Laboratoire d’Analyse et d’Architecture des Systèmes
S.BOUAZIZ, P.PONS, H.AUBERT, A.TRAILLE, M.M.TENTZERIS
MINC, Georgia Institute
Manifestation avec acte : International Conference on Microwave and High Frequency Heating (AMPERE 2011), Toulouse (France), 5-8 Septembre 2011, 4p. , N° 11489
Diffusable
125348H.LIU, D.LERAY, P.PONS, S.COLIN, A.BROUE, J.MARTEGOUTTE, C.DIEPPEDALE
ICA, MINC, NOVAMEMS, CEA/LETI/MINATEC
Manifestation avec acte : Eurosensors XXV, Athènes (Grèce), 4-7 Septembre 2011, 4p. , N° 11858
Diffusable
127797U.ZAGHLOUL HEIBA, B.BHUSHAN, F.COCCETTI, P.PONS, R.PLANA
NLBB, MINC
Revue Scientifique : Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films , Vol.29, N°5, 051101p., Septembre 2011 , N° 11520
Diffusable
125493M. M.JATLAOUI, F.CHEBILA, P.PONS, H.AUBERT
MINC
Revue Scientifique : Instrumentation, Mesure, Métrologie, Vol.11, N°3-4, pp.67-88, Juillet 2011 , N° 11723
Diffusable
126338U.ZAGHLOUL HEIBA, B.BHUSHAN, P.PONS, G.J.PAPAIOANNOU, F.COCCETTI, R.PLANA
MINC, NLBB, Athenes
Revue Scientifique : Journal of Colloid and Interface Science, Vol.358, N°1, pp.1-13, Juin 2011 , N° 11287
Diffusable
124780T.THAI, H.AUBERT, P.PONS, E.TENTZERIS, R.PLANA
MINC
Manifestation avec acte : International Microwave Symposium (IMS 2011), Baltimore (USA), 5-10 Juin 2011, 4p. , N° 11786
Diffusable
126515U.ZAGHLOUL HEIBA, B.BHUSHAN, P.PONS, G.J.PAPAIOANNOU, F.COCCETTI, R.PLANA
NLBB, Athenes, MINC
Manifestation avec acte : International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS'11), Beijing (Chine), 5-9 Juin 2011, pp.2478-2481 , N° 11288
Diffusable
124782C.TRIGONA, N. DUMAS, P.PONS, L.LATORRE, P.NOUET
LIRMM, MINC
Revue Scientifique : Sensors and Actuators A: Physical, Vol.167, N°2, pp.422-432, Juin 2011 , N° 11459
Lien : http://hal-lirmm.ccsd.cnrs.fr/lirmm-00606232/fr/
Diffusable
Plus d'informations
This paper introduces the design of smart high-voltage CMOS drivers for electrostatic actuators. Smart must be understood as the capability of the driver to deliver the required voltage to close a MEMS switch and to diagnose whether the electrode moves well or not. This way, stuck or broken switches could be easily identified during operation. To implement such an online diagnosis, we propose to equip the driver architecture with a dedicated circuitry that can detect pull-in events. Pull-in corresponds to a rapid change of the actuation capacitance thus producing a charging current peak. The idea is therefore to monitor the charging current, and to track a current peak that could be small with respect to the current that charges parasitic capacitors. In this paper, we propose two different architectures to cancel parasitic capacitance effects. Both are introduced, studied by simulation and implemented on silicon. Complete demonstration is finally performed with an academic prototype of a MEMS switch.
C.VILLENEUVE, V.PUYAL, P.PONS, D.DRAGOMIRESCU, R.PLANA
MINC
Manifestation avec acte : Journées Nationales Microondes (JNM 2011), Brest (France), 18-20 Mai 2011, 4p. , N° 11182
Diffusable
124634M. M.JATLAOUI, D.DRAGOMIRESCU, S.CHARLOT, P.PONS, H.AUBERT, R.PLANA
MINC, TEAM
Manifestation avec acte : Journées Nationales Microondes (JNM 2011), Brest (France), 18-20 Mai 2011, 4p. , N° 11175
Diffusable
124633