67documents trouvés
Micro et Nanofluidique: une technologie transversale à fort potentiel applicatif
A.M.GUE, A.BOUKABACHE, P.JOSEPH, A.BANCAUD
N2IS
Ouvrage (contribution) : La Micro-Nanoélectronique. Enjeux et mutation, N°ISBN 978-2-271-06829-3, Janvier 2009, pp.243-248 , N° 09038
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116490Development of flexible polymer lab on chip integrating microelectromagnets for microbeads manipulation
R.FULCRAND, D.JUGIEU, C.ESCRIBA, D.BOURRIER, P.ARTILLAN, A.BOUKABACHE, J.Y.FOURNIOLS, A.M.GUE
TEAM, N2IS, ISGE, M2D
Manifestation avec acte : 1st European Conference on Microfluidics (MicroFlu'08), Bologne (Italie), 10-12 Décembre 2008, 9p. , N° 08729
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Mots-Clés / Keywords
Microfluidics; Microinductor; Magnetic field; SU-8; Modeling;
Thermal behaviour of an N-doped silicon resistor
F.KERROUR, A.BOUKABACHE, P.PONS
M2D
Manifestation avec acte : 2nd International Conference on Electrical Engineering Design and Technologies (ICEEDT'08), Hammamet (Tunisie), 8-10 Novembre 2008, 10p. , N° 07140
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Mots-Clés / Keywords
Silicon; TCRs; Mobility; Doping; Temperature;
Integrated planar micro-inductor for traping biological species in a lab-on-chip microsystem
C.ESCRIBA, R.FULCRAND, P.ARTILLAN, L.GAO, A.BOUKABACHE, A.M.GUE, J.Y.FOURNIOLS
ISGE, N2IS, MIS, M2D
Manifestation avec acte : 16th IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SoC 2008), Rhodes (Grèce), 13-15 Octobre 2008, pp.421-424 , N° 08563
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115574Low-stress fabrication of 3D polymer free standing structures using lamination of photosensitive films
P.ABGRALL, S.CHARLOT, R.FULCRAND, P.LEFILLASTRE, A.BOUKABACHE, A.M.GUE
TEAM, M2D, N2IS
Revue Scientifique : Microsystem Technologies, Vol.14, N°8, pp.1205-1214, Août 2008 , N° 07768
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Abstract
Free-standing microstructures such as cantilevers, membranes or microchannels are building blocks of microfluidic systems and MEMS. As a complement to silicon, the large family of polymers offers many opportunities for micro and nanotechnologies. Their low temperature processing and the planarizing properties of many resists is a definitive advantage for system integration, paving the way to complete lab-on-chips. In this article, we investigate a fabrication process of polymeric free standing structures based on the lamination of SU-8, a thick epoxy photoresist. Our motivation is the hybrid integration of polymer microfluidic or MEMS components with silicon chips (e.g., integrated circuits or sensors). Compared to rigid substrates used in more conventional SU-8/SU-8 bonding process, the flexible photosensitive films used within this lamination technique allows a more homogeneous and reliable bonding at low pressure and temperature, and a 3D fabrication with an excellent levelto- level alignment. A parametric optimization of the lamination process is presented. The fabrication of a leakage-free 3D microfluidic network is demonstrated by stacking up to five layers. A polyethylene terephtalate layer has been employed to easily release the SU-8 devices. We show that this release layer also significantly decrease the curvature of the substrate by 32% and the related residual stress in a 100 lm SU-8 layer by at least 10%. Finally, we briefly describe the hybrid integration of a silicon sensor in a microfluidic network as a direct application of our lamination process to the fabrication of lab-on-chips.
Functionalized SU8 layers for manipulating bio-chemical species in microfluidic networks
G.TEYSSIER, A.BOUKABACHE, A.M.GUE, J.B.DOUCET
MIS, M2D, TEAM
Manifestation avec acte : 1st French-Chinese Symposium on Microfluidics, Beijing (Chine), 29 Octobre - 2 novembre 2007, 2p. , N° 07371
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Mots-Clés / Keywords
SU-8; Functionalisation; Contact angle; Chemical treatment; Plasma O2;
Development of a compatible lamination method for the fabrication of SU8 microfluidic devices
R.FULCRAND, A.BOUKABACHE, A.M.GUE, V.CONEDERA
MIS, M2D, TEAM
Manifestation avec acte : 1st French-Chinese Symposium on Microfluidics, Beijing (Chine), 29 Octobre - 2 Novembre 2007, 2p. , N° 07372
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Mots-Clés / Keywords
SU-8; Lamination; Microfluidics; Stress;
A multi-stage microfluidic network realized by laminated SU-8 films
R.FULCRAND, A.BOUKABACHE, A.M.GUE, V.CONEDERA
MIS, M2D, TEAM
Manifestation avec acte : 18th Workshop on MicroMechanics Europe (MME 2007), Guimaraes (Portugal), 16-18 Septembre 2007, pp.63-66 , N° 07374
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Mots-Clés / Keywords
Microfluidics; SU-8; Layers; Channels; MEMS; Stress; Lamination;
Modélisation analytique du champ magnétique généré par une bobine à enroulement plan
C.ESCRIBA, P.ARTILLAN, A.M.GUE, A.BOUKABACHE, J.SUDOR, C.ALONSO, B.ESTIBALS
MIS, ISGE, M2D
Rapport LAAS N°07127, Mars 2007, 13p.
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109543Développement d'une technologie hybride 3D pour l'intégration de puces actives en silicium dans les microsystèmes fluidiques polymères
S.CHARLOT, A.M.GUE, J.TASSELLI, A.MARTY, P.ABGRALL, A.BOUKABACHE, D.ESTEVE
TEAM, MIS, M2D
Manifestations avec acte à diffusion limitée : 3ème Congrès Français de Microfluidique, Toulouse (France), 12-14 Décembre 2006, 4p. , N° 06548
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