Microdevices

To fabricate microdevices, a number of materials, processes and technological platforms have to be developed. This work accounts for about one half of the M2D group’s activity which is devoted to silicon and polymer technologies. Use is therefore made of the means available at the technological facility of LAAS-CNRS in collaboration with the engineers and technicians of the TEAM department. Work is also performed in collaboration with the researchers of CNRS and of universities, to handle at best our respective knowledge, skills and means available.

Ongoing work on processes focuses primarily on the synthesis of materials whose composition and chemico-physical properties meet the specifications of the various microdevices developed. With respect to the materials originating from the silicon process, they are synthesized using thermal processes, low-pressure physical or chemical vapour deposition, ionic implantation and thermal activation,... As to polymer materials, they are integrated using microlithographic techniques (photolithography, micromoulding, ink jet printing,…). All this is done with the purpose of comprehending the chemico-physical mechanisms involved. Among other things, their applications pool together ultra-thin junctions, the control of mechanical constraints in microstructures, filling up trenches, integration of (bio)chemically sensitive materials or microstructuring.

Secondly, ongoing work is also carried out on the development of different microdevice technological platform. By "technological platform" we mean a set of technological processes implemented in accordance with a certain recipe in order to achieve joint fabrication of batches ranging from a few tens to thousands of units. Three platforms are being devised within the M2D group. They address field effect transistors (FETs), electromechanical microstructures (MEMS) like thin membranes, microbridges and microbeams, as well as micro-impedances/microelectrodes. They are used in a variety of applications for microdevices and other microsystems and more particularly for detection microsystems.