Microwave Devices and Circuits
|
Microwave Devices and Circuits |
   |
| The bad insulation properties of silicon
can be circumvented by designing microwave circuits on membranes micromachined on bulk
silicon. Passive millimeter wave circuits have already been successfully designed and
tested. Active circuit design is now in progress.
Figure : a 35 GHz DRO feedback oscillator. The feedback loop is made through a DRO inserted between two micromachined silicon coplanar waveguide lines. |
|
Last modification:
