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The MINAS area gathers 7 research groups:

  • Power management System Integration (ISGE),
  • MIicro and Nanosystems for Communication (MINC),
  • Systems Nanoengineering and Integration (N2IS),
  • Microwaves and Opto microwaves for Telecommunication Systems (MOST),
  • Microdevices and Microsystems of Detection (M2D),
  • Nano Bio Systems (NBS),
  • Photonics.

The research activity covers all the aspects of development from modeling and design, through complete technological integration, to functional characterization. The main topical areas are:

  • the modeling and simulation of micro and nanosystems with the twofold aim to develop a virtual prototyping approach and to propose an  atomic scale approach enabling a close understanding and monitoring of molecular mechanisms.

  • MEMS/NEMS and MOEMS: micro and nanoresonators, pressure and temperature sensors, gas sensors, bio and chemical sensors, adaptative and ophthalmic optical systems.

  • RF and microwave systems: RF MEMS, high quality sources, microwaves circuits, opto-hyper coupling

  • Autonomous systems and energy monitoring: systems and devices for energy conversion, micro sources, energy harvesting

  • Power devices for embedded systems: electrical switches using large gap materials, electrothermal modeling, power integration and passive devices, high frequencies conversion systems, ESD protection

  • Nanophotonics and photonic integration : advanced diodes, silicon nanophotonics, III-V nanophotonics

  • BioMEMS and Nanobiosystems, micro/nanofluidic systems : molecular motors, detection nanosystems, lab on chips.


Technological development and manufacturing are operated in a 1500m2 clean room, supported by a staff of 30 engineers and technicians (TEAM). Characterization of micro and nano-systems are performed in a 800m² instrumental platform where electronic, radio frequency, optical and bio-chemical characterizations can be addressed.