Séminaire du thème MNBT :

Designing Piezoelectric Films for Microelectromechanical Systems (MEMS)

Le 21 Mars 2013 à 14h30

Intervenant

Susan Trolier-McKinstry
Prof.
Pennsylvania State University


Lieu

LAAS-CNRS - Salle Europe

7 avenue du Colonel Roche

31077 TOULOUSE Cedex 4

Résumé

Piezoelectric thin films are of increasing interest in low voltage microelectromechanical systems (MEMS) for sensing, actuation, and energy harvesting.  They also serve as model systems to study fundamental behavior in piezoelectrics. Piezoelectric MEMS devices range over a wide range of length scales.  On the extreme upper end are large area devices for applications such as adaptive optics. In this case, the piezoelectric film can be used to produce local deformation of a mirror surface, in order to correct figure errors associated with fabrication of the component or to correct for atmospheric distortion.  For example, should a mission such as Gen-X be flown, it would require up to 10,000 m² of actuatable optics in order to correct the figures of the nested hyperboloid reflecting segments. In this case, the “micro” in “microelectromechanical systems” is clearly a misnomer, although the fabrication techniques would involve conventional micromachining for patterning of the electrodes. Many Piezoelectric MEMS devices are fabricated at intermediate length scales (tens of microns to 1 cm).  Here, examples will be given of piezoelectric energy harvesting devices.  We have recently demonstrated improvements in the energy harvesting figure of merit for the piezoelectric layer by factors of 4 – 10. Finally, piezoelectric MEMS are also attracting attention at a substantially smaller size scale (tens of nm) as a potential replacement for CMOS electronics. Examples of the materials choice as well as specific devices at all three of these length scales will also be discussed.

Biographie : Susan Trolier-McKinstry is a professor of ceramic science and engineering and director of the W. M. Keck Smart Materials Integration Laboratory at the Pennsylvania State University. Her principal research interests include structure-processing- property relations in dielectric and piezoelectric thin films and MEMS devices. She is a Fellow of the American Ceramic Society, an academician of the World Academy of Ceramics, a Fellow of IEEE, and a member of MRS and its board of Directors.


Mot(s)-clé(s) : Microelectromechanical Systems - piezoelectric thin films




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