405documents trouvés
Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques
U.ZAGHLOUL HEIBA, M.KOUTSOURELI, H.WANG, F.COCCETTI, G.J.PAPAIOANNOU, P.PONS, R.PLANA
MINC, Athenes
Revue Scientifique : Microelectronics Reliability, Vol.50, N°9-11, pp.1615-1620, Septembre 2010 , N° 10602
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122725Methods to improve reliability of bulge test technique to extract mechanical properties of thin films
H.YOUSSEF, A.FERRAND, P.F.CALMON, P.PONS, R.PLANA
MINC, ICA, TEAM
Revue Scientifique : Microelectronics Reliability, Vol.50, N°9-11, pp.1888-1893, Septembre 2010 , N° 10581
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125408Characterization of Au/Au, Au/Ru and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology
A.BROUE, J.DHENNIN, F.COURTADE, C.DIEPPEDALE, P.PONS, X.LAFONTAN, R.PLANA
NOVAMEMS, CNES, CEA/LETI/MINATEC, MINC
Revue Scientifique : Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol.9, N°4, pp.041102-1-041102-8, Septembre 2010 , N° 10950
Lien : http://hal.archives-ouvertes.fr/hal-00624780/fr/
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Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact physics. Experimental measurements are obtained to characterize the response of a 5-μm2-square contact bump under electromechanical stress with increased applied current. The data provide a better understanding of microcontact behavior related to the impact of current at low- to medium-power levels. Contact temperature rise is observed, leading to shifts of the mechanical properties of contact materials and modifications of the contact surface. The stability of the contact resistance, when the contact force increases, is studied for contact pairs of soft (Au/Au contact), harder (Ru/Ru contact), and mixed material configuration (Au/Ru contact). An enhanced stability of the bimetallic contact Au/Ru is demonstrated, onsidering sensitivity to power increase related to creep effects and topological modifications of the contact surfaces. These results are compared to previous ones and discussed in a theoretical way by considering the temperature distribution around the hottest area at the contact interface.
60GHz wireless nano-sensors network for structure health monitoring as enabler for safer, greener aircrafts
D.DRAGOMIRESCU, M.KRAEMER, M. M.JATLAOUI, P.PONS, H.AUBERT, A.THAIN, R.PLANA
MINC, EADS Innovation Work
Revue Scientifique : Proceedings of SPIE. Advanced Topics in Optoelectronics Microelectronics and Nanotechnologies IV , Vol.7821, 78215p., Septembre 2010 , N° 10827
Lien : http://hal.archives-ouvertes.fr/hal-00591028/fr/
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The deployment of Wireless Sensors Network for Structure Health Monitoring will allow better maintenance of the aircraft and predictive diagnosis of the aircrafts in a long term approach. This paper presents our research on the design of wireless communicating nano-objects for Structure Health Monitoring in the aircrafts and the improvements bring by the nanotechnologies. The main challenges we address here are the design of ultra low power communicating circuits to enable high lifetime for the communicating nodes and their integration on flexible substrate to allow their deployment in difficult accessible places on the aircraft using conventional technologies. Other main issues are the choice of the communicating frequency which will allow a high number of communicating nodes in such a small area like the cabin of an aircraft and the choice of the network architecture.
3D heterogeneous integration of wireless communicating nano-sensors on flexible substrate
M. M.JATLAOUI, D.DRAGOMIRESCU, S.CHARLOT, P.PONS, H.AUBERT, R.PLANA
MINC, TEAM
Revue Scientifique : Proceedings of SPIE. Advanced Topics in Optoelectronics Microelectronics and Nanotechnologies IV , Vol.7821, 78211Ep., Septembre 2010 , N° 10826
Lien : http://hal.archives-ouvertes.fr/hal-00591024/fr/
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In this communication, the 3D heterogeneous integration of miniaturized communicating modules used for wireless network application is described. These communicating objects present the particularity of being in Nano-scale range. In fact, each object is composed of Nano-sensors, transceivers and E/R antenna. Such investigated ways of Nano-system integration will allow the development of sensor communicating modules which can be inserted and located in areas with access difficulty (in particular in non planar area) or even in inaccessible places. This attractive integration concept is discussed and illustrated here.
Heterogeneous integration of communicating nano-objects on flexible substrate
M. M.JATLAOUI, S.CHARLOT, D.DRAGOMIRESCU, P.PONS, H.AUBERT
TEAM, MINC
Manifestation avec acte : International Conference Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies (ATOM-N 2010), Constanta (Roumanie), 26-29 Août 2010, 4p. , N° 10494
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122365Wireless communicating nano-objects for structure health monitoring as enabler for safer, greener aircrafts
D.DRAGOMIRESCU, M.KRAEMER, M. M.JATLAOUI, P.PONS, H.AUBERT, A.THAIN, R.PLANA
MINC, EADS Innovation Work
Conférence invitée : International Conference Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies (ATOM-N 2010), Constanta (Roumanie), 26-29 Août 2010, 10p. , N° 10493
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122363A novel passive ultrasensitive RF temperature transducer for remote sensing and identification utilizing radar cross sections variability
T.THAI, F.CHEBILA, M. M.JATLAOUI, P.PONS, H.AUBERT, G.R.DEJEAN, M.M.TENTZERIS, R.PLANA
MINC, Microsoft Research, Georgia Institute
Manifestation avec acte : IEEE International Symposium on Antennas and Propagation (AP-S 2010), Toronto (Canada), 11-17 Juillet 2010, 4p. , N° 10432
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122436Pressure measurement from the RADAR interrogation of passive sensors
F.CHEBILA, M. M.JATLAOUI, P.PONS, H.AUBERT
MINC
Manifestation avec acte : IEEE International Symposium on Antennas and Propagation (AP-S 2010), Toronto (Canada), 11-17 Juillet 2010, 4p. , N° 10431
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122435Dielectric layers with gradual properties
K.MAKASHEVA, B.DESPAX, L.BOUDOU , G.TEYSSEDRE, L.RESSIER, P.PONS
LAPLACE, LGET, INSAT, LPCNO, MINC
Manifestation avec acte : IEEE International Conference on Solid Dielectrics (ICSD 2010), Potsdam (Allemagne), 4-9 Juillet 2010, 4p. , N° 10961
Lien : http://hal.archives-ouvertes.fr/hal-00670156
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Abstract
This work presents results from a study of thin dielectric layers organized in a structure that behaves as an unified layer with gradual properties. A better understanding of dielectric charging phenomena is aimed at in order to control the conductive properties of the multi-layer system. We first characterize each mono-layer deposited singly on a substrate before the characterization of our multi-layer system. The presented results are for the material and electrical properties of the layers. They are obtained from different diagnostic methods. It was found that such a concept allows modulation of the conductive properties of dielectric materials.