Polymer micro-optics for VCSEL photonic integration

Contact: V. Bardinal

VCSELs constitute now strategic light sources for optical communications as well as for instrumentation or sensing applications. Despite a limited far-field beam divergence, these sources have more and more to be associated with micro-optical components to enhance their performances or to increase their integration in systems. In this context, we have developed a new deposition technique based on a microcantilever-based spotter to fabricate polymer microlenses array. Spherical microlenses with good optical quality were demonstrated with a home-made thermocurable epoxy polymer (collaboration TONA-IR-VUB). Microlenses sizes achievable with this novel method were shown to be well suited for VCSEL beam collimation. In order to integrate such microlenses onto VCSEL devices, uniform thick SU-8 pedestals implementing different geometries and sizes were fabricated and their influence on the deposited microlenses was studied. A cylindrical shape was found to be the best suited to ensure a self-alignment of the polymer droplets on top of the pedestal. The application of this method to the monolithic integration of self-aligned polymer refractive microlenses on VCSELs has led to a significant reduction of the initial beam divergence (in the range [1-4°]). The thermal reliability of these microlenses is now under study in collaboration with CIRIMAT laboratory and EADS Astrium (FIAB SU-8 project).


Microscope image of an array of cylindrical pedestals of various diameters [30-140µm] with self-aligned microlenses deposited on their surfaces. Insert: SEM image of a microlens integrated on a VCSEL device.

Self-aligned polymer microtips


We have fabricated self-aligned microtips on VCSEL devices using novel near infra-red photopolymers sensitive to the laser wavelength. (NIR Optics project : collaboration with IS2M Mulhouse and LNIO Troyes). This approach is totally compatible with a post-processing process. Using this method, a focusing effect has been observed on a lens self-formed on a singlemode VCSEL operating at 760nm. Potential applications concern the development of novel types of optical probes for near-field optics or high density optical data storage.

Polymer microtip self-written at the centre of a singlemode VCSEL by NIR self- photopolymerization.
(V. Bardinal et al, Appl. Phys. Lett. 96, 2010)