90documents trouvés
Increasing the sensitivity and selectivity of metal oxide gas sensors by controlling the sensitive layer polarization
N.DUFOUR, Y.VEYRAC, P.MENINI, F.BLANC, C.TALHI, B.FRANC, C.GANIBAL, C.WARTELLE, K.AGUIR
MICA, I2C, IDEA, Technocentre Renault, IM2NP
Manifestation avec acte : IEEE SENSORS 2012 du 28 octobre au 31 octobre 2012, Taipei (Taiwan), Octobre 2012, 4p. , N° 12491
Lien : http://hal.archives-ouvertes.fr/hal-00732255
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Abstract
The effects of bias current on sensitivity and selectivity of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. While the working temperature is kept constant, it has been found that tuning the polarization of the MOX thin film induces changes on its sensitivity toward gases. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas and of the thin sensing film, meaning it is possible to enhance the selectivity by adjusting the polarization of different sensitive layers. This underutilized parameter provides a new way of improving easily gas sensors sensitivity and above all selectivity. It would then be interesting to polarize individually each sensor of a multi-sensor device in order to optimize the whole system performances, which may represent a breakthrough in the development of smart E-Nose.
La harpe laser à climats musicaux: un projet pluridisciplinaire de médiation scientifique par l'art
P.ARGUEL, A.BOUCHIER, L.COUTO-ROSADO, X.DOLLAT, J.FANCHON, B.FRANC, C.GANIBAL, F.LOZES-DUPUY, P.MARCOUL, A.MAUFFRET
PH, 2I, Ecole des Beaux Arts, COMMUNICATION
Manifestation avec acte : Colloque sur l'Enseignement des Technologies et des Sciences de l'Information et des Systèmes (CETSIS 2011), Trois Rivières (Canada), 23-26 Octobre 2011, 6p. , N° 11421
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126317Harpe lumineuse: notice technique. Contribution au 50ème anniversaire de la découverte du laser
P.ARGUEL, A.BOUCHIER, L.COUTO-ROSADO, X.DOLLAT, J.FANCHON, B.FRANC, C.GANIBAL, F.LOZES-DUPUY, P.MARCOUL, A.MAUFFRET
PH, Ecole des Beaux Arts, 2I, COMMUNICATION
Rapport LAAS N°11447, Juillet 2011, 32p.
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125167Solving functional reliability issue for an optical electrostatic switch
H.CAMON, C.GANIBAL, N.RAPAHOZ, M.TRZMIEL, C.PISELLA, C.MARTINEZ, K.GILBERT, S.VALETTE
N2IS, 2I, TRONIC'S, CEA/LETI/DOPT, CEA
Revue Scientifique : Microsystem Technologies, Vol.14, N°7, pp.919-923, Juillet 2008 , N° 07098
Lien : http://hal.archives-ouvertes.fr/hal-00257696/fr/
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Abstract
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electro-statically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.
Mots-Clés / Keywords
Design and test techniques for MEMS;
LEGO process for mixed power applications: fabrication at low cost of localized thick SOI layers
I.BERTRAND, J.M.DILHAC, P.RENAUD, M.BAFLEUR, C.GANIBAL
ISGE, FREESCALE, 2I
Manifestation avec acte : 211th Meeting of the Electrochemical Society (ESC 2007), Chicago (USA), 6-11 Mai 2007, pp.327-332 , N° 07030
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110122Solving functional reliability issue for an optical electrostatic switch
H.CAMON, C.GANIBAL, N.RAPAHOZ, M.TRZMIEL, C.PISELLA, C.MARTINEZ, K.GILBERT, S.VALETTE
N2IS, 2I, TRONIC'S, CEA/LETI/DOPT, CEA
Manifestation avec acte : Symposium on Design, Test, Integration Packaging of MEMS/MOEMS (DTIP'2007), Stresa (Italie), 25-27 Mai 2007, pp.246-250 , N° 07098
Lien : http://hal.archives-ouvertes.fr/hal-00257696/fr/
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Abstract
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electro-statically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.
Mots-Clés / Keywords
Design and test techniques for MEMS;
Advantages of alternative actuating signal for MEMS actuators
H.CAMON, C.GANIBAL
MIS, 2I
Revue Scientifique : Sensors and Actuators A: Physical, Vol.A136, N°1, pp.299-303, Mai 2007 , N° 06769
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109820Détecteur de gaz. Conception et réalisation d'un module portatif
F.BLANC, D.LAGRANGE, D.MEDALE, P.MARCOUL, C.GANIBAL, P.MENINI
2I, M2D
Rapport LAAS N°07069, Février 2007, 38p.
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109260Réalisation d'un commutateur optique espace libre à base de MEMS digitaux
C.MARTINEZ, K.GILBERT, S.VALETTE, N.RAPHOZ, M.TRZMIEL, C.PISELLA, H.CAMON, C.GANIBAL, T.ZAMI, M.PRUNAIRE
CEA/LETI/DOPT, CEA, TRONIC'S, MIS, 2I, ALCATEL
Manifestations avec acte à diffusion limitée : 25èmes Journées Nationales d'Optique Guidée (JNOG'2006), Metz (France), 7-9 Novembre 2006, pp.418-420 , N° 06464
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108300Filière technologique CMOS/LIGBT/bipolaires/LDMOS à isolation diélectrique enterrée localisée obtenue par la technique LEGO
H.GRANIER, I.BERTRAND, B.ROUSSET, M.BAFLEUR, J.M.DILHAC, L.BOUSCAYROL, C.GANIBAL, P.DUBREUIL
TEAM, ISGE, 2I
Rapport LAAS N°06187, Mars 2006, 84p.
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