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Increasing the sensitivity and selectivity of metal oxide gas sensors by controlling the sensitive layer polarization
N.DUFOUR, Y.VEYRAC, P.MENINI, F.BLANC, C.TALHI, B.FRANC, C.GANIBAL, C.WARTELLE, K.AGUIR
MICA, I2C, IDEA, Technocentre Renault, IM2NP
Manifestation avec acte : IEEE SENSORS 2012 du 28 octobre au 31 octobre 2012, Taipei (Taiwan), Octobre 2012, 4p. , N° 12491
Lien : http://hal.archives-ouvertes.fr/hal-00732255
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Abstract
The effects of bias current on sensitivity and selectivity of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. While the working temperature is kept constant, it has been found that tuning the polarization of the MOX thin film induces changes on its sensitivity toward gases. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas and of the thin sensing film, meaning it is possible to enhance the selectivity by adjusting the polarization of different sensitive layers. This underutilized parameter provides a new way of improving easily gas sensors sensitivity and above all selectivity. It would then be interesting to polarize individually each sensor of a multi-sensor device in order to optimize the whole system performances, which may represent a breakthrough in the development of smart E-Nose.
Description technique d'utilisation du banc de mesure capteurs de gaz
C.TALHI, N.DUFOUR, F.BLANC, P.MENINI
2I, M2D
Rapport LAAS N°11696, Décembre 2011, 21p.
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