Laboratoire d’Analyse et d’Architecture des Systèmes
J.BALLET, R.LEGUERRE, D.DELABOUGLISE, F.OLIVIE, G.SARRABAYROUSE, L.PONT
TMN, OLC, LEPMI
Manifestation avec acte : 3rd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics (POLYTRONIC'2003), Montreux (Suisse), Octobre 2003, pp.267-270 , N° 03488
Diffusable
101436K.KASSMI, A.AZIZ, F.OLIVIE, J.BALLET, G.SARRABAYROUSE, A.MARTINEZ
TMN, LEAA
Rapport LAAS N°03444, Septembre 2003, 30p.
Diffusable
101333A.AZIZ, K.KASSMI, F.OLIVIE, J.BALLET, Ka.KASSMI, G.SARRABAYROUSE, A.MARTINEZ
TMN, LEAA, Université Mohamed 1
Rapport LAAS N°03559, Septembre 2003, 32p.
Diffusable
101580K.KASSMI, A.AZIZ, F.OLIVIE, J.BALLET, G.SARRABAYROUSE, A.MARTINEZ
LEAA, TMN
Rapport LAAS N°03443, Juillet 2003, 37p.
Diffusable
101332R.LEGUERRE, D.DELABOUGLISE, F.OLIVIE, J.BALLET, G.SARRABAYROUSE
OLC, LEPMI, TMN
Manifestations avec acte à diffusion limitée : Colloque "Dispositifs Electroniques Organiques" (DIELOR), Nantes (France), 6-8 Novembre 2002 (Résumé) , N° 02526
Diffusable
100261R.LEGUERRE, D.DELABOUGLISE, F.OLIVIE, J.BALLET, G.SARRABAYROUSE
OLC, LEPMI, TMN
Manifestations avec acte à diffusion limitée : 9èmes Journées Nationales Microélectronique Optoélectronique (JNMO'2002), St Aygulf (France), 29 Septembre - 2 Octobre 2002 (Résumé) , N° 02378
Diffusable
53700M.BENZOHRA, F.OLIVIE, M.IDRISSI BENZOHRA, K.KETATA, M.KETATA
TMN, LEMI
Revue Scientifique : Nuclear Instruments and Methods in Physics Research B, Issue 2, Vol.187, pp.201-206, Février 2002 , N° 02058
Diffusable
50517B.COLOMBEAU, F.CRISTIANO, F.OLIVIE, C.AMAND, G.BEN ASSAYAG, A.CLAVERIE
TMN, INSAT, CEMES/CNRS
Revue Scientifique : Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , Vol.186, N°1-4, pp.276-280, Janvier 2002 , N° 01621
Diffusable
Plus d'informations
In this paper, we study the effect of the Ge+ preamorphization dose on boron diffusion and on the thermal evolution of end of range (EOR) defects during annealing. Amorphizations were carried out by implanting Ge+ at 150 keV to doses ranging from 1×1015 to 8×1015 ions/cm2. Boron was subsequently implanted at 3 keV with a dose of 1×1014 ions/cm2. Rapid thermal annealing (RTA) was performed for various time/temperature combinations in nitrogen ambient. Secondary ion mass spectroscopy (SIMS) and transmission electron microscopy (TEM) were used to study boron diffusion and defect evolution, respectively. We have found that after a given annealing, both the defect size and boron diffusivity are independent on the Ge ion dose. Increasing this dose only results in an increase of the defect density. These results are discussed and definitely show that EOR defects are involved in a quasi-conservative Ostwald ripening process during annealing. The diffusive behavior of boron suggests that the coupling of boron atoms with the mean field of Si interstitial atoms in dynamical equilibrium with the defects is responsible for transient enhanced diffusion (TED).
A.DUSCH, J.MARCON, K.KETATA, F.OLIVIE, M.BENHZORA, M.KETATA
LEMI, TMN
Manifestations avec acte à diffusion limitée : 5th International Workshop on Expert Evaluation & Control of Compound Semiconductor Materials & Technologies (EXMATEC'2000), Heraklion (Grèce), 21-24 Mai 2000, 10p. , N° 00638
Diffusable
50796L.JALABERT, P.TEMPLE BOYER, F.OLIVIE, G.SARRABAYROUSE, F.CRISTIANO, B.COLOMBEAU
TMN, CEMES/CNRS
Revue Scientifique : Microelectronics Reliability, Vol.40, N°4/5, pp.597-600, Avril/Mai 2000 , N° 99321
Diffusable
39143