIBA, F.COCCETTI, G.J.PAPAIOANNOU, P.PONS, R.PLANA
MINC, Athenes
Manifestation avec acte : International Reliability Physics Symposium (IRPS 2010), Anaheim (USA), 2-6 Mai 2010, pp.237-245 , N° 10604
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122729A novel passive wireless ultrasensitive RF temperature transducer for remote sensing
T.THAI, M. M.JATLAOUI, H.AUBERT, P.PONS, G.R.Dejean, E.TENTZERIS, R.PLANA
MINC, Microsoft Research
Manifestation avec acte : IEEE MTT International Microwave Symposium (IMS 2010), Anaheim (USA), 23-28 Mai 2010, 4p. , N° 10379
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