12documents trouvés
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
H.DUROU, D.PECH, D.COLIN, P.SIMON, P.L.TABERNA, M.BRUNET
N2IS, ISGE, TEAM, CIRIMAT
Revue Scientifique : Microsystem Technologies, Vol.18, N°4, pp.467-473, Avril 2012 , N° 11646
Diffusable
127009Protocole de découpe de substrats par scie diamantée
S.CHARLOT, M.DILHAN, D.COLIN
TEAM
Rapport LAAS N°12149, Mars 2012, 18p.
Diffusable
126871Make carbon nanotube-PMMA composite thin: application to water quality
C.VILLENEUVE, S.PACCHINI, M.DILHAN, D.COLIN, A.BROUZES, P.BOULANGER, R.PLANA
MINC, TEAM, CEA Saclay
Manifestation avec acte : MRS Spring Meeting and Exhibit, San Francisco (USA), 25-29 Avril 2011, 1p. , N° 11221
Diffusable
124546Carbon nanotube-PMMA composite thin: application to water quality
C.VILLENEUVE, S.PACCHINI, J.BAILLIEUX, M.DILHAN, D.COLIN, A.BROUZES, P.BOULANGER, R.PLANA
MINC, TEAM, CEA Saclay
Manifestation avec acte : Colloque annuel du GDR-I GNT : Graphène et Nanotubes, Dourdan (France), 7-10 Février 2011, 1p. (Résumé) , N° 11024
Diffusable
123904Temporary adhesives for wafer bonding: deep reactive ion etching application
D.BELHARET, P.DUBREUIL, D.COLIN, L.MAZENQ, H.GRANIER
TEAM
Manifestation avec acte : European Microelectronics and Packaging Conference (EMPC 2009, Rimini (Italie), 15-18 Juin 2009, 7p. , N° 09411
Diffusable
118334Fabrication an simulation of a PZT energy scavenging MEMS
G.A.ARDILA RODRIGUEZ, H.DUROU, L.OURAK, D.COLIN, C.ROSSI, C.BAUD, J.Y.FOURNIOLS
N2IS, TEAM, MIS
Manifestation avec acte : 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2008), Sendai (Japon), 9-12 Novembre 2008, pp.193-196 , N° 08367
Diffusable
Plus d'informations
Mots-Clés / Keywords
Energy harversting; MEMS; FEM modeling; PZT;
Single used, robust, MEMS based electro-thermal micro switches for redundancy and system reconfiguration
P.PENNARUN, C.ROSSI, D.ESTEVE, D.COLIN
MIS, TEAM
Revue Scientifique : Sensors and Actuators A: Physical, Vol.A136, N°1, pp.273-281, Mai 2007 , N° 06436
Lien : http://hal.archives-ouvertes.fr/hal-00150266
Diffusable
Plus d'informations
Abstract
A new type of one-shot MEMS based thermal micro switch is described and its performance results are presented. The device consists in mechanically breaking a metallic line or locally soldering two metallic lines. The switching between the two stable states (on or off) is accomplished by a current pulse through an integrated heater underneath the electrical lines needed to be interrupted or connected. Some key features are summarized as follows: switches are bistable, integratable and IC compatible. They are compatible with low voltage operation (5V), no contact resistance (0 © for the on-off and ~0.008© for the off-on); they are low energy consumption during switching (3.5mJ for on-off and 130mJ for off-on); switching current is between 10 and 20mA for on-off and between 50-70mA for off-on concept. The minimum switching pulse width is 7ms and 300ms for the on-off and off-on concept respectively; operation may be possible in ambient environment; lifetime expected is very long and both switches can therefore address long life system. Batch fabrication using planar processing methods are used.
Development of pNH4-ISFETs microsensors for water analysis
I.HUMENYUK, B.TORBIERO, S.ASSIE-SOULEILLE, D.COLIN, X.DOLLAT, B.FRANC, A.MARTINEZ, P.TEMPLE BOYER
TMN, 2I, TEAM, M2D
Revue Scientifique : Microelectronics Journal, Vol.37, N°6, pp.475-479, Juin 2006 , N° 04185
Diffusable
106400OPTONANOGEN. An integrated opto-nanomechanical biosensor for functional genomic analysis
T.CAMPS, C.VERGNENEGRE, V.BARDINAL, C.BRINGER, C.AMAT, D.RAMIS, J.B.DOUCET, X.DOLLAT, H.GRANIER, P.DUBREUIL, D.COLIN, P.F.CALMON, C.FONTAINE
PH, 2I, LCIP2, TEAM
Rapport de Contrat : Optonanogen. Project IST-200137239, Décembre 2005, 29p. , N° 05695
Non diffusable
105478Développements des microcapteurs chimiques ChemFETs pour les applications en hémodialyse
P.TEMPLE BOYER, W.SANT, M.L.POURCIEL, I.HUMENYUK, B.TORBIERO, A.MARTINEZ, T.DO CONTO, D.COLIN, J.B.DOUCET, B.ROUSSET, S.ASSIE-SOULEILLE, B.FRANC, D.LAGRANGE
TMN, TEAM, 2I
Rapport de Contrat : Contrat Région DAER recherche N° 03001210, Mars 2005, 14p. , N° 05152
Diffusable
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