794documents trouvés
Three dimensional confinement inIII-V photonic devices with combined oxidation and epitaxial regrowth
F.CHOUCHANE, G.ALMUNEAU, O.GAUTHIER-LAFAYE, A.ARNOULT, P.BOONPENG, G.LACOSTE, C.FONTAINE
PH, TEAM, Chulalongkorn Univ
Manifestation avec acte : E-MRS Spring Meeting 2012, Strasbourg (France), 14-18 Mai 2012, 1p. (Résumé) , N° 12321
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127561Towards free-engineered areas of buried dielectric AlOx in III-V structures
F.CHOUCHANE, G.ALMUNEAU, O.GAUTHIER-LAFAYE, A.ARNOULT, G.LACOSTE, C.FONTAINE
PH, TEAM
Manifestation avec acte : Site Controlled Epitaxy Workshop, Heraklion (Grèce), 30 Avril 2012, 1p. (Résumé) , N° 12319
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127557Development of UV-nanoimprint lithography for GaAs nanostructures using soft mold
H.MAKHLOUFI, E.DARAN, C.FONTAINE
PH, TEAM
Manifestation avec acte : Epitaxy and Structural Analysis of III-V-N-Semiconductor Nanostructures, Heraklion (Grèce), 29 Avril - 2 Mai 2012, 2p. , N° 12235
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127187High angular tolerance and reflectivity with narrow bandwidth cavity-resonator integrated guided-mode resonance filter
X.BUET, E.DARAN, D.BELHARET, F.LOZES-DUPUY, A.MONMAYRANT, O.GAUTHIER-LAFAYE
PH, TEAM
Revue Scientifique : Optics Express, Vol.20, N°8, pp.9322-9327, Avril 2012 , N° 12220
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127096Development of pH-based enzymatic field effect transistors for the glutamate ion detection
L.DJEGHLAF, A.DIALLO, L.MAZENQ, C.SALLES, P.MIELLE, G.FERON, J.LAUNAY, P.TEMPLE BOYER
MICA, TEAM, CSGA
Rapport LAAS N°12200, Avril 2012, 27p.
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127025Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy
H.DUROU, D.PECH, D.COLIN, P.SIMON, P.L.TABERNA, M.BRUNET
N2IS, ISGE, TEAM, CIRIMAT
Revue Scientifique : Microsystem Technologies, Vol.18, N°4, pp.467-473, Avril 2012 , N° 11646
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127009Polymer tunable microlens arrays suitable for VCSEL beam control
B.REIG, V.BARDINAL, T.CAMPS, Y.BOUCHER, C.LEVALLOIS, J.B.DOUCET, D.BOURRIER, E.DARAN, J.LAUNAY
N2IS, UEB, INSA Rennes, TEAM, MICA
Manifestation avec acte : Photonics Europe 2012, Bruxelles (Belgique), 16-19 Avril 2012, 11p. , N° 12148
Lien : http://hal.archives-ouvertes.fr/hal-00725891
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Abstract
We report on a simple method for the collective fabrication of polymer tunable microlens arrays suitable for VCSEL active beam shaping. Its principle is based on a SU-8 suspended membrane, surmounted by a polymer microlens, and thermally actuated to achieve a vertical displacement of lens plane. SU-8 resist presents many advantages for MOEMS fabrication, as this resist allows for high aspect ratio patterns and high transparency. In addition, it exhibits a thermal expansion coefficient suitable for thermal actuation. Moreover, this kind of polymer MOEMS can be fabricated on VCSEL arrays with footprints as low as 500x500 µm² enabling a rapid, low cost and wafer-scale integration technology. We have successfully fabricated this MOEMS on a glass substrate by means of a SU-8 double exposure method and we report on a vertical displacement of 8 µm under an applied power of 43mW (3V). A good agreement with the theoretical thermo-mechanical behavior is found. Moreover, optical measurements of microlens focus displacement under actuation are presented. We evaluate analytically the focus properties of the system under coherent laser illumination, using the classical ABCD matrix formalism of Gaussian transformation optics. The same approach enables one to assess its tolerance to opto-geometrical parameters, such as refractive index or dioptre curvature. As a wide range of initial gaps between the membrane and the substrate can be chosen, this MOEMS technology opens new insights for dynamic control of VCSEL beam or for tunable VCSELs fabrication.
Long-life insulating layers for integrated microelectrodes
E.VANHOVE, L.BOUSCAYROL, R.NAVAL, A.GERARD, M.ZOUARI, V.CONEDERA, J.LAUNAY, P.TEMPLE BOYER
MICA, TEAM
Manifestation avec acte : Spring Meeting of the International Society of Electrochemistry, Perth (Australie), 15-18 Avril 2012, 1p. , N° 12005
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127239Microtechnologies in favour of the analytical electrochemistry and vice-versa
C.CHRISTOPHE, V.CONEDERA, J.LAUNAY, P.GROS, E.QUESTEL, P.TEMPLE BOYER
MICA, TEAM, LGC, FABRE
Manifestation avec acte : Spring Meeting of the International Society of Electrochemistry, Perth (Australie), 15-18 Avril 2012, 1p. , N° 12009
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127240Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system
A.MARTINEZ RIVAS, F.CARCENAC, D.SAYA, C.SEVERAC, L.NICU, C.VIEU
NBS, TEAM
Revue Scientifique : Nanotechnology, Vol.23, N°10, 105302p., Mars 2012 , N° 12159
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