Characterization



The means of characterization in clean room allow studies and validation of the different step of process for component’s realization. This means are in free service after training.
The characterizations of finished component are doing on the electrical characterization area.





Means of Charactérization



AFM with force, thermal and electrical module



Dual Beam (SEM + FIB) FEI Hélios 600i



SEM Hitachi S4800 and MEBS3700N



Mecanic profilmeter KLA Tencor
P15 et P16+




Optical profilmeter Veeco




Ellipsometer Horiba Jobin Yvon




Resistivity meter



Contact angle and surface energy measurement



Confocal microscope











Optical microscope


 




Make know

Observations at all scale (optical microscopy, SEM, AFM), physical characterization (ellipsometry, EDS in SEM), topography characterization (optical and mechanical profilometer), surface energy (water droplet contact angle).


AFM image of photonic crystal



AFM image of a membrane

3D image with the optical profilometer (MEMS-RF)








Topogrphy image (left) and leakage current (right) obtain with tunneling mode on NiFe/PTCTE/Co layer.