73documents trouvés
Optimised dynamic temperature operating mode specifically dedicated to micromachined SnO2 gas sensors
F.PARRET, P.MENINI, A.MARTINEZ, K.SOULANTICA, A.MAISONNAT, B.CHAUDRET
LCC, TMN
Manifestation avec acte : EUROSENSORS XIX, Barcelone (Espagne), 11-14 Septembre 2005, 4p. , N° 05510
Diffusable
104577New dynamic operating mode for micromachined gas sensors: application to CO-detection in gas mixture
P.MENINI, F.PARRET, A.MARTINEZ, M.BAUMBACH, A.SCHUTZE, A.MAISONNAT, K.SOULANTICA, B.CHAUDRET
TMN, Saarland University, LCC
Rapport LAAS N°05511, Septembre 2005, 2p.
Diffusable
104578Nanosensoflex. Final report
P.MENINI, E.SCHEID, F.PARRET, H.CHALABI, C.TROPIS, A.MARTINEZ
TMN
Rapport de Contrat : Contrat Nanosensoflex GSRD CT 2002 00722, Septembre 2005, 30p. , N° 05518
Diffusable
104574Effect of grain size in sputtered tungsten trioxide thin films on the sensitivity to ozone
M.GILLET, K.AGUIR, M.BENDAHAN, P.MENINI
L2MP, TMN
Revue Scientifique : Thin Solid Films, Vol.484, N°1-2, pp.358-363, Juillet 2005 , N° 05053
Diffusable
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Abstract
Tungsten trioxide thin films have been deposited by reactive RF magnetron sputtering on SiO2/Si substrates with different oxygen partial pressure in the Ar-O2 gas mixture. After deposition, the oxide films were annealed in air at 400 °C during 1 h. The morphology and the structure were investigated by Atomic Force Microscopy and Transmission Electron Microscopy. The morphology and the porosity of post-growth annealed films are greatly affected by the oxygen pressure during deposition: the higher the oxygen pressure is, the lower the grain size is. Films with small grains have large roughness and porosity compared to the films with large grains. To investigate the WO3 films sensitivity to ozone, the electrical conductance was measured at various ozone concentration in the range from 0.03 to 0.8 ppm. The sensitivity of WO3 films to ozone depends on grain size and porosity: the sensitivity drastically decreases when the grain size increases.
Mots-Clés / Keywords
Sensors; Conductivity; Atomic Force Microscopy; Tungsten Oxide;
Détection de gaz polluants par l'analyse dynamique d'un bicapteur à base de SnO nanoparticulaire
F.PARRET, A.MARTINEZ, P.MENINI
M2D
Manifestations avec acte à diffusion limitée : 8èmes Journées Nationales du Réseau Doctoral de Microélectronique (JNRDM'2005), Paris (France), 10-12 Mai 2005, 3p. , N° 05746
Diffusable
108044Capteur de pression capacitif protégé contre les court-circuits
M.AL BAHRI, G.BLASQUEZ, P.PONS, P.MENINI
TMN
Revue Scientifique : Revue Internationale d'Héliotechnique, N°30, pp.39-41, Automne 2004 , N° 04694
Diffusable
103069CO response of a nanostructured SnO2 Gas sensor doped with palladium and platinum
P.MENINI, F.PARRET, M.GUERRERO, K.SOULANTICA, L.ERADES, A.MAISONNAT, B.CHAUDRET
TMN, LCC
Revue Scientifique : Sensors and Actuators B: Chemical, Issues 1-2, Vol.103, pp.111-114, 29 Septembre 2004 , N° 03477
Diffusable
102590New generation of micro machined silicon gas sensors: nano-structured Pd- and Pt-doped tin dioxide sensitive layers for the detection of hazardous gases
A.MAISONNAT, H.DELPRAT, M.BAUMBACH, A.SCHUTZE, F.CHENG, S.KELLY, F.PARRET, P.MENINI, K.SOULANTICA, B.CHAUDRET
MICROCHEMICAL, Saarland University, HULL, LCC, TMN
Manifestation avec acte : EUROSENSORS XVIII, Rome (Italie), 12-15 Septembre 2004, pp.636-637 , N° 04279
Diffusion restreinte
102566Novel mesoporous filters for selective gas absorption
M.BAUMBACH, A.SCHUTZE, F.CHENG, S.KELLY, H.DELPRAT, F.PARRET, P.MENINI, K.SOULANTICA, B.CHAUDRET, A.MAISONNAT
Saarland University, HULL, MICROCHEMICAL, TMN, LCC
Rapport LAAS N°04501, Septembre 2004, 4p.
Diffusable
102774Nanosensoflex midterm report
P.MENINI, E.SCHEID, F.PARRET, G.SARRABAYROUSE, A.MARTINEZ
TMN
Rapport de Contrat : Contrat Nanosensoflex GSRD CT 2002 00722, Décembre 2003, 13p. , N° 03366
Diffusion restreinte
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