99documents trouvés
Study of a highly localized activated carbon deposition process using inkjet printing technology
V.CONEDERA, F.MESNILGRENTE, M.BRUNET, M.BORELLA, N.FABRE
TEAM, ISGE, Altatech Semicond.
Manifestation avec acte : Journées Nationales sur les Technologies Emergentes en Micro-nanofabrication, Toulouse (France), 19-21 Novembre 2008, 2p. , N° 08629
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Abstract
An activated carbon deposition technique based on inkjet printing is proposed for the fabrication of supercapacitors electrodes. By mastering the activated carbon suspension in ethylene glycol through use of a surfactant and by utilizing a substrate treatment with OTS, 10¼m wide structures have been obtained with 50¼m ink jet nozzles.
Surface micromachining technology with two SU-8 structural layers and sol-gel, SU-8 or SiO2/sol-gel sacrificial layers
V.CONEDERA, L.SALVAGNAC, N.FABRE, F.ZAMKOTSIAN, H.CAMON
TEAM, LAM Marseille, MIS
Revue Scientifique : Journal of Micromechanics and Microengineering, Vol.17, N°8, pp.N52-N57, Juillet 2007 , N° 07303
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Abstract
The development reported herein is that of a surface micromachining technology using two SU-8 layers as a structural material. Three different processes are presented and discussed: the first process makes use of a solgel as the sacrificial layer; the second process utilizes the SU-8 itself as the sacrificial layer; the third process utilizes silicon dioxide as the first sacrificial layer and the solgel as the second sacrificial layer. These three processes are adapted for one structural layer structure. With a two-layer structure and when release is long, the third process is more adapted.
Electrostatic micro-deformable mirror for adaptive optics: development and control-command
F.ZAMKOTSIAN, V.CONEDERA, EGENDRON, P.LANZONI, N.FABRE
LAM Marseille, TEAM, LESIA
Manifestation avec acte : Adaptive Optics: Analysis and Methods, Vancouver (Canada), 18-20 Juin 2007, 3p. , N° 07183
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MOEMS-based electrostatic micro-deformable mirrors (MDM) are promising for future AO systems. Original complete polymer mirrors have been designed and realized. Specific control-command strategy is presented and tested; electrostatic MDM are well-suited for open-loop operation.
Electrostatic polymer-based micro-deformable mirror for adaptive optics
F.ZAMKOTSIAN, V.CONEDERA, H.GRANIER, A.LIOTARD, P.LANZONI, L.SALVAGNAC, N.FABRE, H.CAMON
LAM Marseille, TEAM, MIS
Manifestation avec acte : SPIE Conference, MEMS Adaptive Optics, San José (USA), 20-25 Juin 2007, 12p. , N° 07185
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Abstract
Future adaptive optics (AO) systems require deformable mirrors with very challenging parameters, up to 250 000 actuators and inter-actuator spacing around 500 &mgr;m. MOEMS-based devices are promising for the development of a complete generation of new deformable mirrors. Our micro-deformable mirror (MDM) is based on an array of electrostatic actuators with attachments to a continuous mirror on top. The originality of our approach lies in the elaboration of layers made of polymer materials. Mirror layers and active actuators have been demonstrated. Based on the design of this actuator and our polymer process, realization of a complete polymer-MDM has been done using two process flows: the first involves exclusively polymer materials while the second uses SU8 polymer for structural layers and SiO2 and sol-gel for sacrificial layers. The latest shows a better capability in order to produce completely released structures. The electrostatic force provides a non-linear actuation, while AO systems are based on linear matrices operations. Then, we have developed a dedicated 14-bit electronics in order to "linearize" the actuation, using a calibration and a sixth-order polynomial fitting strategy. The response is nearly perfect over our 3×3 MDM prototype with a standard deviation of 3.5 nm; the influence function of the central actuator has been measured. First evaluation on the cross non-linarities has also been studied on OKO mirror and a simple look-up table is sufficient for determining the location of each actuator whatever the locations of the neighbor actuators. Electrostatic MDM are particularly well suited for open-loop AO applications.
Mots-Clés / Keywords
Micro-deformable mirror; Polymer materials; High-order perturbation correction; Adaptive optics; Open-loop driving;
Etude de couches sacrificielles polymères pour la réalisation de MEMS
V.CONEDERA, L.SALVAGNAC, J.C.MARROT, S.PINAUD, L.MAZENQ, J.B.DOUCET, N.FABRE
TEAM
Rapport LAAS N°07190, Mars 2007, 24p.
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109940Les technologies alternatives ou de substitution
V.CONEDERA, N.FABRE, H.TAP
TEAM, OSE
Rapport LAAS N°06709, Octobre 2006, 6p.
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108206MOEMS devices for future astronomical instrumentation in space
F.ZAMKOTSIAN, A.LIOTARD, P.LANZONI, K.ELHADI, S.WALDIS, W.NOELL, N.F.DE ROOIJ, V.CONEDERA, N.FABRE, S.MURATET, H.CAMON
IMT Neuchâtel, TEAM, MIS, LAM Marseille
Manifestation avec acte : International Conférence on Space Optics (ICSO 2006), Noordwijk (Pays-Bas), 27-30 Juin 2006, 6p. , N° 06237
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109921Electrostatic polymer-based micro-deformable mirror for adaptive optics
F.ZAMKOTSIAN, V.CONEDERA, H.GRANIER, A.LIOTARD, P.LANZONI, L.SALVAGNAC, N.FABRE, H.CAMON
LAM Marseille, TEAM, MIS
Manifestation avec acte : SPIE Conference on Astronomical Telescopes and Instrumentation (SPIE 6272), Orlando (USA), 24-31 Mai 2006, 12p. , N° 06238
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109923Polymer-based micro deformable mirror for adaptive optics
A.LIOTARD, F.ZAMKOTSIAN, V.CONEDERA, N.FABRE, P.LANZONI, H.CAMON, F.CHAZALLET
TEAM, MIS, Shaktiware, LA Marseille
Manifestation avec acte : Conference on "MEMS/MOEMS Components and their Applications III". SPIE MOEM-MEMS 2006, San Jose (USA), 21-26 Janvier 2006, 12p. , N° 05700
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105874SU-8 technology for free-standing structures in optical and fluidic MEMS
P.ABGRALL, H.CAMON, V.CONEDERA, N.FABRE, A.M.GUE
MIS, TEAM
Manifestation avec acte : International Conference on Micro, Electro-Mechanical, Opto & Nano Systems (MICRO SYSTEM Technologies 2005), Munich (Allemagne), 5-6 Octobre 2005, pp.40-47 , N° 05409
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